公开(公告)号：US10989731B2

公开(公告)日：2021-04-27

申请号：US15763212

申请日：2016-08-03

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Daisuke Maeda ,  Masahide Hayashi ,  Masashi Yura ,  Akihiro Okamoto

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  H01L29/84 ,  B81B7/00

Abstract: To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

公开(公告)号：US09890037B2

公开(公告)日：2018-02-13

申请号：US15502554

申请日：2015-06-29

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Masahide Hayashi ,  Masashi Yura ,  Heewon Jeong

IPC: B81B7/00 ,  G01C19/574

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C99/0045 ,  G01C19/574 ,  G01P15/08 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

公开(公告)号：US09651408B2

公开(公告)日：2017-05-16

申请号：US14773122

申请日：2013-12-20

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Takanori Aono ,  Masahide Hayashi ,  Heewon Jeong

IPC: B81B1/00 ,  G01D11/24 ,  G01C19/5783

CPC classification number: G01D11/245 ,  G01C19/5783 ,  G01P1/023

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.