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公开(公告)号：US4647266A
公开(公告)日：1987-03-03
申请号：US523817
申请日：1983-08-15
Applicant: George L. Coad , Martin A. Hutchinson , R. Howard Shaw
Inventor： George L. Coad , Martin A. Hutchinson , R. Howard Shaw
IPC: C23C14/34 , C23C14/56 , H01L21/00 , H01L21/687 , C23C15/00
CPC classification number: H01L21/67109 , C23C14/34 , C23C14/56 , H01L21/68707 , Y10S414/138 , Y10S414/139
Abstract: An elevator structure is actuated to remove wafers individually out of a storage cassette to an elevated delivery position. The elevator is a lift blade with an arcuate upper end shaped to match the curvature of the wafers, and a groove within this end adapted to match the thickness of a wafer and retain a wafer edgewise. A wafer-holding chuck on a chuck assembly is adapted to receive a wafer from the elevator when the elevator is in the elevated delivery position. The chuck assembly is movable from the delivery position to a remote position where the chuck presents the wafer to a support member. The support member is provided with an aperture and a plurality of deformable wafer-holding clips spaced around the aperture. The chuck assembly includes a pneumatic cylinder capable of contacting a portion of each clip to urge same to an open position. The invention includes an arrangement in which the chuck is mounted on a chuck assembly in the form of a door for sealing an opening in a process chamber.
Abstract translation: 致动电梯结构以将晶片单独地从存储盒中移出到升高的传送位置。 升降机是具有弧形上端的升降机叶片，其形状适于晶片的曲率，并且该端部内的凹槽适于匹配晶片的厚度并沿着边缘保持晶片。 卡盘组件上的晶片保持卡盘适于当电梯处于升高的输送位置时从电梯接收晶片。 卡盘组件可以从输送位置移动到远程位置，其中卡盘将晶片呈现到支撑构件。 支撑构件设置有孔和围绕孔间隔开的多个可变形的晶片保持夹。 卡盘组件包括能够接触每个夹子的一部分以将其推到打开位置的气缸。 本发明包括一种布置，其中卡盘以门的形式安装在卡盘组件上，用于密封处理室中的开口。
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公开(公告)号：US4311427A
公开(公告)日：1982-01-19
申请号：US106342
申请日：1979-12-21
Applicant: George L. Coad , R. Howard Shaw , Martin A. Hutchinson
Inventor： George L. Coad , R. Howard Shaw , Martin A. Hutchinson
CPC classification number: C23C14/56 , H01L21/67772 , H01L21/67778 , Y10S414/136 , Y10S414/138 , Y10S414/139 , Y10S414/14
Abstract: A system for the automated handling and transfer of wafers individually and repetitively to and between processing stations and cassettes. A track-like conveyor engages a cassette holding a plurality of wafers in vertically facing alignment, to move same horizontally past a loading station of a processing chamber. A vertically moveable blade passes between the conveyor tracks and through the cassette to engage a wafer edgewise from below and move same upwardly to the processing chamber entrance. Vacuum means mounted to the door of the chamber entrance engages and holds the wafer during insertion into the chamber by closure of the door. Clip means are mounted within the periphery of an aperture of a vertical support plate just within the chamber entrance, to engage edgewise the wafer and support it within the plate aperture while in the processing chamber. The wafer is removed after processing by operating the foregoing apparatus in reverse order. The processing chamber may be a vacuum chamber, and minimal-volume load lock means therefor are advantageously provided by the system with the aid of a sealing member within the chamber compressible against the wafer support plate and chamber wall while the chamber door is open, to seal off the entrance area from the remainder of the chamber. The wafer support plate is moveable within the processing chamber to various wafer processing stations once the door is closed and the sealing member withdrawn.
