APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
    4.
    发明申请

    公开(公告)号:US20190172677A1

    公开(公告)日:2019-06-06

    申请号:US16200421

    申请日:2018-11-26

    Abstract: A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross-talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti-scanning deflection unit performs the anti-scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.

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