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公开(公告)号：US11610754B2
公开(公告)日：2023-03-21
申请号：US17294468
申请日：2018-12-06
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28
摘要： An object of the invention is to provide a charged particle beam device capable of specifying an irradiation position of light on a sample when there is no mechanism for forming an image of backscattered electrons. The charged particle beam device according to the invention determines whether an irradiation position of a primary charged particle beam and an irradiation position of light match based on a difference between a first observation image acquired when the sample is irradiated with only the primary charged particle beam and a second observation image acquired when sample is irradiated with the light in addition to the primary charged particle beam. It is determined whether the irradiation position of the primary charged particle beam and the irradiation position of the light match using the first observation image and a measurement result by a light amount measuring device.
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公开(公告)号：US11183362B2
公开(公告)日：2021-11-23
申请号：US16765737
申请日：2017-11-27
IPC分类号： H01J37/28 , H01J37/22 , H01J37/285
摘要： A charged particle beam apparatus includes: an electromagnetic wave generation source 16 that generates an electromagnetic wave with which a sample is irradiated; a charged particle optical system that includes a pulsing mechanism 3 and irradiates the sample with a focused charged particle beam; a detector 10 that detects an emitted electron emitted by an interaction between the charged particle beam and the sample; a first irradiation control unit 15 that controls the electromagnetic wave generation source and irradiates the sample with a pulsed electromagnetic wave to generate an excited carrier; a second irradiation control unit 14 that controls the pulsing mechanism and irradiates an electromagnetic wave irradiation region of the sample with a pulsed charged particle beam; and a timing control unit 13. While the emitted electrons are detected by the detector in synchronization with irradiation of the pulsed charged particle beam, the timing control unit controls the first irradiation control unit and the second irradiation control unit, and controls an interval time between the pulsed electromagnetic wave and the pulsed charged particle beam to the electromagnetic wave irradiation region. As a result, based on a transient change in an electron emission amount, it is possible to detect sample information with nano spatial resolution.
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公开(公告)号：US12027342B2
公开(公告)日：2024-07-02
申请号：US18363284
申请日：2023-08-01
发明人： Yuta Imai , Masahiro Sasajima , Yoshihiro Takahoko
IPC分类号： H01J37/14 , H01J37/12 , H01J37/145 , H01J37/15 , H01J37/21 , H01J37/28 , H01J37/141
CPC分类号： H01J37/145 , H01J37/15 , H01J37/21 , H01J37/12 , H01J37/141 , H01J37/28
摘要： A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens resulting from a deceleration electric field with an axis of a magnetic field lens. The charged particle beam device includes: an electron source; an objective lens that focuses a probe electron beam from the electron source on a sample; a first beam tube and a second beam tube through each of which the probe electron beam passes; a deceleration electrode arranged between the first beam tube and a sample; a first voltage source that forms a deceleration electric field for the probe electron beam between the first beam tube and the deceleration electrode by applying a first potential to the first beam tube; and a first moving mechanism that moves a position of the first beam tube.
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公开(公告)号：US11342155B2
公开(公告)日：2022-05-24
申请号：US17056285
申请日：2018-05-22
发明人： Yuta Imai , Masahiro Sasajima , Yoshihiro Takahoko
IPC分类号： H01J37/145 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/28
摘要： In a charged particle beam device including a deceleration optical system, a change in a deceleration electric field and an axis shift due to a structure between an objective lens and a sample are prevented to reduce adverse effects on an irradiation system and detection system. The charged particle beam device includes an electron source, an objective lens configured to focus a probe electron beam from the electron source on the sample, an acceleration electrode configured to accelerate the probe electron beam, a first detector provided in the acceleration electrode, a deceleration electrode configured to form a deceleration electric field for the probe electron beam with the acceleration electrode, the probe electron beam being configured to pass through an opening of the deceleration electrode, and a second detector inserted between the deceleration electrode and the sample. The second detector includes an opening portion larger than the opening of the deceleration electrode, and a sensing surface is provided around the opening portion.
