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公开(公告)号：US06589009B1
公开(公告)日：2003-07-08
申请号：US09592411
申请日：2000-06-13
IPC分类号： F04D1904
CPC分类号： F04D19/042 , F04D29/522 , F04D29/701
摘要： A turbo-molecular pump includes a casing having an intake port, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section and a groove pumping section for evacuating gas. A scattering prevention member is provided for preventing fragments of the rotor from being scattered through the intake port.
摘要翻译： 涡轮分子泵包括壳体，其具有进气口，固定地安装在壳体中的定子和支撑在壳体中以相对于定子旋转的转子。 定子和转子构成涡轮叶片泵送部分和用于抽空气体的槽泵送部分。 提供防止转子碎片通过进气口散射的防散射构件。
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公开(公告)号：US08109744B2
公开(公告)日：2012-02-07
申请号：US12410780
申请日：2009-03-25
CPC分类号： F04D19/042 , F04D17/168 , F04D29/0513 , F04D29/28
摘要： An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, a main shaft for supporting the rotor blades, and a bearing and motor section having a motor for rotating the main shaft and a bearing mechanism for supporting the main shaft rotatably. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft.
摘要翻译： 无油涡轮真空泵能够将室内的气体从大气压降至高真空。 涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分，用于支撑转子叶片的主轴以及具有用于使主轴旋转的马达的轴承和马达部分以及用于 可旋转地支撑主轴。 气体轴承用作用于沿推力方向支撑主轴的轴承，在气体轴承的静止部分的两个表面上形成螺旋槽，并且具有螺旋槽的固定部分设置在上部旋转部分和 固定在主轴上的下部旋转部。
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公开(公告)号：US06343910B1
公开(公告)日：2002-02-05
申请号：US09531894
申请日：2000-03-21
IPC分类号： F01D136
CPC分类号： F04D19/046 , F04D19/044 , F04D27/0292 , F04D29/321
摘要： A turbo-molecular pump has a casing, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. A turbine blade pumping assembly and a thread groove pumping assembly for discharging gas molecules are disposed between the stator and the rotor. The rotor comprises at least two components constituting the turbine blade pumping assembly and the thread groove pumping assembly. The components are separable from each other at a predetermined position, and joined to each other to form the rotor.
摘要翻译： 涡轮分子泵具有壳体，固定地安装在壳体中的定子和支撑在壳体中以相对于定子旋转的转子。 涡轮叶片泵送组件和用于排放气体分子的螺纹槽泵送组件设置在定子和转子之间。 转子包括构成涡轮机叶片泵送组件和螺纹槽泵送组件的至少两个部件。 这些部件在预定位置彼此分离，并且彼此接合以形成转子。
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公开(公告)号：US06382249B1
公开(公告)日：2002-05-07
申请号：US09671745
申请日：2000-09-29
IPC分类号： C23C1600
CPC分类号： F04D25/00 , C23C16/4412 , F04D17/168 , F04D19/046 , Y10T137/86139 , Y10T137/86163
摘要： A vacuum exhaust system comprising a vacuum chamber; means for introducing a gas into the vacuum chamber; a main pump for exhausting the vacuum chamber and reducing a pressure of the vacuum chamber to a desired pressure; an auxiliary pump disposed downstream from the main pump; and piping for connecting them, wherein an outer diameter of connecting piping as a connection between the main pump and the auxiliary pump is ½ inch (12.7 mm) or less; and a length of the connecting piping and capability of the auxiliary pump are combined so that a back pressure of the main pump becomes 5 Torr or more. This vacuum exhaust system can realize cost reduction through a saving in entire space, simplification of piping construction work, and so on.
摘要翻译： 一种真空排气系统，包括一个真空室; 用于将气体引入真空室的装置; 用于排出真空室并将真空室的压力降低到所需压力的主泵; 辅助泵设置在主泵的下游; 和用于连接它们的管道，其中作为主泵和辅助泵之间的连接的连接管的外径为1/2英寸（12.7mm）或更小; 并且连接管道的长度和辅助泵的能力被组合，使得主泵的背压变为5托或更大。 该真空排气系统可以通过节省整个空间实现成本降低，简化管道施工工作等。
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公开(公告)号：US06585480B2
公开(公告)日：2003-07-01
申请号：US10035145
申请日：2002-01-04
IPC分类号： F01D136
CPC分类号： F04D19/046 , F04D19/044 , F04D27/0292 , F04D29/321
摘要： A turbo-molecular pump has a casing, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. A turbine blade pumping assembly and a thread groove pumping assembly for discharging gas molecules are disposed between the stator and the rotor. The rotor comprises at least two components constituting the turbine blade pumping assembly and the thread groove pumping assembly. The components are separable from each other at a predetermined position, and joined to each other to form the rotor.
