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27 条记录 (耗时 0.018 秒)

    Turbo-molecular pump
    3.
    发明授权
    Turbo-molecular pump 有权
    涡轮分子泵

    公开(公告)号：US06343910B1

    公开(公告)日：2002-02-05

    申请号：US09531894

    申请日：2000-03-21

    申请人： Hiroyuki Kawasaki ,  Hiroshi Sobukawa

    发明人： Hiroyuki Kawasaki ,  Hiroshi Sobukawa

    IPC分类号： F01D136

    CPC分类号： F04D19/046 ,  F04D19/044 ,  F04D27/0292 ,  F04D29/321

    摘要： A turbo-molecular pump has a casing, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. A turbine blade pumping assembly and a thread groove pumping assembly for discharging gas molecules are disposed between the stator and the rotor. The rotor comprises at least two components constituting the turbine blade pumping assembly and the thread groove pumping assembly. The components are separable from each other at a predetermined position, and joined to each other to form the rotor.

    摘要翻译： 涡轮分子泵具有壳体，固定地安装在壳体中的定子和支撑在壳体中以相对于定子旋转的转子。 涡轮叶片泵送组件和用于排放气体分子的螺纹槽泵送组件设置在定子和转子之间。 转子包括构成涡轮机叶片泵送组件和螺纹槽泵送组件的至少两个部件。 这些部件在预定位置彼此分离，并且彼此接合以形成转子。

    ELECTRON BEAM APPARATUS
    7.
    发明申请
    ELECTRON BEAM APPARATUS 有权
    电子束设备

    公开(公告)号：US20090218506A1

    公开(公告)日：2009-09-03

    申请号：US11996701

    申请日：2006-07-24

    申请人： Mamoru Nakasuji ,  Takeshi Murakami ,  Tohru Satake ,  Tsutomu Karimata ,  Toshifumi Kimba ,  Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Satoshi Mori

    发明人： Mamoru Nakasuji ,  Takeshi Murakami ,  Tohru Satake ,  Tsutomu Karimata ,  Toshifumi Kimba ,  Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Satoshi Mori

    IPC分类号： H01J1/50 ,  A61N5/00 ,  H01J3/14

    CPC分类号： H01J37/05 ,  H01J37/147 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/057

    摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.

    摘要翻译： 从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。 束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。 因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级 电子束充分分离。 此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。 因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。

    Evacuation apparatus and evacuation method
    8.
    再颁专利
    Evacuation apparatus and evacuation method 失效
    疏散装置和撤离方法

    公开(公告)号：USRE36610E

    公开(公告)日：2000-03-14

    申请号：US883957

    申请日：1997-06-27

    申请人： Katsuya Okumura ,  Fumio Kuriyama ,  Yukio Murai ,  Manabu Tsujimura ,  Hiroshi Sobukawa

    发明人： Katsuya Okumura ,  Fumio Kuriyama ,  Yukio Murai ,  Manabu Tsujimura ,  Hiroshi Sobukawa

    IPC分类号： F04B37/06 ,  F04D19/04 ,  B01D8/00

    CPC分类号： F04D19/046 ,  F04B37/06

    摘要： An evacuation apparatus and method using a turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port of the turbomolecular pump is disclosed. A heat exchanger is provided at the suction port side of the turbomolecular pump to freeze-trap gas molecules from being cooled by a helium refrigerator.The gate valve is disposed upstream of the heat exchanger and is provided in a suction pipe which extends between the vacuum vessel and the turbomolecular pump. In exhausting the vacuum vessel, the gate valve is opened and, in this state, the turbomolecular pump and the helium refrigerator are run. During regeneration, the gate valve is closed, the turbomolecular pump is run, and the heat exchanger is heated by means of a heater or by operation of the helium refrigator being suspended, thereby sublimating molecules freeze-trapped in the heat exchanger.

