公开(公告)号：US06878950B2

公开(公告)日：2005-04-12

申请号：US10844223

申请日：2004-05-12

申请人： Bassam Shamoun ,  David Trost

发明人： Bassam Shamoun ,  David Trost

IPC分类号： G03F1/00 ,  G03F7/20 ,  H01J37/317 ,  H01L21/027 ,  G01B11/26 ,  H01J37/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/00 ,  H01J37/3174 ,  H01J2237/31794

摘要： The present invention relates generally to methods, apparatus and materials to reduce or minimize the heating of a substrate (and associated distortions of the photomask) caused by electron-beam energy deposited in the substrate during patterning. Heating of the substrate is exacerbated by radiative transfer of infrared energy from the substrate to other nearby components of the e-beam apparatus followed by reflection or re-radiation of a portion of the energy back to the substrate. The present invention provides useful materials and methods for reducing such reflection or re-radiation effects, leading to temperature stability of the substrate, reduced thermal distortion and the possibility of increased patterning accuracy. The infrared absorbing materials of the present invention also possess sufficient electrical conductivity to dissipate scattered electrons residing on the material, and sufficient thermal conductivity to dissipate heat rapidly and not result in local heating or significant temperature rise of the absorber. The semiconducting material silicon carbide (SiC) is satisfactory for the practice of the present invention. Doped SiC having altered electrical conductivity may also be used. It is shown that emission and re-absorption from the uncoated face of the substrate dominates the substrate's temperature rise.

摘要翻译： 本发明一般涉及减少或最小化在图案化期间由衬底中沉积的电子束能量引起的衬底加热（和光掩模的相关变形）的方法，设备和材料。 衬底的加热通过将红外能量从电子束设备的基底辐射转移到其它附近的部件，随后将能量的一部分反射或重新辐射回到衬底来加剧。 本发明提供用于减少这种反射或再辐射效应的有用的材料和方法，导致衬底的温度稳定性，降低的热变形和增加图案精度的可能性。 本发明的红外线吸收材料还具有足够的电导率以消散驻留在材料上的散射电子，并且具有足够的导热性以快速散发热量，并且不会导致吸收体的局部加热或显着的温度升高。 半导体材料碳化硅（SiC）对于本发明的实践是令人满意的。 也可以使用具有改变的导电性的掺杂的SiC。 显示从衬底的未涂覆面的发射和再吸收主导衬底的温度升高。

公开(公告)号：US06521901B1

公开(公告)日：2003-02-18

申请号：US09451683

申请日：1999-11-30

申请人： Bassam Shamoun ,  David Trost

发明人： Bassam Shamoun ,  David Trost

IPC分类号： G01B1126

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/00 ,  H01J37/3174 ,  H01J2237/31794

摘要： The present invention relates generally to methods, apparatuses and materials to reduce or minimize the heating of a substrate (and associated distortions of the photomask) caused by electron-beam energy deposited in the substrate during patterning. The present invention provides useful materials and methods for reducing such reflection or re-radiation effects, leading to temperature stability of the substrate, reduced thermal distortion and the possibility of increased patterning accuracy. The infrared absorbing materials of the present invention also possess sufficient electrical conductivity to dissipate scattered electrons residing on the material, and sufficient thermal conductivity to dissipate heat rapidly and not result in local heating or significant temperature rise of the absorber.

摘要翻译： 本发明一般涉及减少或最小化在图案化期间由衬底中沉积的电子束能量引起的衬底加热（和光掩模的相关变形）的方法，装置和材料。 本发明提供用于减少这种反射或再辐射效应的有用的材料和方法，导致衬底的温度稳定性，降低的热变形和增加图案精度的可能性。 本发明的红外线吸收材料还具有足够的电导率以消散驻留在材料上的散射电子，并且具有足够的导热性以快速散发热量，并且不会导致吸收体的局部加热或显着的温度升高。

公开(公告)号：US06424879B1

公开(公告)日：2002-07-23

申请号：US09291167

申请日：1999-04-13

申请人： Francis C. Chilese ,  Bassam Shamoun ,  David Trost

发明人： Francis C. Chilese ,  Bassam Shamoun ,  David Trost

IPC分类号： G06F1900

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/30455 ,  H01J2237/30461

摘要： An electron beam writing system includes an electron beam patterning machine operable to emit an electron beam to form a pattern on a substrate. A computer control system, coupled to the electron beam patterning machine, has a plurality of pre-computed distortion maps. Each distortion map describes expected distortions of the substrate caused by bulk heating resulting from exposure to the electron beam. The computer control system controls the electron beam patterning machine using the distortion maps in order to adjust for the expected distortions.

