公开(公告)号：US20150040670A1

公开(公告)日：2015-02-12

申请号：US14381827

申请日：2013-01-25

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Kiyoko Yamanaka ,  Heewon Jeong ,  Masahide Hayashi

IPC: G01P15/08

CPC classification number: G01P15/0802 ,  B81B2201/0242 ,  B81B2207/01 ,  B81C1/00238 ,  B81C2203/0792 ,  G01C19/5783 ,  G01P1/02 ,  G01P15/125 ,  G01P15/18 ,  H01L24/06 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/04042 ,  H01L2224/05554 ,  H01L2224/06155 ,  H01L2224/06164 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/49171 ,  H01L2224/49177 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/1461 ,  H01L2924/16195 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2924/00012

Abstract: In a sensor module capable of changing a detection axis to detect a physical quantity, when a pad is provided at a location other than a corner point of an LSI-side, for the purpose of solving problems such as an increase in a chip surface area and an increase in development costs, caused by guide wiring for connecting the pad, the inertial sensor module is provided with: a first sensor element (100) having a first pad group (120), a second pad group (130) electrically connected to the first pad group and disposed at a location rotated 90 degrees with respect to the first pad group, and a detection axis; and an LSI (202) which controls the first sensor element. In the inertial sensor module, the first sensor element is disposed along a first side of the LSI, a plurality of third pad groups (203) is disposed along a second side intersecting the first side of the LSI, and the third pad group is electrically connected to either the first pad group or the second pad group.

Abstract translation: 在能够改变检测轴以检测物理量的传感器模块中，当在LSI侧的角点以外的位置设置焊盘时，为了解决诸如芯片表面积的增加的问题 并且由于用于连接焊盘的引导线引起的显影成本的增加，惯性传感器模块具有：第一传感器元件（100），具有第一焊盘组（120），第二焊盘组（130），电连接到 所述第一焊盘组并且设置在相对于所述第一焊盘组旋转90度的位置和检测轴; 以及控制第一传感器元件的LSI（202）。 在惯性传感器模块中，第一传感器元件沿着LSI的第一侧布置，沿着与LSI的第一侧相交的第二侧设置有多个第三焊盘组（203），并且第三焊盘组电 连接到第一焊盘组或第二焊盘组。

公开(公告)号：US09890037B2

公开(公告)日：2018-02-13

申请号：US15502554

申请日：2015-06-29

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Masahide Hayashi ,  Masashi Yura ,  Heewon Jeong

IPC: B81B7/00 ,  G01C19/574

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C99/0045 ,  G01C19/574 ,  G01P15/08 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

公开(公告)号：US09651408B2

公开(公告)日：2017-05-16

申请号：US14773122

申请日：2013-12-20

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Takanori Aono ,  Masahide Hayashi ,  Heewon Jeong

IPC: B81B1/00 ,  G01D11/24 ,  G01C19/5783

CPC classification number: G01D11/245 ,  G01C19/5783 ,  G01P1/023

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.

公开(公告)号：US10551192B2

公开(公告)日：2020-02-04

申请号：US15313242

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC: G01C19/5726 ,  G01C19/5755 ,  G01P15/18 ,  G01C19/5769 ,  G01P15/097 ,  G01C19/5776 ,  G01P15/125

Abstract: An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

公开(公告)号：US09970956B2

公开(公告)日：2018-05-15

申请号：US13930011

申请日：2013-06-28

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Yuhua Zhang ,  Heewon Jeong ,  Kiyoko Yamanaka ,  Masahide Hayashi

IPC: G01P15/12 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

Abstract: A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different.

公开(公告)号：US10324107B2

公开(公告)日：2019-06-18

申请号：US15304243

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka ,  Daisuke Maeda

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  H01L29/84

Abstract: Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.

公开(公告)号：US09995762B2

公开(公告)日：2018-06-12

申请号：US15129963

申请日：2015-03-25

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masahide Hayashi ,  Heewon Jeong

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0834

Abstract: Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

公开(公告)号：US09557345B2

公开(公告)日：2017-01-31

申请号：US13921505

申请日：2013-06-19

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC: G01P15/125 ,  G01P3/483 ,  G01P15/08 ,  G01C19/5776

CPC classification number: G01P15/0888 ,  G01C19/5776 ,  G01P15/125 ,  G01P2015/0814

Abstract: In an inertial sensor, an acceleration sensor element section includes a first movable section configured to respond to acceleration applied thereto and a diagnosis electrode configured to displace the first movable section with an electrostatic force according to voltage application from a control circuit section. An angular velocity sensor element section includes a second movable section configured to respond to an angular velocity applied thereto and a driving electrode configured to displace the second movable section with an electrostatic force according to voltage application from the control circuit section. A voltage signal input to the driving electrode and a voltage signal input to the diagnosis electrode are the same voltage signal. The voltage signal input to the diagnosis electrode is a signal for detecting a mechanical failure. Carrier signal for detecting displacement of the first movable section has frequency higher than frequency of signal applied to the diagnosis electrode.

