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公开(公告)号:US09536585B2
公开(公告)日:2017-01-03
申请号:US14904979
申请日:2014-05-28
发明人: Mengxin Liu , Xin Liu , Fazhan Zhao , Zhengsheng Han
IPC分类号: G11C11/34 , G11C11/419
CPC分类号: G11C11/34 , G11C11/412 , G11C11/419
摘要: The present invention provides an improved SRAM memory cell based on a DICE structure, which comprises following structures: four inverter structures formed through arranging PMOS transistors and NMOS transistors in series, wherein the part between the drains of a PMOS transistor and an NMOS transistor serves as a storage node; each storage node controls the gate voltage of an NMOS transistor of the other inverter structure and of a PMOS transistor of another inverter structure; a transmission structure consisting of four NMOS transistors, whose source, gate and drain are respectively connected with a bit line/bit bar line, a word line and a storage node. The use of an improved SRAM memory cell based on a DICE structure not only avoids such defects as small static noise margin and being prone to transmission error facing the traditional cell structures consisting of 6 transistors, but also resolves the problem that the current SRAM storage cells based on a DICE structure can easily be affected by the electrical level of storage nodes. This effectively improves reliability of storage cells.
摘要翻译: 本发明提供了一种基于DICE结构的改进的SRAM存储单元,其包括以下结构:通过串联布置PMOS晶体管和NMOS晶体管而形成的四个反相器结构,其中PMOS晶体管的漏极和NMOS晶体管之间的部分用作 存储节点; 每个存储节点控制另一个逆变器结构的NMOS晶体管的栅极电压和另一个反相器结构的PMOS晶体管的栅极电压; 由四个NMOS晶体管组成的传输结构,其源极,栅极和漏极分别与位线/位线条,字线和存储节点连接。 基于DICE结构的改进的SRAM存储单元的使用不仅避免了由6个晶体管组成的传统单元结构面临的小静态噪声容限和易发生传输错误等缺陷,而且解决了当前SRAM存储单元 基于DICE结构可以容易地受到存储节点电平的影响。 这有效地提高了存储单元的可靠性。
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公开(公告)号:US20140239385A1
公开(公告)日:2014-08-28
申请号:US14346223
申请日:2012-09-21
发明人: Jinshun Bi , Chaohe Hai , Zhengsheng Han , Jiajun Luo
CPC分类号: H01L29/7835 , H01L21/2815 , H01L29/66666 , H01L29/7827
摘要: A Field Effect Transistor (FET) and a method of manufacturing the same are provided. The FET may include a substrate; a source and a drain, one of which is formed on a bulge formed on a top surface of the substrate, and the other of which is formed in the substrate below but laterally offset from the bulge; a gate formed at a position where the bulge and the top surface of the substrate join each other; and a gate dielectric layer formed between the gate and the bulge and also between the gate and the top surface of the substrate. The FET has a vertical configuration, where the source is disposed on top of the bulge while the drain is disposed in the substrate, that is, the source and the drain are not in one same plane. As a result, the FET may have its area significantly reduced. Therefore, it is possible to improve an integration density of an IC and thus reduce cost.
