公开(公告)号：US08432886B2

公开(公告)日：2013-04-30

申请号：US12823822

申请日：2010-06-25

申请人： Hiroyuki Nakano

发明人： Hiroyuki Nakano

IPC分类号： H04B7/212

CPC分类号： H04W74/0808

摘要： A communication node, which performs ad hoc communication by occupying at least one time slot and transmitting a data block to one or a plurality of other nodes via the occupied at least one time slot through broadcasting, comprises a determination unit that determines an occupation time slot to be occupied by an own node in a frame used for transmitting the data block, based on occupation state data, a data block generating unit that generates the data block storing, in a control field, control data containing new occupation state data obtained by updating the occupation state data based on an occupation state of the occupation time slot, the data block being to be transmitted by the own node through the broadcasting, and a transmission unit that transmits the data block generated through the broadcasting via the occupation time slot.

摘要翻译： 一种通过占用至少一个时隙执行自组织通信并且经由所占用的至少一个时隙通过广播向一个或多个其他节点发送数据块的通信节点，包括：确定单元，其确定占用时隙 由用于发送数据块的帧中的自身节点占据，基于占用状态数据，生成在控制字段中存储包含通过更新获得的新的占用状态数据的控制数据的数据块的数据块生成单元 基于所述占用时隙的占有状态的所述占用状态数据，所述数据块将由所述自身节点通过所述广播发送;以及发送单元，其经由所述占用时隙发送通过所述广播生成的数据块。

公开(公告)号：US20110032515A1

公开(公告)日：2011-02-10

申请号：US12907895

申请日：2010-10-19

申请人： Akira HAMAMATSU ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Sachio Uto ,  Taketo Ueno ,  Hiroyuki Nakano ,  Takahiro Jingu ,  Hisashi Hatano ,  Yukihisa Mohara ,  Seiji Otani ,  Takahiro Togashi

发明人： Akira HAMAMATSU ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Sachio Uto ,  Taketo Ueno ,  Hiroyuki Nakano ,  Takahiro Jingu ,  Hisashi Hatano ,  Yukihisa Mohara ,  Seiji Otani ,  Takahiro Togashi

IPC分类号： G01N21/00

CPC分类号： G01N21/956

摘要： A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.

公开(公告)号：US07859656B2

公开(公告)日：2010-12-28

申请号：US12366956

申请日：2009-02-06

申请人： Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

发明人： Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

IPC分类号： G01N21/00 ,  G01N21/88 ,  H01L27/00

CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/956

摘要： An inspection system includes: a facility that uses wide-band illumination light having different wavelengths and single-wavelength light to perform dark-field illumination on an object of inspection, which has the surface thereof coated with a transparent film, in a plurality of illuminating directions at a plurality of illuminating angles; a facility that detects light reflected or scattered from repetitive patterns and light reflected or scattered from non-repetitive patterns with the wavelengths thereof separated from each other; a facility that efficiently detects light reflected or scattered from a foreign matter or defect in the repetitive patterns or non-repetitive patterns or a foreign matter or defect on the surface of the transparent film; and a facility that removes light, which is diffracted by the repetitive patterns, from a diffracted light image of actual patterns or design data representing patterns. Consequently, a more microscopic defect can be detected stably.

摘要翻译： 检查系统包括：使用具有不同波长的宽带照明光和单波长光的设备，在具有透明膜的表面上的多个照明中对被检查对象进行暗视场照明 多个照明角度的方向; 检测从重复图案反射或散射的光和从彼此分离的波长的非重复图案反射或散射的光的设备; 有效地检测异物反射或散射的光或重复图案或非重复图案中的缺陷或透明膜表面上的异物或缺陷的设备; 以及通过重复图案衍射的光从实际图案的衍射光图像或表示图案的设计数据中去除的设施。 因此，能够稳定地检测出更微细的缺陷。

