Invention Grant
- Patent Title: Acceleration sensor
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Application No.: US15129963Application Date: 2015-03-25
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Publication No.: US09995762B2Publication Date: 2018-06-12
- Inventor: Masahide Hayashi , Heewon Jeong
- Applicant: Hitachi Automotive Systems, Ltd.
- Applicant Address: JP Hitachinaka-shi
- Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee Address: JP Hitachinaka-shi
- Agency: Crowell & Moring LLP
- Priority: JP2014-077078 20140403
- International Application: PCT/JP2015/059015 WO 20150325
- International Announcement: WO2015/151946 WO 20151008
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.
Public/Granted literature
- US20170138981A1 Acceleration Sensor Public/Granted day:2017-05-18
Information query
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