发明授权
- 专利标题： Turbo-molecular pump
- 专利标题（中）： 涡轮分子泵
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申请号： US09592411申请日： 2000-06-13
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公开(公告)号： US06589009B1公开(公告)日： 2003-07-08
- 发明人: Atsushi Shiokawa , Matsutaro Miyamoto , Hiroyuki Kawasaki , Hiroshi Sobukawa , Hiroaki Ogamino
- 申请人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroyuki Kawasaki , Hiroshi Sobukawa , Hiroaki Ogamino
- 优先权： JP11-166637 19990614
- 主分类号： F04D1904
- IPC分类号： F04D1904
摘要：
A turbo-molecular pump includes a casing having an intake port, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section and a groove pumping section for evacuating gas. A scattering prevention member is provided for preventing fragments of the rotor from being scattered through the intake port.
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