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    THICK OPTICAL QUALITY SYNTHETIC POLYCRYSTALLINE DIAMOND MATERIAL WITH LOW BULK ABSORPTION AND LOW MICROFEATURE DENSITY
    3.
    发明申请
    THICK OPTICAL QUALITY SYNTHETIC POLYCRYSTALLINE DIAMOND MATERIAL WITH LOW BULK ABSORPTION AND LOW MICROFEATURE DENSITY 审中-公开

    公开(公告)号：US20190003043A1

    公开(公告)日：2019-01-03

    申请号：US16064337

    申请日：2016-11-25

    申请人： ELEMENT SIX TECHNOLOGIES LIMITED

    发明人： BENJAMIN WICKHAM ,  ANDREW MICHAEL BENNETT

    IPC分类号： C23C16/27

    摘要： A poly crystalline chemical vapour deposited (CVD) diamond wafer comprising: —a diameter >40 mm; —a thickness >1.0 mm; —an absorption coefficient ≤0.1 cm−1 at 10.6 μm; and ⋅a micro feature density, especially in the form of “black spots”, meeting the following specification: —in a central area of the polycrystalline CVD diamond wafer from 0 to 20 mm radius there are no more than 100 micro features of a size between 0.002 and 0.008 mm2, no more than 50 micro features of a size between 0.008 and 0.018 mm2, no more than 25 microfeatures of a size between 0.018 and 0.05 mm2, and zero microfeatures of a size between 0.05 and 0.1 mm2, and ⋅in an outer region of the polycrystalline CVD diamond wafer from 20 to 40 mm radius there are no more than 200 microfeatures 2 of a size between 0.002 and 0.008 mm2, no more than 150 microfeatures of a size between 0.008 and 0.018 mm2, no more than 100 microfeatures of a size between 0.018 and 0.05 mm2, and zero microfeatures of a size between 0.05 and 0.1 mm2.