Abstract translation: 一种用于自动处理和转移晶片的系统，用于单独和重复地传送到处理站和盒之间和之间。 轨道状输送器与保持垂直面对齐的多个晶片的盒相接合，以使其水平移动通过处理室的装载站。 垂直移动的叶片在输送轨道之间通过并通过盒子从下方沿边缘接合晶片并向上移动到处理室入口。 安装到腔室入口的门的真空装置通过关闭门来插入到腔室中并保持晶片。 夹紧装置安装在刚好在室入口内的垂直支撑板的孔的周边内，以沿边缘接合晶片并将其支撑在板孔内，同时处于处理室中。 通过以相反的顺序操作上述装置，在处理之后移除晶片。 处理室可以是真空室，并且其中最小容积的负载锁定装置有利地由系统借助于腔室内的密封构件提供，同时室室打开时可压缩抵靠晶片支撑板和室壁，至 从室的其余部分密封入口区域。 一旦门关闭并且密封构件被取出，晶片支撑板可在处理室内移动到各种晶片处理站。
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公开(公告)号：US4589380A
公开(公告)日：1986-05-20
申请号：US628829
申请日：1984-07-09
Applicant: George L. Coad
Inventor： George L. Coad
CPC classification number: F02B71/04 , F01B1/08 , F02B75/04 , F02B2275/36 , F02B3/06
Abstract: The invention disclosed herein is a cyclic power mechanism including means providing for a variable dwell between cycles of the mechanism. The mechanism produces energy during each cycle and stores the energy of each cycle for consumption. The variable dwell between cycles is terminated and a new cycle is initiated upon the consumption of a preestablished portion of the stored energy. A preferred embodiment of the mechanism is a free piston engine operation on an Otto cycle. The piston of the engine is restrained after each combustion cycle as the energy of that combustion is stored for use. When a preestablished portion of the stored energy has been consumed, the piston is released and forced into another compression and combustion cycle for further storage of the combustion energy.
Abstract translation: 本文公开的本发明是一种循环功率机构，其包括在该机构的循环之间提供可变驻留的装置。 该机制在每个循环期间产生能量，并存储每个循环的能量以进行消耗。 在循环之间的可变停留终止，并且在消耗储存能量的预先建立的部分之后开始新的循环。 该机构的优选实施例是在奥托循环中的自由活塞发动机操作。 发动机的活塞在每个燃烧循环之后被抑制，因为该燃烧的能量被储存以供使用。 当存储的能量的预先建立的部分已被消耗时，活塞被释放并被迫进入另一个压缩和燃烧循环，以进一步储存燃烧能量。
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公开(公告)号：US4233519A
公开(公告)日：1980-11-11
申请号：US49837
申请日：1979-06-18
Applicant: George L. Coad
Inventor： George L. Coad
Abstract: A translation mechanism for linearly moving a beam stopper in radiation therapy apparatus includes first and second arms pivotally mounted to a support and third and fourth arms pivotally mounted to the first and second arms. The third and fourth arms are attached to the beam stopper and can comprise part of the beam stopper. In one embodiment, the third and fourth arms include disc shaped portions stacked in axial alignment with a drive motor attached to one disc portion ahd having a drive shaft axially aligned with and coupled to the other portion whereby relative rotation of the disc portions effects linear translation of the beam stopper.
Abstract translation: 用于在辐射治疗装置中线性移动束塞的平移机构包括可枢转地安装到支撑件的第一臂和第二臂，以及可枢转地安装到第一臂和第二臂的第三臂和第四臂。 第三和第四臂附接到梁止动器并且可以包括梁挡块的一部分。 在一个实施例中，第三和第四臂包括与安装在一个盘部分ahd上的驱动马达轴向对准堆叠的盘形部分，驱动马达具有轴向对准并联接到另一部分的驱动轴，从而盘部分的相对旋转实现线性平移 的束塞。
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公开(公告)号：US5212580A
公开(公告)日：1993-05-18
申请号：US836039
申请日：1992-02-12
Applicant: George L. Coad , James B. Stolz , Yung C. Lee , Ron B. Whitney , Peter G. Borden , Mark A. Nokes
Inventor： George L. Coad , James B. Stolz , Yung C. Lee , Ron B. Whitney , Peter G. Borden , Mark A. Nokes
CPC classification number: G02B21/002 , G02B21/26 , H01J37/20 , H01J2237/20228 , H01J2237/20264 , H01J2237/20292
Abstract: A raster scan apparatus provides a scanning assembly capable of moving in a sinusoidal motion along a first direction and stepping in fine steps in a second direction perpendicular to the first direction. In one embodiment, a piezoelectric bimorph sets in scanning motion a scanning assembly formed by a wafer holder and leaf springs. The amplitude of the scanning motion is controlled by a voltage applied across the piezoelectric bimorph. A Hall effect sensor provides an output signal indicating the instantaneous location of the scanning assembly in motion. The output signal of the Hall effect sensor is compared against a predetermined threshold to provide a trigger signal for synchronization. The output signal of the Hall effect sensor is also fed back to the source of sinusoidal voltage to adaptively adjust the sinusoidal voltage so as to achieve a predetermined amplitude for the scanning motion.
