Invention Grant
- Patent Title: Line narrowed laser apparatus
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Application No.: US16033030Application Date: 2018-07-11
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Publication No.: US10283927B2Publication Date: 2019-05-07
- Inventor: Hiroshi Furusato , Takeshi Ohta , Natsuhiko Kouno , Osamu Wakabayashi , Takahito Kumazaki
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/134
- IPC: H01S3/134 ; H01S3/08 ; H01S3/11 ; H01S3/034 ; H01S3/038 ; H01S3/137 ; H01S3/22

Abstract:
The line narrowed laser apparatus configured to perform a plurality of burst oscillations including a first burst oscillation and a second burst oscillation next to the first burst oscillation to output a pulse laser beam. The line narrowed laser apparatus comprises a laser resonator, a chamber provided in the laser resonator, a pair of electrodes provided in the chamber, an electric power source configured to apply a pulsed voltage to the pair of electrodes, a wavelength-selecting element provided in the laser resonator, a spectral width varying unit provided in the laser resonator, a wavelength variable unit configured to change a selected wavelength selected by the wavelength-selecting element, and a controller. The controller is configured to control the wavelength variable unit based on an amount of control of the spectral width varying unit in a period from a time of ending the first burst oscillation to a time of starting the second burst oscillation.
Public/Granted literature
- US20180323568A1 LINE NARROWED LASER APPARATUS Public/Granted day:2018-11-08
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