公开(公告)号：US10989731B2

公开(公告)日：2021-04-27

申请号：US15763212

申请日：2016-08-03

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Daisuke Maeda ,  Masahide Hayashi ,  Masashi Yura ,  Akihiro Okamoto

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  H01L29/84 ,  B81B7/00

Abstract: To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

公开(公告)号：US09810734B2

公开(公告)日：2017-11-07

申请号：US14764067

申请日：2013-11-19

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Daisuke Maeda ,  Ichiroh Ohsaka ,  Masahide Hayashi

IPC: G01R31/28 ,  G01C19/5726 ,  G01P15/125 ,  G01P15/18 ,  G01C19/5776 ,  G01P21/00 ,  G01R31/02 ,  G01P15/08

CPC classification number: G01R31/2829 ,  G01C19/5726 ,  G01C19/5776 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/0814 ,  G01R31/025

Abstract: A compound sensor capable of suppressing a fault which has occurred in a detection element from affecting other detection units in which no fault has occurred is provided. The compound sensor includes: a plurality of detection units including C/V conversion circuits 321a and 321b, amplifier circuits 322a and 322b, ADCs 323a and 323b, diagnosis voltage outputting DACs 327a and 327b, carrier signal generating DACs 328a and 328b and substrate voltage generating DACs 329a and 329b which are signal detection circuits provided for each of a plurality of detection elements; a power source voltage input unit 331 and a GND voltage input unit 332 shared among each of the plurality of detection units; and overcurrent switch circuits 101a and 101b which are fault detection circuits for detecting a fault of each detection element and stopping power supply to the detection unit in which the fault has occurred.

公开(公告)号：US10459003B2

公开(公告)日：2019-10-29

申请号：US15554186

申请日：2016-03-17

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Kazuo Ono ,  Daisuke Maeda ,  Takashi Oshima

IPC: G01P15/125 ,  G01L9/12 ,  G01P15/08 ,  B81B3/00 ,  G01C19/5726 ,  G01D5/24

Abstract: In a capacitance detection type sensor system, a sensitivity of the sensor system deteriorates because a low frequency noise typified by a 1/f noise cannot be separated in frequency from a signal band. A carrier wave used for capacity detection is modulated with two kinds of frequencies, sampled at a first modulation frequency, subjected to a C/V conversion, and synchronously detected at a second modulation frequency to obtain a signal.

公开(公告)号：US10551192B2

公开(公告)日：2020-02-04

申请号：US15313242

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC: G01C19/5726 ,  G01C19/5755 ,  G01P15/18 ,  G01C19/5769 ,  G01P15/097 ,  G01C19/5776 ,  G01P15/125

Abstract: An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

公开(公告)号：US10955243B2

公开(公告)日：2021-03-23

申请号：US15576037

申请日：2016-04-26

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Daisuke Maeda ,  Kazuo Ono ,  Masahide Hayashi

IPC: G01C19/5776 ,  G01C21/16 ,  G01C25/00

Abstract: In an inertial sensor that includes an angular rate detection circuit having a structure synchronized with a resonant frequency of an angular rate detection element, an object thereof is to realize an angle output having high accuracy with less integration error in an integration circuit for detecting an angle. The inertial sensor includes an angular rate detection element chip C1 that has a mechanical structure for angular rate detection; and a signal processing LSI chip C2 that is angular rate detection circuit for detecting an angular rate from the angular rate detection element chip C1. The signal processing LSI chip C2 calculates an angle by sampling a signal obtained from the angular rate detection element chip C1 at a discrete time synchronized with a drive frequency of the angular rate detection element chip C1.

公开(公告)号：US10324107B2

公开(公告)日：2019-06-18

申请号：US15304243

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka ,  Daisuke Maeda

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  H01L29/84

Abstract: Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.

公开(公告)号：US09557345B2

公开(公告)日：2017-01-31

申请号：US13921505

申请日：2013-06-19

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC: G01P15/125 ,  G01P3/483 ,  G01P15/08 ,  G01C19/5776

CPC classification number: G01P15/0888 ,  G01C19/5776 ,  G01P15/125 ,  G01P2015/0814

Abstract: In an inertial sensor, an acceleration sensor element section includes a first movable section configured to respond to acceleration applied thereto and a diagnosis electrode configured to displace the first movable section with an electrostatic force according to voltage application from a control circuit section. An angular velocity sensor element section includes a second movable section configured to respond to an angular velocity applied thereto and a driving electrode configured to displace the second movable section with an electrostatic force according to voltage application from the control circuit section. A voltage signal input to the driving electrode and a voltage signal input to the diagnosis electrode are the same voltage signal. The voltage signal input to the diagnosis electrode is a signal for detecting a mechanical failure. Carrier signal for detecting displacement of the first movable section has frequency higher than frequency of signal applied to the diagnosis electrode.

Abstract translation: 在惯性传感器中，加速度传感器元件部包括构成为响应于施加的加速度的第一可动部和构成为根据来自控制电路部的电压施加的静电力使第一可动部移位的诊断电极。 角速度传感器元件部分包括被配置为响应于施加到其上的角速度的第二可动部分和驱动电极，该驱动电极被配置为根据来自控制电路部分的电压施加的静电力使第二可移动部分移位。 输入到驱动电极的电压信号和输入到诊断电极的电压信号是相同的电压信号。 输入到诊断电极的电压信号是用于检测机械故障的信号。 用于检测第一可移动部分的位移的载波信号的频率高于施加到诊断电极的信号的频率。