Abstract translation: 光栅扫描装置提供能够沿着第一方向以正弦运动移动的扫描组件，并且在垂直于第一方向的第二方向上以微细的步骤步进。 在一个实施例中，压电双压电晶片将由晶片保持器和板簧形成的扫描组件进行扫描运动。 扫描运动的幅度由施加在压电双压电晶片上的电压控制。 霍尔效应传感器提供指示扫描组件在运动中的瞬时位置的输出信号。 将霍尔效应传感器的输出信号与预定阈值进行比较，以提供用于同步的触发信号。 霍尔效应传感器的输出信号也反馈到正弦电压源，以自适应地调节正弦电压，以达到扫描运动的预定幅度。
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Patent Agency Ranking
公开(公告)号：US5738767A
公开(公告)日：1998-04-14
申请号：US342275
申请日：1994-11-23
Applicant: George L. Coad , Eric C. Lawson , John Lester Hughes
Inventor： George L. Coad , Eric C. Lawson , John Lester Hughes
CPC classification number: C03C17/002 , C23C14/50 , C23C14/56 , C23C14/566
Abstract: A vacuum processing system for handling and processing rectangular glass panels for flat panel displays has a cluster configuration. The system includes a central buffer chamber, with multiple processing chambers, a load lock and an unload lock positioned around the buffer chamber and coupled to the buffer chamber through gate valves. The buffer chamber contains a turntable that is rotatable about a vertical axis. The system further includes substrate carriers, each for supporting a substrate in a vertical orientation as it is transported through the system and is processed. The turntable has dual substrate carrier positions for rotating substrate carriers into alignment with a selected processing chamber, the load lock or the unload lock. Multiple substrates can be handled and processed concurrently to achieve a high throughput rate. The system is typically used for sputter deposition of ITO films and metal films on the glass substrate.
Abstract translation: 用于处理和处理用于平板显示器的矩形玻璃面板的真空处理系统具有集群配置。 该系统包括中央缓冲室，具有多个处理室，负载锁定和位于缓冲室周围的卸载锁定，并通过闸阀连接到缓冲室。 缓冲室包含可围绕垂直轴线旋转的转台。 该系统还包括基板载体，每个基板载体用于在垂直方向上支撑基板，因为其被传送通过系统并被处理。 转盘具有用于使基板载体与所选择的处理室，加载锁定或卸载锁定对准的双基板载体位置。 可以同时处理和处理多个基板以实现高吞吐率。 该系统通常用于ITO膜和金属膜溅射沉积在玻璃基板上。
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公开(公告)号：US5379984A
公开(公告)日：1995-01-10
申请号：US180205
申请日：1994-01-11
Applicant: George L. Coad , George Matthias
Inventor： George L. Coad , George Matthias
Abstract: A vacuum gate valve includes a valve body having an opening therethrough and a valve seat surrounding the opening, and a swing gate assembly rotatable about a pivot axis between an open position and a closed position. The swing gate assembly includes a swing gate body, a resilient seal gasket mounted to the swing gate body so as to sealingly engage the valve seat in the closed position, and a spreader for flattening the resilient seal gasket in a region that engages the valve seat. The gate valve further includes an actuator for rotating the swing gate assembly between the open position and the closed position. In a preferred embodiment, the seal gasket is a resilient tube, and the spreader is located within the tube. The swing gate assembly may include a mechanism for adjusting the spreader to thereby adjust the tension applied to the seal gasket.