公开(公告)号：US07751037B2

公开(公告)日：2010-07-06

申请号：US12435523

申请日：2009-05-05

申请人： Hiroyuki Nakano ,  Toshihiko Nakata ,  Sachio Uto ,  Akira Hamamatsu ,  Shunji Maeda ,  Yuta Urano

发明人： Hiroyuki Nakano ,  Toshihiko Nakata ,  Sachio Uto ,  Akira Hamamatsu ,  Shunji Maeda ,  Yuta Urano

IPC分类号： G01N21/958 ,  G01N21/88

CPC分类号： G01N21/956 ,  G01N21/47 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8822

摘要： A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for detecting defects includes a stage part on which a substrate specimen is put and which is arbitrarily movable in each of the X-Y-Z-θ directions, an illumination system for irradiating the circuit pattern with light from an inclined direction, and an image-forming optical system for forming an image of an irradiated detection area on a detector from the upward and oblique directions. With this arrangement, diffracted light and scattered light caused on the circuit pattern through the illumination by the illumination system is collected. Furthermore, a spatial filter is provided on a Fourier transform surface for blocking the diffracted light from a linear part of the circuit pattern. The scattered and reflected light received by the detector from the specimen is converted into an electrical signal. The converted electrical signal of one chip is compared with that of the other adjacent chip. If these signals are not identical to each other, the foreign matter is determined to exist on the specimen in detection.

摘要翻译： 提供一种用于检测缺陷的方法和装置，用于通过减少由于电路图案引起的噪声来检测对诸如氧化物膜的透明膜在内的待检查物体的高灵敏度的有害缺陷或异物。 用于检测缺陷的装置包括放置基板样本并可在X-Y-Z-中的每个中任意移动的台部; 方向，用于利用来自倾斜方向的光照射电路图案的照明系统，以及用于从上下方向在检测器上形成照射的检测区域的图像的图像形成光学系统。 利用这种布置，收集通过照明系统的照明在电路图案上产生的衍射光和散射光。 此外，在傅立叶变换表面上提供空间滤波器，用于阻挡来自电路图形的线性部分的衍射光。 由检测器从样本接收的散射和反射光被转换成电信号。 将一个芯片的转换电信号与另一个芯片的转换电信号进行比较。 如果这些信号彼此不相同，则检测到异物被确定为存在于样品上。

公开(公告)号：US07697845B2

公开(公告)日：2010-04-13

申请号：US11752331

申请日：2007-05-23

申请人： Yasuhiro Uchiyama ,  Hiroyuki Nakano

发明人： Yasuhiro Uchiyama ,  Hiroyuki Nakano

IPC分类号： H04J14/02 ,  H04B10/16

CPC分类号： H04J14/0283 ,  H04J14/0204 ,  H04J14/0206 ,  H04J14/0212 ,  H04J14/0213 ,  H04J14/0221 ,  H04J14/0227 ,  H04J14/0246 ,  H04J14/025

摘要： An optical add-drop function part of an optical add-drop multiplexer has an output end of transmitted light signal in which an optical termination mechanism formed by an optical detector for detecting open of an optical fiber, an optical switch, and an optical terminator are mounted. Further, a reflection level calculation circuit, a reflection warning determination circuit, and an optical switch selection circuit are mounted to perform laser safety in the optical add-drop function part as well. The laser safety part in the optical add-drop function part is operated earlier than the laser safety part in an optical amplification function part.

摘要翻译： 光分插复用器的光分插功能部分具有透射光信号的输出端，其中由用于检测光纤开路的光检测器形成的光终端机构，光开关和光终端器是 安装。 此外，安装反射电平计算电路，反射警告确定电路和光开关选择电路以在光学分插功能部件中执行激光安全。 光学放大功能部件中的激光安全部件比光放大功能部件中的激光安全部件早。

公开(公告)号：US20100014075A1

公开(公告)日：2010-01-21

申请号：US12504965

申请日：2009-07-17

申请人： Takeo Ueno ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

发明人： Takeo Ueno ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N2021/4792 ,  G01N2021/8848

