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公开(公告)号：US11961701B2
公开(公告)日：2024-04-16
申请号：US17603225
申请日：2019-04-24
发明人： Tomoharu Nagashima , Kazuki Ikeda , Wen Li , Masashi Wada , Hajime Kawano
IPC分类号： H01J37/22 , G06F3/04847 , H01J37/28
CPC分类号： H01J37/222 , G06F3/04847 , H01J37/28 , H01J2237/2448
摘要： When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.
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公开(公告)号：US11239052B2
公开(公告)日：2022-02-01
申请号：US16900176
申请日：2020-06-12
发明人： Toshiyuki Yokosuka , Chahn Lee , Hideyuki Kazumi , Hajime Kawano , Shahedul Hoque , Kumiko Shimizu , Hiroyuki Takahashi
IPC分类号： H01J37/28 , H01J37/147 , H01J37/20 , H01J37/22
摘要： The scanning charged particle beam microscope according to the present application is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.
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公开(公告)号：US11062892B2
公开(公告)日：2021-07-13
申请号：US16070790
申请日：2017-01-25
IPC分类号： G01T1/20 , H01J49/02 , H01J37/244 , G01T1/24
摘要： The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.
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公开(公告)号：US20240222064A1
公开(公告)日：2024-07-04
申请号：US18390046
申请日：2023-12-20
发明人： Mayuka OSAKI , Shgunki Tsuboya , Hajime Kawano
IPC分类号： H01J37/153 , H01J37/22 , H01J37/244 , H01J37/285 , H01J37/30 , H01J37/304
CPC分类号： H01J37/153 , H01J37/222 , H01J37/226 , H01J37/244 , H01J37/3005 , H01J37/3045 , H01J37/285 , H01J2229/507 , H01J2231/50047
摘要： A multi-beam charged-particle microscope apparatus 100 includes an irradiation system 104 that irradiates a plurality of regions on a surface of a sample 9 with a plurality of beams, a detection system 125 (correction detector 132 and imaging detector 131) that detects emitted electrons from the surface of the sample 9, and a controller 102 that generates a first brightness of a first pixel in a first region based on a first signal of a first detector of a multi-detector 123 and generates a second brightness of a second pixel in a second region based on a second signal of a second detector. A processor of a processor system 103 that can communicate with the charged-particle microscope apparatus 100 specifies a first crosstalk amount from a second emitted electron to the first signal based on the first brightness obtained from the charged-particle microscope apparatus 100 and an output of the correction detector 132 and corrects the first brightness based on the first crosstalk amount.
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公开(公告)号：US20220328281A1
公开(公告)日：2022-10-13
申请号：US17638275
申请日：2019-09-20
IPC分类号： H01J37/22 , H01J37/28 , H01J37/244
摘要： A charged particle beam device includes a plurality of detectors configured to detect one or more signal charged particle beams caused by irradiation on a sample with one or more primary charged particle beams, and a control system. The control system is configured to measure an intensity distribution of the one or more signal charged particle beams detected by the plurality of detectors, and correct the intensity distribution by using a correction function. The control system is configured to generate an image based on the corrected intensity distribution.
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公开(公告)号：US11443914B2
公开(公告)日：2022-09-13
申请号：US16967989
申请日：2018-12-18
摘要： The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).
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公开(公告)号：US20220037107A1
公开(公告)日：2022-02-03
申请号：US17278848
申请日：2018-09-25
发明人： Soichiro Matsunaga , Souichi Katagiri , Keigo Kasuya , Aki Takei , Hajime Kawano , Takashi Doi
IPC分类号： H01J37/073 , H01J37/10
摘要： To stabilize an amount of electron beam emitted from a thermoelectric field emission electron source. A thermoelectric field emission electron source includes: an electron source 301 having a needle shape; a metal wire 302 to which the electron source is fixed and configured to heat the electron source; a stem 303 fixed to an insulator and configured to energize the metal wire; a first electrode 304 having a first opening portion 304a and arranged such that a tip of the electron source protrudes from the first opening portion; a second electrode 306 having a second opening portion 306a; and an insulating body 307 configured to position the first electrode and the second electrode such that a central axis of the first opening portion and a central axis of the second opening portion coincide with each other, and provide electrical insulation between the first electrode and the second electrode, so as to provide a structure in which an amount of gas released when the first electrode is heated is reduced.
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公开(公告)号：US12125667B2
公开(公告)日：2024-10-22
申请号：US17638275
申请日：2019-09-20
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28
CPC分类号： H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/24514 , H01J2237/2803
摘要： A charged particle beam device includes a plurality of detectors configured to detect one or more signal charged particle beams caused by irradiation on a sample with one or more primary charged particle beams, and a control system. The control system is configured to measure an intensity distribution of the one or more signal charged particle beams detected by the plurality of detectors, and correct the intensity distribution by using a correction function. The control system is configured to generate an image based on the corrected intensity distribution.
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公开(公告)号：US11798780B2
公开(公告)日：2023-10-24
申请号：US17563186
申请日：2021-12-28
发明人： Toshiyuki Yokosuka , Chahn Lee , Hideyuki Kazumi , Hajime Kawano , Shahedul Hoque , Kumiko Shimizu , Hiroyuki Takahashi
IPC分类号： H01J37/28 , H01J37/147 , H01J37/20 , H01J37/22
CPC分类号： H01J37/28 , H01J37/147 , H01J37/20 , H01J37/22 , H01J2237/2803 , H01J2237/2806 , H01J2237/2817 , H01J2237/2826 , H01J2237/3045
摘要： The scanning charged particle beam microscope according to the present application is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.
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公开(公告)号：US11227740B2
公开(公告)日：2022-01-18
申请号：US16644871
申请日：2017-09-07
发明人： Soichiro Matsunaga , Yasunari Sohda , Souichi Katagiri , Makoto Sakakibara , Hajime Kawano , Takashi Doi
IPC分类号： H01J37/063 , H01J37/141 , H01J37/244 , H01J37/28 , H01J37/248 , H01J37/295
摘要： In order to provide an electron gun capable of maintaining a small spot diameter of a beam converged on a sample even when a probe current applied to the sample is increased, a magnetic field generation source 301 is provided with respect to an electron gun including: an electron source 101; an extraction electrode 102 configured to extract electrons from the electron source 101; an acceleration electrode 103 configured to accelerate the electrons extracted from the electron source 101; and a first coil 104 and a first magnetic path 201 having an opening on an electron source side, the first coil 104 and the first magnetic path 201 forming a control lens configured to converge an electron beam emitted from the acceleration electrode 103. The magnetic field generation source is provided for canceling a magnetic field, at an installation position of the electron source 101, generated by the first coil 104 and the first magnetic path 201.
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