摘要翻译: 提供场效应晶体管(FET)及其制造方法。 FET可以包括衬底; 源极和漏极,其中一个形成在形成在基板的顶表面上的凸起上,另一个形成在基板的下方但横向偏离凸起; 形成在所述凸起和所述基板的上表面的位置的栅极彼此连接的栅极; 以及在栅极和凸起之间以及栅极和衬底的顶表面之间形成的栅极电介质层。 FET具有垂直配置,其中源设置在凸起的顶部,而漏极设置在衬底中,即源极和漏极不在同一平面中。 结果,FET可能使其面积显着降低。 因此,可以提高IC的集成密度,从而降低成本。
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公开(公告)号:US09626467B2
公开(公告)日:2017-04-18
申请号:US14415275
申请日:2012-09-21
发明人: Jianhui Bu , Jinshun Bi , Jiajun Luo , Zhengsheng Han
IPC分类号: G06F17/50 , H01L29/417 , H01L29/78
CPC分类号: G06F17/5036 , H01L29/41758 , H01L29/78
摘要: The present invention provides a SOI MOS device modeling method. The SOI MOS device is one having a source-drain injection not reaching the bottom. The method comprises: a) establishing an overall model comprising a primary MOS device model simulating an SOI MOS device having the source-drain injection reaching the bottom, a source body PN junction bottom capacitance model simulating a source body PN junction bottom capacitance, and a drain body PN junction bottom capacitance model simulating a drain body PN junction bottom capacitance; and b) extracting parameters respectively for the primary MOS device model, the source body PN junction bottom capacitance model, and the drain body PN junction bottom capacitance model in the overall model. In the prior art, the source body junction bottom capacitance and the drain body junction bottom capacitance in the SOI MOS device having a source-drain injection not reaching the bottom affect the performances of the device. The modeling method of the present invention takes the effect into consideration, improves model precision, and can be effectively used for the simulation design of a device.
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公开(公告)号:US09111995B2
公开(公告)日:2015-08-18
申请号:US14364984
申请日:2012-10-25
发明人: Yinxue Lv , Jinshun Bi , Jiajun Luo , Zhengsheng Han , Tianchun Ye
IPC分类号: H01L21/762 , H01L21/265 , H01L21/324
CPC分类号: H01L21/76243 , H01L21/263 , H01L21/26506 , H01L21/26533 , H01L21/31155 , H01L21/324 , H01L21/7624
摘要: A method for improving anti-radiation performance of SOI structure that includes implementing particle implantations of high-energy neutrons, protons and γ-rays to a buried oxide layer of an SOI structure, and then performing annealing process. The high-energy particle implantation introduces displacement damage to the buried oxide layer of the SOI structure.
摘要翻译: 一种用于提高SOI结构的抗辐射性能的方法,其包括将高能中子,质子和γ射线的粒子注入到SOI结构的掩埋氧化物层,然后进行退火处理。 高能粒子注入对SOI结构的掩埋氧化层引入位移损伤。
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公开(公告)号:US20150170915A1
公开(公告)日:2015-06-18
申请号:US14395444
申请日:2012-09-21
发明人: Jinshun Bi , Jiajun Luo , Zhengsheng Han
IPC分类号: H01L21/02 , H01L21/84 , H01L29/10 , H01L21/033 , H01L29/423 , H01L29/06 , H01L21/266 , H01L21/265
CPC分类号: H01L21/02592 , H01L21/0334 , H01L21/26506 , H01L21/266 , H01L21/76251 , H01L21/84 , H01L29/0649 , H01L29/1033 , H01L29/42364 , H01L29/66757 , H01L29/66772 , H01L29/78618
摘要: The present invention provides a method for manufacturing a semiconductor structure, which is characterized in comprising following steps: providing an SOI substrate for forming a semiconductor structure; the SOI substrate comprises a monocrystalline silicon top layer, a buried oxide layer and a support substrate; and forming an amorphous region outside the area for forming a channel region of the semiconductor structure in the monocrystalline silicon top layer. The method provided by the present invention can effectively improve reliability of a gate dielectric layer formed on the SOI substrate.
摘要翻译: 本发明提供一种制造半导体结构的方法,其特征在于包括以下步骤:提供用于形成半导体结构的SOI衬底; SOI衬底包括单晶硅顶层,掩埋氧化物层和支撑衬底; 以及在所述单晶硅顶层中形成半导体结构的沟道区域的区域之外形成非晶区域。 本发明提供的方法可以有效地提高在SOI衬底上形成的栅介质层的可靠性。
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公开(公告)号:US20160260474A1
公开(公告)日:2016-09-08
申请号:US14904979
申请日:2014-05-28
发明人: Mengxin Liu , Xin Liu , Fazhan Zhao , Zhengsheng Han
IPC分类号: G11C11/419
CPC分类号: G11C11/34 , G11C11/412 , G11C11/419
摘要: The present invention provides an improved SRAM memory cell based on a DICE structure, which comprises following structures: four inverter structures formed through arranging PMOS transistors and NMOS transistors in series, wherein the part between the drains of a PMOS transistor and an NMOS transistor serves as a storage node; each storage node controls the gate voltage of an NMOS transistor of the other inverter structure and of a PMOS transistor of another inverter structure; a transmission structure consisting of four NMOS transistors, whose source, gate and drain are respectively connected with a bit line/bit bar line, a word line and a storage node. The use of an improved SRAM memory cell based on a DICE structure not only avoids such defects as small static noise margin and being prone to transmission error facing the traditional cell structures consisting of 6 transistors, but also resolves the problem that the current SRAM storage cells based on a DICE structure can easily be affected by the electrical level of storage nodes. This effectively improves reliability of storage cells.
