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公开(公告)号：US20180214812A1
公开(公告)日：2018-08-02
申请号：US15745923
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Gary Peter Knight , Andrew James Seeley , Duncan Michael Price
IPC: B01D47/10
CPC classification number: B01D47/10 , B01D53/68 , B01D53/75 , B01D53/78 , B01D2257/108 , B01D2257/2027 , B01D2257/204 , B01D2257/406 , B01D2257/553 , B01D2258/0216 , C23C16/44 , C23C16/4412 , F04C19/001 , Y02C20/30
Abstract: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
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公开(公告)号：US11112110B2
公开(公告)日：2021-09-07
申请号：US15709524
申请日：2016-03-23
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price
Abstract: A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of the effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.
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公开(公告)号：US20200061535A1
公开(公告)日：2020-02-27
申请号：US16500665
申请日：2018-03-28
Applicant: Edwards Limited
Inventor： Andrew Seeley , Duncan Michael Price
Abstract: A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.
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公开(公告)号：US20220373175A1
公开(公告)日：2022-11-24
申请号：US17773745
申请日：2020-11-03
Applicant: Edwards Limited
Inventor： Duncan Michael Price , Michael Colin Graham
Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.
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公开(公告)号：US10702824B2
公开(公告)日：2020-07-07
申请号：US15745923
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Gary Peter Knight , Andrew James Seeley , Duncan Michael Price
Abstract: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
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Patent Agency Ranking
公开(公告)号：US10655626B2
公开(公告)日：2020-05-19
申请号：US15745619
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Gary Peter Knight , Andrew James Seeley , Geoffrey Young , Duncan Michael Price
Abstract: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.
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公开(公告)号：US10099169B2
公开(公告)日：2018-10-16
申请号：US15746261
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price , Gary Peter Knight
Abstract: Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.
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公开(公告)号：US20180207576A1
公开(公告)日：2018-07-26
申请号：US15746261
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price , Gary Peter Knight
CPC classification number: B01D53/1406 , B01D53/323 , B01D2252/103 , B01D2259/818 , F04C19/00 , F04C19/001 , F04C29/0042 , F04C2240/10 , F04C2240/20 , F04C2250/30
Abstract: Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.
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公开(公告)号：US11982445B2
公开(公告)日：2024-05-14
申请号：US17779361
申请日：2020-11-24
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price
CPC classification number: F23G7/065 , B22F1/12 , B22F3/002 , B22F3/1025 , B22F3/1103 , B22F3/1121 , B22F3/225 , B22F5/10 , B22F2998/10 , B22F2999/00 , B22F2999/00 , B22F1/00 , B22F1/062 , C22C33/0278 , B22F2998/10 , B22F1/10 , B22F3/225 , B22F3/1021 , B22F3/1121
Abstract: A method of fabricating a burner element for an abatement apparatus is disclosed. The method comprises: injection moulding a charge comprising metal particles and a flow compound into a mould defining the burner element to produce a moulded burner element; and sintering the moulded burner element. In this way, injection moulding is used to produce the burner element, which provides far more flexibility regarding the design and properties of the burner element and avoids the necessity of incorporating a perforated support into the burner element. This allows burner elements of more intricate design to be produced, as well as burner elements which are thinner than those produced using existing techniques, which increases the volume of a combustion chamber defined by that burner element for any external burner element size, which in turn increases the amount of effluent gas that can be treated for any burner size.
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公开(公告)号：US20220362711A1
公开(公告)日：2022-11-17
申请号：US17763940
申请日：2020-09-23
Applicant: Edwards Limited
Inventor： Michael Colin Graham , Andrew James Seeley , Duncan Michael Price
Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.
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