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公开(公告)号：US06869890B2
公开(公告)日：2005-03-22
申请号：US10034373
申请日：2002-01-03
申请人： Nobuharu Noji , Hiroshi Sobukawa , Masami Nagayama , Koji Ono , Mutsumi Saito
发明人： Nobuharu Noji , Hiroshi Sobukawa , Masami Nagayama , Koji Ono , Mutsumi Saito
IPC分类号： B08B3/04 , C23C16/04 , C23C16/44 , H01L21/00 , H01L21/205 , H01L21/304 , H01L21/31
CPC分类号： C23C16/4409 , B08B3/04 , B08B3/041 , C23C16/04 , H01L21/67126
摘要： A processing apparatus is used for processing a workpiece such as a semiconductor wafer. The processing apparatus comprises a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.
摘要翻译： 处理装置用于处理诸如半导体晶片的工件。 该处理装置包括用于覆盖被加工物的表面的一部分的盖，由盖的加工室和待加工的工件的表面形成的处理室，以及设置在盖和 工件的表面用于密封加工室。
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7.发明授权Electro-optical inspection apparatus and method with dust or particle collection function 有权电光检测装置及方法，具有灰尘或颗粒收集功能公开(公告)号：US08624182B2
公开(公告)日：2014-01-07
申请号：US13195927
申请日：2011-08-02
申请人： Kenji Watanabe , Masahiro Hatakeyama , Yoshihiko Naito , Tatsuya Kohama , Kenji Terao , Takeshi Murakami , Takehide Hayashi , Kiwamu Tsukamoto , Hiroshi Sobukawa , Norio Kimura
发明人： Kenji Watanabe , Masahiro Hatakeyama , Yoshihiko Naito , Tatsuya Kohama , Kenji Terao , Takeshi Murakami , Takehide Hayashi , Kiwamu Tsukamoto , Hiroshi Sobukawa , Norio Kimura
IPC分类号： H01J37/244 , H01J37/285 , H01J37/29
CPC分类号： H01J37/22 , H01J37/265 , H01J37/29 , H01J2237/004 , H01J2237/022 , H01J2237/24495 , H01J2237/24564 , H01J2237/2817
摘要： An electro-optical inspection apparatus prevents adhesion of dust or particles to a sample surface, wherein a stage on which a sample is placed is disposed inside a vacuum chamber that can be evacuated, and a dust collecting electrode is disposed to surround a periphery of the sample. The dust collecting electrode is applied with a voltage having the same polarity as a voltage applied to the sample and an absolute value that is the same or larger than an absolute value of the voltage. Because dust or particles adhere to the dust collecting electrode, adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied.
摘要翻译： 电光检查装置防止灰尘或颗粒附着到样品表面，其中放置样品的阶段设置在可以抽真空的真空室内，并且集尘电极被设置成围绕 样品。 集尘电极施加与施加到样品的电压极性相同的电压，绝对值等于或大于电压的绝对值。 由于灰尘或颗粒附着在集尘电极上，所以可以减少灰尘或颗粒附着到样品表面。 代替使用集尘电极，可以在真空室的壁上形成凹部，或者在壁上设置具有施加了预定电压的网状结构的金属板。
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公开(公告)号：US20110266468A1
公开(公告)日：2011-11-03
申请号：US13184047
申请日：2011-07-15
申请人： Shinji NAGAI , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
发明人： Shinji NAGAI , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
IPC分类号： G21K5/00
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70858 , G03F7/70916 , G03F7/70983 , H05G2/005
摘要： An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point.
摘要翻译： 极紫外光源装置包括将目标供给到真空室中的目标供给单元，将激光输出到真空室中的激光振荡器，通过反射从目标发射的极紫外光而向外部输出极紫外光的集光镜 通过在真空室中的等离子体发光点用激光照射等离子体，以及离子碎片去除单元，其至少一部分位于包括等离子体发光点的遮蔽区域中。
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公开(公告)号：US08003963B2
公开(公告)日：2011-08-23
申请号：US12605725
申请日：2009-10-26
申请人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
发明人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
IPC分类号： G21K5/00
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70858 , G03F7/70916 , G03F7/70983 , H05G2/005
摘要： An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point.
摘要翻译： 极紫外光源装置包括将目标供给到真空室中的目标供给单元，将激光输出到真空室中的激光振荡器，通过反射从目标发射的极紫外光而向外部输出极紫外光的集光镜 通过在真空室中的等离子体发光点用激光照射等离子体，以及离子碎片去除单元，其至少一部分位于包括等离子体发光点的遮蔽区域中。
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公开(公告)号：US20090218506A1
公开(公告)日：2009-09-03
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译： 从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。 束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。 因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级 电子束充分分离。 此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。 因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。
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