摘要翻译: 本发明提供了一种基于DICE结构的改进的SRAM存储单元,其包括以下结构:通过串联布置PMOS晶体管和NMOS晶体管而形成的四个反相器结构,其中PMOS晶体管的漏极和NMOS晶体管之间的部分用作 存储节点; 每个存储节点控制另一个逆变器结构的NMOS晶体管的栅极电压和另一个反相器结构的PMOS晶体管的栅极电压; 由四个NMOS晶体管组成的传输结构,其源极,栅极和漏极分别与位线/位线条,字线和存储节点连接。 基于DICE结构的改进的SRAM存储单元的使用不仅避免了由6个晶体管组成的传统单元结构面临的小静态噪声容限和易发生传输错误等缺陷,而且解决了当前SRAM存储单元 基于DICE结构可以容易地受到存储节点电平的影响。 这有效地提高了存储单元的可靠性。
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公开(公告)号:US20150177312A1
公开(公告)日:2015-06-25
申请号:US14407170
申请日:2012-09-21
发明人: Jianhui Bu , Jinshun Bi , Jiajun Luo , Zhengsheng Han
CPC分类号: G01R31/2648 , G01N27/041 , H01L22/14
摘要: The present invention provides a method for determining PN junction depth comprising: a) measuring a square resistance in a well region; b) forming a junction type field effect transistor in the well region, changing a gate electrode voltage and measuring a source-drain resistance; c) calculating the PN junction depth according to the measured square resistance, source-drain resistance and related process parameters of the junction type field effect transistor. As compared with the prior art, the technical solution in this invention determines the PN junction depth by electrical measurement, is thus simple and feasible, and has better repeatability.
摘要翻译: 本发明提供了一种用于确定PN结深度的方法,包括:a)测量阱区中的平方电阻; b)在阱区中形成结型场效应晶体管,改变栅极电压并测量源极 - 漏极电阻; c)根据测得的方形电阻,源极漏极电阻和结型场效应晶体管的相关工艺参数计算PN结深度。 与现有技术相比,本发明的技术方案通过电测量确定PN结深度,因此简单可行,具有更好的重复性。
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公开(公告)号:US20140349463A1
公开(公告)日:2014-11-27
申请号:US14364984
申请日:2012-10-25
发明人: Yinxue Lv , Jinshun Bi , Jiajun Luo , Zhengsheng Han , Tianchun Ye
IPC分类号: H01L21/762 , H01L21/324 , H01L21/265
CPC分类号: H01L21/76243 , H01L21/263 , H01L21/26506 , H01L21/26533 , H01L21/31155 , H01L21/324 , H01L21/7624
摘要: The present invention provides a method for improving anti-radiation performance of SOI structure comprising following steps: implementing particle implantations of high-energy neutrons, protons and γ-rays to an SOI structure, and then performing annealing process. The present invention aims to improving anti-radiation performance of SOI devices by means of introducing displacement damage into a buried oxide layer through implantation of high-energy particles.
摘要翻译: 本发明提供一种提高SOI结构抗辐射性能的方法,包括以下步骤:将高能中子,质子和γ射线的粒子注入到SOI结构中,然后进行退火处理。 本发明旨在通过植入高能粒子将置换损伤引入掩埋氧化物层来提高SOI器件的抗辐射性能。
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