摘要翻译： 电子束写入系统包括可操作以发射电子束以在衬底上形成图案的电子束图案形成机。 耦合到电子束图案机的计算机控制系统具有多个预先计算的失真图。 每个失真图描述了由于暴露于电子束而产生的体积加热引起的基板的预期失真。 计算机控制系统使用失真图来控制电子束图形机，以便对预期的失真进行调整。

公开(公告)号：US20110132884A1

公开(公告)日：2011-06-09

申请号：US12851442

申请日：2010-08-05

申请人： Antoine P. Manens ,  Wei-Sheng Lei ,  Wei-Yung Hsu ,  Bassam Shamoun ,  Yan Wang

发明人： Antoine P. Manens ,  Wei-Sheng Lei ,  Wei-Yung Hsu ,  Bassam Shamoun ,  Yan Wang

IPC分类号： B23K26/00

CPC分类号： H01L31/18 ,  B23K26/0673 ,  B23K26/082 ,  B23K26/364

摘要： Laser systems for laser scribing are provided. The systems include a remote module coupled to a laser module through a cable. The remote module includes a controller and a chiller. The laser module has at least a laser source and a cooling plate. The laser module is operable to remove material from at least a portion of a workpiece. The systems also include a plurality of termination modules coupled to the laser module through a plurality of optical fibers. Each of the termination modules includes a mechanical interface. The mechanical interface is coupled to a respective optical fiber. The systems further include a plurality of scanning devices operable to control a position of the output from the laser. Each of the scanning devices is coupled to a respective mechanical interface.

摘要翻译： 提供激光划线的激光系统。 该系统包括通过电缆耦合到激光模块的远程模块。 远程模块包括控制器和冷却器。 激光模块至少具有激光源和冷却板。 激光模块可操作以从工件的至少一部分去除材料。 该系统还包括通过多根光纤耦合到激光模块的多个端接模块。 每个终端模块包括机械接口。 机械接口耦合到相应的光纤。 该系统还包括可操作以控制来自激光器的输出位置的多个扫描装置。 每个扫描装置耦合到相应的机械接口。

公开(公告)号：US07857413B2

公开(公告)日：2010-12-28

申请号：US12041658

申请日：2008-03-03

申请人： Bassam Shamoun

发明人： Bassam Shamoun

IPC分类号： B41J29/393

CPC分类号： B41J2/04581 ,  B41J2/04541

摘要： The present invention provides systems, methods, and apparatus for monitoring and controlling a slew rate of a voltage signal provided to a PZT capacitor of a print head. The system includes a digital driver circuit adapted to generate a signal indicating a nominal slew rate, a probe circuit for measuring a firing pulse voltage signal provided to the capacitor, a comparator coupled to the digital driver and the probe circuit comparing a measured slew rate with the nominal slew rate generating a signal indicating a difference between the measured slew rate and the nominal slew rate, an analog driver circuit coupled to the comparator adapted to adjust the slew rate of the voltage signal in response to the difference signal, and an analog/digital converter adapted to sample the voltage signal output from the probe circuit and to provide an output for diagnostic purposes. Numerous other features and aspects are disclosed.

摘要翻译： 本发明提供了用于监视和控制提供给打印头的PZT电容器的电压信号的转换速率的系统，方法和装置。 该系统包括适于生成表示标称压摆率的信号的数字驱动器电路，用于测量提供给电容器的点火脉冲电压信号的探针电路，耦合到数字驱动器的比较器和探针电路，将测量的转换速率与 所述标称转换速率产生指示所述测量的转换速率和所述标称转换速率之间的差的信号;耦合到所述比较器的模拟驱动器电路，所述模拟驱动器电路响应于所述差分信号而调整所述电压信号的转换速率;以及模拟/ 数字转换器，其适于对从探针电路输出的电压信号进行采样，并提供用于诊断目的的输出。 公开了许多其他特征和方面。

公开(公告)号：US07517437B2

公开(公告)日：2009-04-14

申请号：US11392026

申请日：2006-03-29

申请人： Bassam Shamoun

发明人： Bassam Shamoun

IPC分类号： C23C14/54

CPC分类号： C23C14/345 ,  H01J37/34 ,  H01J37/3444

摘要： A method and apparatus for sputter depositing a film on a substrate is disclosed. By providing a superimposed RF bias over a DC bias, plasma ionization is increased. In order to increase the resistive load across the substrate, an impedance circuit is provided between the substrate and the susceptor. The impedance circuit allows an insulating substrate to effectively function as an anode and connect to ground.

