公开(公告)号：US09651408B2

公开(公告)日：2017-05-16

申请号：US14773122

申请日：2013-12-20

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Takanori Aono ,  Masahide Hayashi ,  Heewon Jeong

IPC: B81B1/00 ,  G01D11/24 ,  G01C19/5783

CPC classification number: G01D11/245 ,  G01C19/5783 ,  G01P1/023

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.