公开(公告)号：US07001014B2

公开(公告)日：2006-02-21

申请号：US10381995

申请日：2001-09-26

申请人： Hideo Torii ,  Takeshi Kamada ,  Isaku Kanno ,  Ryoichi Takayama

发明人： Hideo Torii ,  Takeshi Kamada ,  Isaku Kanno ,  Ryoichi Takayama

IPC分类号： B41J2/45

CPC分类号： C01G25/006 ,  C01P2002/34 ,  H01L41/094 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric thin film can achieve a large piezoelectric displacement. A chemical composition of the piezoelectric thin film is expressed by Pb1+a(ZrxTi1−x)O3+a(0.2≦a≦0.6 and 0.50≦x≦0.62). The crystal structure of the piezoelectric thin film is a mixture of a perovskite columnar crystal region (24) having an ionic defect in which a portion of the constitutive elements of an oxygen ion, a titanium ion, and a zirconium ion is missing and a perovskite columnar crystal region (25) of stoichiometric composition having no ionic defect. This configuration allows a residual compressive stress in the crystal to be relaxed by the perovskite columnar crystal region (24) having an ionic defect, thus achieving a large piezoelectric displacement (displacement amount).

摘要翻译： 压电薄膜可实现较大的压电位移。 压电薄膜的化学组成由Pb 1 + a（Zr x 1 Ti 1-x O）O 3+表示， （0.2 <= a <= 0.6和0.50 <= x <= 0.62）。 压电薄膜的晶体结构是具有离子缺陷的钙钛矿柱状晶体区域（24）的混合物，其中一部分氧离子，钛离子和锆离子的构成元素缺失，钙钛矿 没有离子缺陷的化学计量组成的柱状晶体区域（25）。 这种结构允许通过具有离子缺陷的钙钛矿柱状晶体区域（24）使晶体中的残余压缩应力松弛，从而实现大的压电位移（位移量）。

公开(公告)号：US20050001868A1

公开(公告)日：2005-01-06

申请号：US10833116

申请日：2004-04-28

申请人： Hiroyuki Matsuba ,  Tohru Nakagawa ,  Hideo Torii ,  Takeshi Kamada ,  Kazunari Chikanawa ,  Hiroaki Nakashima ,  Seishi Tomari

发明人： Hiroyuki Matsuba ,  Tohru Nakagawa ,  Hideo Torii ,  Takeshi Kamada ,  Kazunari Chikanawa ,  Hiroaki Nakashima ,  Seishi Tomari

IPC分类号： B41J2/14 ,  B41J2/155 ,  B41J29/38

CPC分类号： B41J2/155 ,  B41J2/14233 ,  B41J2/1433 ,  B41J2002/14362 ,  B41J2002/14475 ,  B41J2002/14491 ,  B41J2202/20

摘要： An ink jet recording apparatus, which performs printing by ink ejection, comprises a pressure chamber in which ink liquid is filled; a nozzle hole 116 which is formed communicating with the pressure chamber; a piezoelectric element 113 which is formed on the pressure chamber, and deforms the pressure chamber by mechanical expansion and contraction, whereby pressure is generated in the pressure chamber and ink is ejected from the nozzle hole 116; and a dew point control unit 123 which keeps a dew point in an atmosphere of the piezoelectric element 113 and the vicinity of the piezoelectric element 113 at a lower value than a dew point in an environment where the ink jet recording apparatus is set. The dew point control unit 123 comprises a compressor 123a, and an air drier 123b which dries compression gas from this compressor 123a and feeds it to the piezoelectric element 113.

摘要翻译： 通过喷墨进行打印的喷墨记录装置包括其中填充有墨液的压力室; 与压力室连通的喷嘴孔116; 压电元件113，其形成在压力室上，并且通过机械膨胀和收缩使压力室变形，由此在压力室中产生压力，并且从喷嘴孔116喷射墨; 以及露点控制单元123，其在设置有喷墨记录装置的环境中，将压电元件113的气氛中的露点和压电元件113的附近保持在低于露点的值。 露点控制单元123包括压缩机123a和干燥来自该压缩机123a的压缩气体并将其馈送到压电元件113的空气干燥器123b。

公开(公告)号：US6105225A

公开(公告)日：2000-08-22

申请号：US600863

申请日：1996-02-09

申请人： Hideo Torii ,  Takeshi Kamada ,  Shigenori Hayashi ,  Ryoichi Takayama ,  Takashi Hirao ,  Masumi Hattori

发明人： Hideo Torii ,  Takeshi Kamada ,  Shigenori Hayashi ,  Ryoichi Takayama ,  Takashi Hirao ,  Masumi Hattori

IPC分类号： G01P15/08 ,  G01P15/09 ,  H01L41/29 ,  H01L41/22

CPC分类号： G01P15/0922 ,  G01P15/0802 ,  H01L41/0478 ,  H01L41/0815 ,  H01L41/313 ,  Y10T29/42 ,  Y10T29/4981

摘要： A method of manufacturing a small, light, highly accurate and inexpensive thin film sensor element is disclosed. The thin film sensor element comprises a sensor holding substrate having an opening part and a multilayer film structure adhered thereon. The multilayer film structure comprises a first electrode film, a second electrode film, and a piezoelectric dielectric oxide film present between the first and second electrode films. The method of manufacturing the thin film sensor element comprises the steps of: forming the multilayer film structure by forming the first electrode film having a (100) plane orientation on a surface of an alkali halide substrate, forming the piezoelectric dielectric oxide thereon, and forming the second electrode film on the piezoelectric dielectric oxide; adhering the multilayer film structure on the surface of the sensor holding substrate having the opening part; and dissolving and removing the alkali halide substrate with water.