摘要翻译： 公开了一种在衬底上溅射沉积膜的方法和装置。 通过在DC偏置上提供叠加的RF偏压，等离子体电离增加。 为了增加跨衬底的电阻性负载，在衬底和基座之间提供阻抗电路。 阻抗电路允许绝缘基板有效地用作阳极并连接到地。

公开(公告)号：US20130167769A1

公开(公告)日：2013-07-04

申请号：US13340226

申请日：2011-12-29

申请人： Bassam Shamoun

发明人： Bassam Shamoun

IPC分类号： C30B25/10 ,  C30B25/16

CPC分类号： C30B25/10 ,  C30B25/16

摘要： Targeted temperature compensation for use with a chemical vapor deposition (CVD) apparatus. A localized temperature monitoring system is configured to provide localized temperature information representing surface temperatures of portions of the one or more wafers on a wafer carrier while the wafer carrier is rotating in a CVD process. A temperature profiling system is configured to generate a temperature profile that is indicative of localized cold spots on a surface of the one or more wafers. The temperature profile is based on the localized temperature information. A targeted heating system is configured to selectively apply localized heat to the localized cold spots dynamically based on the temperature profile such that a thermal distribution of the surface of the one or more wafers is made more uniform while a CVD process is carried out on the CVD apparatus.

摘要翻译： 用于化学气相沉积（CVD）设备的目标温度补偿。 局部温度监测系统被配置为提供局部温度信息，其表示晶片载体在CVD工艺中旋转时晶片载体上的一个或多个晶片的部分的表面温度。 温度分布系统被配置为产生指示一个或多个晶片的表面上的局部冷点的温度分布。 温度曲线基于局部温度信息。 目标加热系统被配置为基于温度分布动态地选择性地将局部热量施加到局部冷点，使得一个或多个晶片的表面的热分布更加均匀，同时对CVD进行CVD工艺 仪器。

公开(公告)号：US07637587B2

公开(公告)日：2009-12-29

申请号：US11846770

申请日：2007-08-29

申请人： Bassam Shamoun

发明人： Bassam Shamoun

IPC分类号： B41J29/393

CPC分类号： B41J29/393 ,  B41J2/0451 ,  B41J2/04555 ,  B41J2/04581

摘要： Systems, methods and apparatus are provided for reliability testing an inkjet printing system. The invention includes a testing interface, a print head coupled to the testing interface, printer control electronics coupled to the testing interface and coupled to the print head via the testing interface, the printer control electronics adapted to transmit a firing voltage signal through the testing interface to the print head, and a measurement apparatus coupled to the testing interface. The testing interface includes an input path for receiving the firing voltage signal from the printer control electronics, the input path splitting into a first path coupled to the print head and a second path coupled to the measurement apparatus. Numerous other aspects are disclosed.

摘要翻译： 提供了用于可靠性测试喷墨打印系统的系统，方法和装置。 本发明包括测试接口，耦合到测试接口的打印头，耦合到测试接口的打印机控制电子器件，以及经由测试接口耦合到打印头的打印机控制电子器件，适于通过测试接口传送点火电压信号 到打印头，以及耦合到测试界面的测量装置。 测试接口包括用于接收来自打印机控制电子装置的点火电压信号的输入路径，输入路径分为耦合到打印头的第一路径和耦合到测量装置的第二路径。 公开了许多其他方面。

公开(公告)号：US07637580B2

公开(公告)日：2009-12-29

申请号：US11238637

申请日：2005-09-29

申请人： Bassam Shamoun ,  Eugene Mirro ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

发明人： Bassam Shamoun ,  Eugene Mirro ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

IPC分类号： B41J29/38

CPC分类号： B41J3/407 ,  B41J2/04505 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/04593 ,  B41J2/125 ,  B41J3/28 ,  B41J3/543 ,  B41J25/001 ,  B41J25/003 ,  B41J25/005 ,  B41J29/15 ,  B41J29/393

摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.

摘要翻译： 本发明提供了用于控制喷墨打印系统的方法，系统和驱动程序。 驱动器可以包括逻辑，其包括处理器，耦合到逻辑的存储器和耦合到逻辑的触发脉冲发生器电路。 火脉冲发生器可以包括用于便于将驱动器连接到打印头的连接器。 火脉冲发生器电路还可以包括固定电流源电路，其适于产生具有恒定压摆率的发射脉冲，其有利于容易地调节墨滴尺寸。 该逻辑适于接收图像并将图像转换为图像数据文件。 图像数据文件适于由驱动器使用，以在基板沿着打印方向移动时触发打印头将墨水沉积在基板上的像素孔中。 公开了许多其他方面。

公开(公告)号：US07611217B2

公开(公告)日：2009-11-03

申请号：US11238636

申请日：2005-09-29

申请人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

发明人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

IPC分类号： B41J29/38

CPC分类号： B41J29/393

摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

摘要翻译： 提供喷墨喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。