摘要： An apparatus for inspecting a substrate surface is provided, which includes illumination optics for irradiating the substrate surface linearly with rectilinearly polarized light from an oblique direction, detection optics for acquiring images of the substrate surface, each of the images being formed by the light scattered from the light-irradiated substrate surface, and means for comparing an image selected as an inspection image from the plurality of substrate surface images that the detection optics has acquired to detect defects, and another image selected from the plural images of the substrate surface as a reference image different from the inspection image; the illumination optics being formed with polarization control means for controlling a polarizing direction of the light according to a particular scanning direction of the substrate or a direction orthogonal to the scanning direction.

公开(公告)号：US20090232475A1

公开(公告)日：2009-09-17

申请号：US12271640

申请日：2008-11-14

申请人： Hiroyuki Nakano ,  Takahisa Mori ,  Akihiro Mori

发明人： Hiroyuki Nakano ,  Takahisa Mori ,  Akihiro Mori

IPC分类号： H04N5/91

CPC分类号： H04N5/913 ,  G11B20/00086 ,  G11B20/0021 ,  G11B20/0055 ,  G11B20/00768 ,  G11B2220/2516 ,  G11B2220/65 ,  H04N5/765 ,  H04N5/781 ,  H04N5/85 ,  H04N5/907 ,  H04N2005/91364

摘要： According to one embodiment, a digital broadcast receiving/recording/reproducing apparatus has a receiving module which receives a broadcast signal of a program that is set to be recorded, a processing module which converts the broadcast signal received by the receiving module into digital picture and sound program data, a memory which records copy control information acquired from the broadcast signal received by the receiving module, a recording control module which encrypts the program data converted by the processing module and records the encrypted program data in a specified recording device, and a memory control module which encrypts the copy control information recorded in the memory and records the encrypted copy control information in the specified recording device and deletes the copy control information recorded in the memory after termination of the recording of the encrypted copy control information.

摘要翻译： 根据一个实施例，数字广播接收/记录/再现装置具有接收模块，其接收被设置为被记录的节目的广播信号;处理模块，其将由接收模块接收的广播信号转换为数字图像;以及 声音节目数据，记录从由接收模块接收的广播信号获取的复制控制信息的存储器，对由处理模块转换的节目数据进行加密并将加密的节目数据记录在指定的记录装置中的记录控制模块，以及 存储器控制模块，其对记录在存储器中的复制控制信息进行加密，并将加密的复制控制信息记录在指定的记录装置中，并且在加密的复制控制信息的记录结束之后删除记录在存储器中的复制控制信息。

公开(公告)号：US20090079973A1

公开(公告)日：2009-03-26

申请号：US12273174

申请日：2008-11-18

申请人： Sachio UTO ,  Hiroyuki Nakano

发明人： Sachio UTO ,  Hiroyuki Nakano

IPC分类号： G01N21/00

CPC分类号： G01N21/94 ,  G01N21/47 ,  G01N21/9501

摘要： The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a pattern defect occurring in manufacture of a device at a high speed and with a high sensitivity, an object to be inspected on which a transparent film is formed, is irradiated with a beam which is emitted from an illuminator whose illumination direction and illumination angle are selected from a plurality of choices to be optimum, so that scattered reflected light from a minute foreign particle defect on the object or the transparent film is effectively detected by eliminating a noise from the pattern formed on the object, and a detection optical system is optimized by evaluating and adjusting, with an image forming performance checker, an image forming performance of the detection optical system included in an inspecting apparatus.