Abstract translation: 真空闸阀包括具有穿过其中的开口的阀体和围绕开口的阀座，以及围绕枢转轴线在打开位置和关闭位置之间旋转的摆动门组件。 摆门组件包括摆动门体，安装在摆动门体上的弹性密封垫片，以便在关闭位置密封地接合阀座;以及吊具，用于使弹性密封垫片在与阀座接合的区域中变平 。 闸阀还包括用于在打开位置和关闭位置之间旋转摆门组件的致动器。 在优选实施例中，密封垫片是弹性管，并且扩张器位于管内。 摆门组件可以包括用于调节撒布机从而调节施加到密封垫圈的张力的机构。
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公开(公告)号：US5337818A
公开(公告)日：1994-08-16
申请号：US82463
申请日：1993-06-28
Applicant: George L. Coad
Inventor： George L. Coad
Abstract: A rollaway opening closure and more particularly a fabric opening closure adapted to be stored in a reeled or rolled position and to be unrolled from the reel to close the opening. The apparatus includes a roller, a drawbar, a sheet of fabric and at least one pivoted bar link. The axis of the roller, the drawbar and the pivot of the bar link are maintained parallel as the fabric is unrolled from the roller. The drawbar and the bar link are structurally attached. The fabric is attached to the roller and the drawbar but unattached to other elements of the apparatus. A rotational biasing means biases the fabric into rolled position on the roller and causes the fabric to be maintained taught when unrolled and in closing position at an taught when unrolled and in closing position at an opening.
Abstract translation: 一个折叠开口封闭件，更具体地说，一种织物开口封闭件，其适于存放在卷绕或卷绕位置，并从卷轴上展开以封闭开口。 该设备包括一个辊子，一个牵引杆，一张织物和至少一个枢转的杆连杆。 当织物从辊子上展开时，滚子轴线，拉杆和杆连杆的枢轴保持平行。 牵引杆和杆连杆结构连接。 织物附着到辊子和牵引杆上，但不附着到装置的其它元件上。 旋转偏压装置将织物偏压在辊上的滚动位置，并且使织物在展开时被保持教导，并且在开口处展开和关闭位置时被教导的关闭位置。
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公开(公告)号：US4705951A
公开(公告)日：1987-11-10
申请号：US853274
申请日：1986-04-17
Applicant: Frederick P. Layman , David A. Huntley , Paul H. Dick , George L. Coad , Michael J. Kuhlman , Roger M. Vecta , Phillip M. Hobson
Inventor： Frederick P. Layman , David A. Huntley , Paul H. Dick , George L. Coad , Michael J. Kuhlman , Roger M. Vecta , Phillip M. Hobson
IPC: H01L21/66 , B65G1/00 , H01L21/00 , H01L21/677 , H01L21/683 , G21K5/10 , B65H1/00
CPC classification number: H01L21/67276 , H01L21/6838 , Y10S414/137 , Y10S414/139
Abstract: A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a cassette of wafers. The wafers in the cassette can be randomly accessed. A computer is used to control the system according to a task status table independent of time sequence.
Abstract translation: 描述了包括结合到真空隔离阀中的晶片处理臂的晶片处理系统。 使用具有电梯和光学传感器的负载锁来存储和定位晶片盒。 盒中的晶片可以随机存取。 计算机用于根据任务状态表独立于时间顺序来控制系统。
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公开(公告)号：US4491095A
公开(公告)日：1985-01-01
申请号：US515390
申请日：1983-07-20
Applicant: George L. Coad
Inventor： George L. Coad
CPC classification number: F01B11/08 , F02B71/04 , F02B75/04 , F02B2275/36 , F02B3/06
Abstract: The invention disclosed herein is a cyclic power mechanism including means providing for a variable dwell between cycles of the mechanism. The mechanism produces energy during each cycle and stores the energy of each cycle for consumption. The variable dwell between cycles is terminated and a new cycle is initiated upon the consumption of a preestablished portion of the stored energy. A preferred embodiment of the mechanism is a free piston engine operation on an Otto cycle. The piston of the engine is restrained after each combustion cycle as the energy of that combustion is stored for use. When a preestablished portion of the stored energy has been consumed, the piston is released and forced into another compression and combustion cycle for further storage of the combustion energy.
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