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公开(公告)号：US11043358B2
公开(公告)日：2021-06-22
申请号：US16486422
申请日：2017-05-12
发明人： Ryoko Araki , Natsuki Tsuno , Yohei Nakamura , Masahiro Sasajima , Mitsuhiro Nakamura , Toshihide Agemura
IPC分类号： H01J37/00 , H01J37/24 , H01J37/10 , H01J37/244 , H01J37/28
摘要： A measuring apparatus that irradiates a sample with a charged particle beam to observe the sample includes a particle source that outputs the charged particle beam, a lens that collects the charged particle beam, a detector that detects a signal of emitted electrons emitted from the sample which is irradiated with the charged particle beam, and a control device that controls the output of the charged particle beam and the detection of the signal of the emitted electrons in accordance with an observation condition, in which the control device sets, as the observation condition, a first parameter for controlling an irradiation cycle of the charged particle beam, a second parameter for controlling a pulse width of the pulsed charged particle beam, and a third parameter for controlling detection timing of the signal of the emitted electron within the irradiation time of the pulsed charged particle beam, and the third parameter is determined in accordance with a difference in intensity of signals of the plurality of the emitted electrons emitted from the irradiation position of the charged particle beam.
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公开(公告)号：US11764028B2
公开(公告)日：2023-09-19
申请号：US17056993
申请日：2018-05-22
发明人： Yuta Imai , Masahiro Sasajima , Yoshihiro Takahoko
IPC分类号： H01J37/14 , H01J37/15 , H01J37/21 , H01J37/28 , H01J37/145 , H01J37/12 , H01J37/141
CPC分类号： H01J37/145 , H01J37/15 , H01J37/21 , H01J37/12 , H01J37/141 , H01J37/28
摘要： A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens resulting from a deceleration electric field with an axis of a magnetic field lens. The charged particle beam device includes: an electron source; an objective lens that focuses a probe electron beam from the electron source on a sample; a first beam tube and a second beam tube through each of which the probe electron beam passes; a deceleration electrode arranged between the first beam tube and a sample; a first voltage source that forms a deceleration electric field for the probe electron beam between the first beam tube and the deceleration electrode by applying a first potential to the first beam tube; and a first moving mechanism that moves a position of the first beam tube.
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公开(公告)号：US20220013326A1
公开(公告)日：2022-01-13
申请号：US17294468
申请日：2018-12-06
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28
摘要： An object of the invention is to provide a charged particle beam device capable of specifying an irradiation position of light on a sample when there is no mechanism for forming an image of backscattered electrons. The charged particle beam device according to the invention determines whether an irradiation position of a primary charged particle beam and an irradiation position of light match based on a difference between a first observation image acquired when the sample is irradiated with only the primary charged particle beam and a second observation image acquired when sample is irradiated with the light in addition to the primary charged particle beam. It is determined whether the irradiation position of the primary charged particle beam and the irradiation position of the light match using the first observation image and a measurement result by a light amount measuring device.
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公开(公告)号：US20200294764A1
公开(公告)日：2020-09-17
申请号：US16765737
申请日：2017-11-27
IPC分类号： H01J37/28 , H01J37/22 , H01J37/285
摘要： A charged particle beam apparatus includes: an electromagnetic wave generation source 16 that generates an electromagnetic wave with which a sample is irradiated; a charged particle optical system that includes a pulsing mechanism 3 and irradiates the sample with a focused charged particle beam; a detector 10 that detects an emitted electron emitted by an interaction between the charged particle beam and the sample; a first irradiation control unit 15 that controls the electromagnetic wave generation source and irradiates the sample with a pulsed electromagnetic wave to generate an excited carrier; a second irradiation control unit 14 that controls the pulsing mechanism and irradiates an electromagnetic wave irradiation region of the sample with a pulsed charged particle beam; and a timing control unit 13. While the emitted electrons are detected by the detector in synchronization with irradiation of the pulsed charged particle beam, the timing control unit controls the first irradiation control unit and the second irradiation control unit, and controls an interval time between the pulsed electromagnetic wave and the pulsed charged particle beam to the electromagnetic wave irradiation region. As a result, based on a transient change in an electron emission amount, it is possible to detect sample information with nano spatial resolution.
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