    摘要翻译： 一种使用涡轮分子泵的排气装置和方法，该涡轮分子泵具有设置有多个转子叶片的转子和设置有多个定子叶片的间隔件，使得气体分子从吸入口被吸入， 公开了涡轮分子泵。 在涡轮分子泵的吸入口侧设置有热交换器，以将气体分子冷冻而不被氦制冷机冷却。 闸阀设置在热交换器的上游，并且设置在在真空容器和涡轮分子泵之间延伸的吸入管中。 在排空真空容器时，打开闸阀，在这种状态下运行涡轮分子泵和氦制冷机。 在再生期间，闸阀关闭，涡轮分子泵运行，并且热交换器通过加热器或通过悬浮的氦气回流器的操作被加热，从而升华分子被冻结在热交换器中。

    ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTICLE COLLECTION FUNCTION
    9.
    发明申请
    ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTICLE COLLECTION FUNCTION 有权
    电光检测装置和方法与尘埃或颗粒收集功能

    公开(公告)号：US20120074316A1

    公开(公告)日：2012-03-29

    申请号：US13195927

    申请日：2011-08-02

    申请人： Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Tatsuya KOHAMA ,  Kenji TERAO ,  Takeshi MURAKAMI ,  Takehide HAYASHI ,  Kiwamu TSUKAMOTO ,  Hiroshi SOBUKAWA ,  Norio KIMURA

    发明人： Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Tatsuya KOHAMA ,  Kenji TERAO ,  Takeshi MURAKAMI ,  Takehide HAYASHI ,  Kiwamu TSUKAMOTO ,  Hiroshi SOBUKAWA ,  Norio KIMURA

    IPC分类号： G01N23/20 ,  G01N23/00

    CPC分类号： H01J37/22 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2817

    摘要： An electro-optical inspection apparatus is provided that is capable of preventing adhesion of dust or particles to the sample surface as much as possible. A stage (100) on which a sample (200) is placed is disposed inside a vacuum chamber (112) that can be evacuated to vacuum, and a dust collecting electrode (122) is disposed to surround a periphery of the sample (200). The dust collecting electrode (122) is applied with a voltage having the same polarity as a voltage applied to the sample (200) and an absolute value that is the same or larger than an absolute value of the voltage. Thus, because dust or particles such as particles adhere to the dust collecting electrode (122), adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber containing the stage, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied. In addition, adhesion of dust or particles can be further reduced by disposing a gap control plate (124) having a through hole (124a) at the center above the sample (200) and the dust collecting electrode (122).

    摘要翻译： 提供一种电光检查装置，其能够尽可能地防止灰尘或颗粒附着到样品表面。 将其上放置有样品（200）的载物台（100）设置在能够抽真空的真空室（112）的内部，并且设置集尘电极（122）以包围样品（200）的周围， 。 集尘电极（122）施加与施加到样品（200）的电压相同极性的电压和与电压的绝对值相同或更大的绝对值。 因此，由于灰尘或颗粒例如颗粒附着在集尘电极122上，所以可以降低灰尘或颗粒对样品表面的粘附。 代替使用集尘电极，可以在包含载物台的真空室的壁上形成凹部，或者在壁上配置具有施加了预定电压的网状结构的金属板。 此外，通过在样品（200）上方的中心和集尘电极（122）设置具有通孔（124a）的间隙控制板（124），可以进一步减少灰尘或颗粒的附着。

    Turbo vacuum pump
    10.
    发明授权
    Turbo vacuum pump 有权
    涡轮真空泵

    公开(公告)号：US08109744B2

    公开(公告)日：2012-02-07

    申请号：US12410780

    申请日：2009-03-25

    申请人： Hiroyuki Kawasaki ,  Hiroaki Ogamino ,  Hiroshi Sobukawa

    发明人： Hiroyuki Kawasaki ,  Hiroaki Ogamino ,  Hiroshi Sobukawa

    IPC分类号： F04B37/14 ,  F04B37/10

    CPC分类号： F04D19/042 ,  F04D17/168 ,  F04D29/0513 ,  F04D29/28

    摘要： An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, a main shaft for supporting the rotor blades, and a bearing and motor section having a motor for rotating the main shaft and a bearing mechanism for supporting the main shaft rotatably. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft.

    摘要翻译： 无油涡轮真空泵能够将室内的气体从大气压降至高真空。 涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分，用于支撑转子叶片的主轴以及具有用于使主轴旋转的马达的轴承和马达部分以及用于 可旋转地支撑主轴。 气体轴承用作用于沿推力方向支撑主轴的轴承，在气体轴承的静止部分的两个表面上形成螺旋槽，并且具有螺旋槽的固定部分设置在上部旋转部分和 固定在主轴上的下部旋转部。