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    Optical device, and laser chamber and gas laser apparatus using the same
    3.
    发明授权
    Optical device, and laser chamber and gas laser apparatus using the same 有权
    光学装置，以及使用其的激光室和气体激光装置

    公开(公告)号：US09093814B2

    公开(公告)日：2015-07-28

    申请号：US14220956

    申请日：2014-03-20

    Applicant: Gigaphoton Inc.

    Inventor： Takahito Kumazaki ,  Kouji Kakizaki ,  Masanori Yashiro

    IPC: H01S3/00 ,  H01S3/038 ,  G02B5/20 ,  G03F7/20

    CPC classification number: H01S3/038 ,  G02B5/208 ,  G03F7/20 ,  G03F7/70025 ,  H01S3/034 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/225

    Abstract: An optical device includes a plate-like optical element made of a calcium fluoride crystal, a holding member to sandwich and hold the optical element, a seal member provided between the holding member and one surface of the optical element in close contact therewith, and a cushioning member provided between the holding member and the other surface of the optical element in contact therewith. The cushioning member is made of one of a 304 stainless steel, a 303 stainless steel, a 316 stainless steel, a Hastelloy™ alloy, a carbon steel for machine construction S45C, and Inconel™.

    Abstract translation: 光学装置包括由氟化钙晶体制成的板状光学元件，夹持并保持光学元件的保持构件，设置在保持构件与光学元件的与其紧密接触的一个表面之间的密封构件， 缓冲构件设置在保持构件与光学元件的与其接触的另一表面之间。 缓冲构件由304不锈钢，303不锈钢，316不锈钢，Hastelloy™合金，用于机械结构S45C的碳素钢和Inconel™中的一种制成。

    Laser apparatus
    5.
    发明授权
    Laser apparatus 有权
    激光设备

    公开(公告)号：US09071036B2

    公开(公告)日：2015-06-30

    申请号：US13895524

    申请日：2013-05-16

    Applicant: Gigaphoton Inc.

    Inventor： Takahito Kumazaki ,  Takashi Onose ,  Osamu Wakabayashi

    IPC: H01S3/10 ,  H01S3/081 ,  H01S3/106 ,  H01S3/137 ,  H01S3/1055 ,  H01S3/225 ,  H01S3/08 ,  H01S3/13

    CPC classification number: H01S3/10069 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0805 ,  H01S3/0811 ,  H01S3/0812 ,  H01S3/1055 ,  H01S3/106 ,  H01S3/1306 ,  H01S3/137 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

    Abstract: A laser apparatus may include an optical resonator, a laser chamber, an optical loss adjustment mechanism, and a spectral line width adjustment mechanism. The optical resonator includes a mirror configured to reflect a part of light and a grating. The laser chamber is provided in the optical resonator and contains a laser gain medium, configured to emit a laser beam. The optical loss adjustment mechanism is provided in the optical resonator and configured to adjust an optical loss of the laser beam. The spectral line width adjustment mechanism is provided in the optical resonator and configured to adjust a spectral line width of the laser beam.

    Abstract translation: 激光装置可以包括光学谐振器，激光室，光学损失调整机构和光谱线宽度调节机构。 光学谐振器包括被配置为反射一部分光和光栅的反射镜。 激光室设置在光学谐振器中并且包含被配置为发射激光束的激光增益介质。 光损耗调整机构设置在光谐振器中并且被配置为调整激光束的光损失。 光谱线宽度调节机构设置在光学谐振器中并且被配置为调整激光束的谱线宽度。

    Laser device and electronic device manufacturing method
    6.
    发明授权
    Laser device and electronic device manufacturing method 有权

    公开(公告)号：US12300962B2

    公开(公告)日：2025-05-13

    申请号：US18177088

    申请日：2023-03-01

    Applicant: Gigaphoton Inc.

    Inventor： Takahito Kumazaki ,  Osamu Wakabayashi

    IPC: H01S3/137 ,  G03F7/00 ,  H01S3/13

    Abstract: A laser device includes a first actuator configured to adjust an oscillation wavelength of pulse laser light; a second actuator configured to adjust a spectral line width of the pulse laser light; and a processor configured to determine a target spectral line width by reading data specifying a number of irradiation pulses of the pulse laser light with which one location of an irradiation receiving object is irradiated and a difference between a shortest wavelength and a longest wavelength, control the second actuator based on the target spectral line width, and control the first actuator so that the oscillation wavelength periodically changes every number of the irradiation pulses between the shortest wavelength and the longest wavelength.

    Line narrowing device, electronic device manufacturing method
    7.
    发明授权
    Line narrowing device, electronic device manufacturing method 有权

    公开(公告)号：US12111577B2

    公开(公告)日：2024-10-08

    申请号：US17818916

    申请日：2022-08-10

    Applicant: Gigaphoton Inc.

    Inventor： Takahito Kumazaki ,  Osamu Wakabayashi

    IPC: G03F7/00 ,  H01S3/08 ,  H01S3/106

    CPC classification number: G03F7/70025 ,  H01S3/08009 ,  H01S3/106

    Abstract: A line narrowing device includes first and second prisms disposed at positions different in a wavelength dispersion direction of any of the first and second prisms, a third prism disposed on the optical path of an optical beam and through which the beam width of the optical beam is enlarged and first and second parts of the optical beam are incident on the first and second prisms, respectively, a grating disposed across the optical path of the first part having passed through the first prism and the optical path of the second part having passed through the second prism, a first actuator configured to adjust the incident angle of the first part on the grating, a second actuator configured to adjust the incident angle of the second part on the grating, and a third actuator configured to adjust an energy ratio of the first and second parts.

    Line narrowed laser apparatus
    8.
    发明授权
    Line narrowed laser apparatus 有权

    公开(公告)号：US10283927B2

    公开(公告)日：2019-05-07

    申请号：US16033030

    申请日：2018-07-11

    Applicant: Gigaphoton Inc.

    Inventor： Hiroshi Furusato ,  Takeshi Ohta ,  Natsuhiko Kouno ,  Osamu Wakabayashi ,  Takahito Kumazaki

    IPC: H01S3/134 ,  H01S3/08 ,  H01S3/11 ,  H01S3/034 ,  H01S3/038 ,  H01S3/137 ,  H01S3/22

    Abstract: The line narrowed laser apparatus configured to perform a plurality of burst oscillations including a first burst oscillation and a second burst oscillation next to the first burst oscillation to output a pulse laser beam. The line narrowed laser apparatus comprises a laser resonator, a chamber provided in the laser resonator, a pair of electrodes provided in the chamber, an electric power source configured to apply a pulsed voltage to the pair of electrodes, a wavelength-selecting element provided in the laser resonator, a spectral width varying unit provided in the laser resonator, a wavelength variable unit configured to change a selected wavelength selected by the wavelength-selecting element, and a controller. The controller is configured to control the wavelength variable unit based on an amount of control of the spectral width varying unit in a period from a time of ending the first burst oscillation to a time of starting the second burst oscillation.

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