摘要翻译： 公开了一种制造小型，轻型，高精度和廉价的薄膜传感器元件的方法。 薄膜传感器元件包括具有开口部分和粘附在其上的多层膜结构的传感器保持基板。 多层膜结构包括第一电极膜，第二电极膜和存在于第一和第二电极膜之间的压电电介质氧化物膜。 制造薄膜传感器元件的方法包括以下步骤：通过在碱金属卤化物衬底的表面上形成具有（100）面取向的第一电极膜来形成多层膜结构，在其上形成压电电介质氧化物，并形成 压电电介质氧化物上的第二电极膜; 将多层膜结构粘附在具有开口部的传感器保持基板的表面上; 并用水溶解和除去碱金属卤化物基质。

公开(公告)号：US08556387B2

公开(公告)日：2013-10-15

申请号：US10833290

申请日：2004-04-28

申请人： Hiroaki Nakashima ,  Kazunari Chikanawa ,  Seishi Tomari ,  Hiroyuki Matsuba ,  Tohru Nakagawa ,  Hideo Torii ,  Takeshi Kamada

发明人： Hiroaki Nakashima ,  Kazunari Chikanawa ,  Seishi Tomari ,  Hiroyuki Matsuba ,  Tohru Nakagawa ,  Hideo Torii ,  Takeshi Kamada

IPC分类号： B41J2/14

CPC分类号： B41J2/155 ,  B41J2/14233 ,  B41J2/1433 ,  B41J2002/14362 ,  B41J2002/14475 ,  B41J2002/14491 ,  B41J2202/20

摘要： An ink jet head unit including a head (2) in which a plurality of nozzle arrays (2a, 2b, 2c, 2d) are formed. Each of the nozzle arrays has a number of nozzle holes, and ink can be ejected from the nozzle holes. The head (2) is mounted on the head base, and flat cables (4a, 4b) are connected at one end to mounting parts (7a, 7b), which are interposed between a first pair of the nozzle arrays (2a, 2b) and a second pair of the nozzle arrays (2c, 2d). The flat cables are flexibly formed by covering transmission wires with an insulation film. The flat cables are connected to the head to transmit ink ejection signals for driving the head.

摘要翻译： 一种喷墨头单元，包括形成多个喷嘴阵列（2a，2b，2c，2d）的头部（2）。 每个喷嘴阵列具有多个喷嘴孔，并且墨水可以从喷嘴孔喷出。 头部（2）安装在头部基座上，扁平电缆（4a，4b）的一端连接到安装部分（7a，7b），安装部分插在第一对喷嘴阵列（2a，2b）之间， 和第二对喷嘴阵列（2c，2d）。 扁平电缆通过用绝缘膜覆盖传输线而灵活地形成。 扁平电缆连接到头部以传输用于驱动头部的喷墨信号。

公开(公告)号：US5719740A

公开(公告)日：1998-02-17

申请号：US595240

申请日：1996-02-01

申请人： Shigenori Hayashi ,  Takeshi Kamada ,  Hideo Torii ,  Takashi Hirao

发明人： Shigenori Hayashi ,  Takeshi Kamada ,  Hideo Torii ,  Takashi Hirao

IPC分类号： G01D5/241 ,  G01L9/00 ,  G01P15/125 ,  H01G7/00 ,  G01L9/12

CPC分类号： G01L9/0072 ,  G01D5/2417 ,  G01P15/125 ,  Y10T29/43

摘要： A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material such as KBr into a through-hole, forming a conductive thin film on the surface, and dissolving and removing the alkali halide material. An insulating plate disposed with a through-hole in the thickness direction is filled with a molten alkali halide material such as KBr. After forming a conductive thin film on the surface of the alkali halide material filled into the through-hole and the vicinity thereof, the alkali halide material is dissolved by water and removed. In this way, a diaphragm is made of the through-hole and the conductive thin film. A curve of the diaphragm caused by a pressure difference between the both faces of the conductive thin film is detected as a capacitance change between the conductive thin film and the electrode layer.

摘要翻译： 通过将诸如KBr的碱金属卤化物材料填充到通孔中，在表面上形成导电薄膜，并溶解和除去碱金属卤化物材料，获得小而高灵敏度的电容式压力传感器。 在厚度方向上设置有通孔的绝缘板填充有诸如KBr的熔融卤化碱材料。 在填充到通孔及其附近的碱金属卤化物材料的表面上形成导电薄膜之后，碱金属卤化物材料被水溶解并除去。 以这种方式，隔膜由通孔和导电薄膜制成。 由导电薄膜的两面之间的压力差引起的隔膜的曲线被检测为导电薄膜和电极层之间的电容变化。