摘要翻译： 本发明涉及用于在诸如半导体器件的衬底上形成电路图案的器件制造工艺。 为了能够在高速，高灵敏度的装置的制造中能够稳定地检查微小的外来粒子和图案缺陷，对要形成透明膜的检查对象进行照射， 从照明方向和照明角度从多个选择中选择为最佳的发光体发射，从而通过从形成的图案中消除噪声来有效地检测来自物体或透明膜上的微小异物缺陷的散射反射光 并且通过利用图像形成性能检查器评估和调整包括在检查装置中的检测光学系统的图像形成性能来优化检测光学系统。

公开(公告)号：US07415177B2

公开(公告)日：2008-08-19

申请号：US11798645

申请日：2007-05-15

申请人： Yasuyuki Fukashiro ,  Hiroyuki Nakano ,  Tetsuya Uda ,  Tooru Hirai

发明人： Yasuyuki Fukashiro ,  Hiroyuki Nakano ,  Tetsuya Uda ,  Tooru Hirai

IPC分类号： G02B6/34

CPC分类号： H04B10/2525

摘要： A dispersion compensating fiber whose chromatic dispersion is positive and a negative dispersion compensating fiber whose chromatic dispersion is negative are prepared, and division-multiplexed optical signals, after being guided to either dispersion compensating fiber to once shift the whole wavelength band to positivity or negativity, are subjected to fine adjustment with a dispersion compensating fiber of a reverse sign.

摘要翻译： 准备色散为正的色散补偿光纤和色散为负的负色散补偿光纤，并且在被分配复用光信号被引导到任一色散补偿光纤之后，将整个波长带一次移动到积极性或消极性， 用相反符号的色散补偿光纤进行微调。

公开(公告)号：US07355143B1

公开(公告)日：2008-04-08

申请号：US09763735

申请日：1999-12-27

申请人： Hiroyuki Nakano ,  Toshihiko Nakata ,  Masayoshi Serizawa ,  Hideaki Sasazawa

发明人： Hiroyuki Nakano ,  Toshihiko Nakata ,  Masayoshi Serizawa ,  Hideaki Sasazawa

IPC分类号： B23K10/00 ,  B23K26/00

CPC分类号： G01N15/0227 ,  G01N15/0211 ,  G01N2015/0216

摘要： Making it possible to execute the detection of the particles floating inside a processing chamber with the use of an optical system including one observing window and one unit (An object of the present invention is, by using an optical system including one observing window and one unit, to make it possible to execute the detection of the particles floating inside a processing chamber.) Also, in order to be able to detect exceedingly feeble particle scattered-lights with a high-accuracy, when performing a desired thin-film forming or thin-film processing treatment toward a to-be-processed target inside the processing chamber, the following method is employed: First, the irradiation with a beam is executed into the processing chamber through the observing window. Here, the beam is P-polarized and is intensity-modulated with a frequency differing from an exciting source's frequency and its integer-multiples, and the observing window has an inclination that forms Brewster angle toward the P-polarized incident beam. Next, backward scattered-lights scattered by the particles inside the processing chamber are received and image-photographed at a detecting optical system through the above-described one and the same observing window. Moreover, the above-described frequency component and a wavelength component of the above-described intensity-modulated beam are detected out of the received signals. Finally, the detected components and the image-photographed image information are used so as to judge the number, the size, and the distribution of the particles.

摘要翻译： 通过使用包括一个观察窗口和一个单元的光学系统，可以执行浮动在处理室内的颗粒的检测。本发明的目的是通过使用包括一个观察窗口和一个单元的光学系统 ，使得可以执行浮在处理室内的颗粒的检测。）此外，为了能够以高精度检测到极度​​微弱的粒子散射光，当进行所需的薄膜形成或薄 对处理室内的待处理靶材进行膜处理，采用以下方法：首先，通过观察窗口将光束照射进入处理室。 这里，光束是P偏振光并且以不同于激发光源的频率和其整数倍的频率进行强度调制，并且观察窗口具有朝向P偏振入射光束形成布鲁斯特角的倾斜度。 接下来，通过上述同一观察窗口，在检测光学系统中接收并处理由处理室内的颗粒散射的向后散射光并进行图像拍摄。 此外，从接收信号中检测出上述强度调制波束的上述频率分量和波长分量。 最后，使用检测到的分量和图像拍摄图像信息来判断粒子的数量，大小和分布。