Abstract translation: 在惯性传感器中，加速度传感器元件部包括构成为响应于施加的加速度的第一可动部和构成为根据来自控制电路部的电压施加的静电力使第一可动部移位的诊断电极。 角速度传感器元件部分包括被配置为响应于施加到其上的角速度的第二可动部分和驱动电极，该驱动电极被配置为根据来自控制电路部分的电压施加的静电力使第二可移动部分移位。 输入到驱动电极的电压信号和输入到诊断电极的电压信号是相同的电压信号。 输入到诊断电极的电压信号是用于检测机械故障的信号。 用于检测第一可移动部分的位移的载波信号的频率高于施加到诊断电极的信号的频率。

公开(公告)号：US20150301075A1

公开(公告)日：2015-10-22

申请号：US14435841

申请日：2012-10-16

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Kiyoko Yamanaka ,  Heewon Jeong ,  Masahide Hayashi

IPC: G01P15/125 ,  G01P21/00

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B3/0072 ,  B81B2201/0235 ,  G01P1/006 ,  G01P15/0802 ,  G01P21/00 ,  G01P2015/0814

Abstract: A technique of preventing the function stop caused by false operation and false output of an inertial sensor by canceling a signal caused by applying of an acceleration other than a measurement signal before input to an LSI circuit is provided. An electrostatic-capacitance MEMS acceleration sensor 100 configured to include: a movable unit 104; a P-side first electrode pair formed of a detection movable electrode 105a and a detection fixed electrode 106a; a P-side second electrode pair formed of a detection movable electrode 105b and a detection fixed electrode 106b; an N-side first electrode pair formed of a detection movable electrode 109a and a detection fixed electrode 110a; and an N-side second electrode pair formed of a detection movable electrode 109b and a detection fixed electrode 110b, the movable unit 104 is supported at one point of a fixed portion 101 arranged on an inner side of the movable unit 104, and besides, the fixed portion 101 of the movable unit 104, a fixed portion 107 of the detection fixed electrode 106a, a fixed portion 108 of the detection fixed electrode 106b, a fixed portion 111 of the detection fixed electrode 110a, and a fixed portion 112 of the detection fixed electrode 110b are arranged on a line 116 perpendicular to a detection direction 115 of the MEMS acceleration sensor 100, and besides, the P-side first electrode pair and the N-side first electrode pair are arranged on one side of the fixed portion 101 of the movable unit 104, and the P-side second electrode pair and the N-side second electrode pair are arranged on the other side thereof.

Abstract translation: 提供一种通过在向LSI电路输入之前取消通过施加除了测量信号之外的加速度而引起的信号来防止由于误操作而引起的功能停止和惯性传感器的错误输出的技术。 一种静电电容MEMS加速度传感器100，被配置为包括：可移动单元104; 由检测可动电极105a和检测固定电极106a构成的P侧第一电极对; 由检测可动电极105b和检测用固定电极106b构成的P侧第二电极对; 由检测可动电极109a和检测固定电极110a形成的N侧第一电极对; 以及由检测用可动电极109b和检测用固定电极110b构成的N侧的第二电极对，在可动部104的内侧的固定部101的一个点支撑可动部104， 可移动单元104的固定部分101，检测固定电极106a的固定部分107，检测固定电极106b的固定部分108，检测固定电极110a的固定部分111和 检测用固定电极110b配置在垂直于MEMS加速度传感器100的检测方向115的线116上，此外，P侧第一电极对和N侧第一电极对配置在固定部的一侧 可动单元104的101，以及P侧第二电极对和N侧第二电极对配置在其另一侧。

公开(公告)号：US09939267B2

公开(公告)日：2018-04-10

申请号：US15304640

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Toshiaki Nakamura ,  Heewon Jeong ,  Masahide Hayashi

IPC: G01C19/5726 ,  H01L29/84

CPC classification number: G01C19/5726 ,  H01L29/84

Abstract: The purpose of the present invention is to provide an inertial force detection device that can more accurately detect faults in a temperature sensor. Provided is an inertial force detection device configured so that in a state where an oscillating body is made to oscillate in a first direction, the amount of displacement when the oscillating body is displaced in a second direction due to the generation of angular velocity is detected as angular velocity, wherein the inertial force detection device has a means for performing control so that the oscillating body enters a state of resonance in the first direction, a temperature detection means for detecting temperature, and a means for detecting faults in the temperature detection means, and outputs a plurality of signals, which indicate the fault detection results of the three means, continuously from a single signal wire.