公开(公告)号：US20070070107A1

公开(公告)日：2007-03-29

申请号：US11238636

申请日：2005-09-29

申请人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

发明人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

IPC分类号： B41J29/38

CPC分类号： B41J29/393

摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

摘要翻译： 提供喷墨喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。

公开(公告)号：US07227155B2

公开(公告)日：2007-06-05

申请号：US11241789

申请日：2005-09-30

申请人： Benyamin Buller ,  William J. Devore ,  Juergen Frosien ,  Eugene Mirro, Jr. ,  Henry Pearce-Percy ,  Dieter Winkler

发明人： Benyamin Buller ,  William J. Devore ,  Juergen Frosien ,  Eugene Mirro, Jr. ,  Henry Pearce-Percy ,  Dieter Winkler

IPC分类号： H01J37/147

CPC分类号： H01J37/147 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/24 ,  H01J37/3174 ,  H01J2237/0432 ,  H01J2237/1504 ,  H01J2237/28

摘要： An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.

摘要翻译： 一种高精度高通量偏转电子束的装置和方法。 偏转电容器的至少一个电极通过同轴电缆连接到信号源。 终端电阻器还连接到同轴电缆和在同轴电缆和电极的接头处的电极。 终端电阻器具有与同轴电缆的阻抗匹配的电阻，并且电极具有与同轴电缆的阻抗的一半相匹配的阻抗。 本发明的偏转电容器由于涡电流而具有最小的精度损失。 与现有技术的系统相比，偏转电容器中的电极间距减小约2倍。

公开(公告)号：US6037967A

公开(公告)日：2000-03-14

申请号：US769169

申请日：1996-12-18

申请人： Paul C. Allen ,  Eugene Mirro

发明人： Paul C. Allen ,  Eugene Mirro

IPC分类号： B23K26/06 ,  B23K26/08 ,  G02B26/10 ,  G02B26/12 ,  G03F7/20 ,  H01L21/027 ,  H01S3/10 ,  H04N1/40 ,  B41J2/435

CPC分类号： H04N1/40037 ,  B23K26/032 ,  B23K26/06 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/08 ,  B23K26/082 ,  B23K26/0821 ,  G02B26/12 ,  G03F7/2053 ,  G03F7/704 ,  H01L21/0275

摘要： A laser pattern generator for semiconductor mask making or direct writing of features on a semiconductor wafer uses a pulsed laser source to achieve high power and short wavelength (e.g. 263 nm or less) radiation, for writing very small-sized features. The laser pulse frequency is either synchronous or asynchronous to the writing grid of the features being written, in various embodiments.

摘要翻译： 用于半导体掩模制造或直接写入半导体晶片上的特征的激光图案发生器使用脉冲激光源实现高功率和短波长（例如263nm或更小）辐射，用于写入非常小尺寸的特征。 在各种实施例中，激光脉冲频率与被写入的特征的写入网格同步或异步。

公开(公告)号：US07637580B2

公开(公告)日：2009-12-29

申请号：US11238637

申请日：2005-09-29

申请人： Bassam Shamoun ,  Eugene Mirro ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

发明人： Bassam Shamoun ,  Eugene Mirro ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

IPC分类号： B41J29/38

CPC分类号： B41J3/407 ,  B41J2/04505 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/04593 ,  B41J2/125 ,  B41J3/28 ,  B41J3/543 ,  B41J25/001 ,  B41J25/003 ,  B41J25/005 ,  B41J29/15 ,  B41J29/393

摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.

摘要翻译： 本发明提供了用于控制喷墨打印系统的方法，系统和驱动程序。 驱动器可以包括逻辑，其包括处理器，耦合到逻辑的存储器和耦合到逻辑的触发脉冲发生器电路。 火脉冲发生器可以包括用于便于将驱动器连接到打印头的连接器。 火脉冲发生器电路还可以包括固定电流源电路，其适于产生具有恒定压摆率的发射脉冲，其有利于容易地调节墨滴尺寸。 该逻辑适于接收图像并将图像转换为图像数据文件。 图像数据文件适于由驱动器使用，以在基板沿着打印方向移动时触发打印头将墨水沉积在基板上的像素孔中。 公开了许多其他方面。

公开(公告)号：US07611217B2

公开(公告)日：2009-11-03

申请号：US11238636

申请日：2005-09-29

申请人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

发明人： Bassam Shamoun ,  Janusz Jozwiak ,  Eugene Mirro ,  Quanyuan Shang ,  Shinichi Kurita ,  John M. White

IPC分类号： B41J29/38

CPC分类号： B41J29/393

摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

摘要翻译： 提供喷墨喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。

公开(公告)号：US07456414B2

公开(公告)日：2008-11-25

申请号：US11236893

申请日：2005-09-28

申请人： Eugene Mirro, Jr. ,  Benyamin Buller ,  Thomas D. Lamson

发明人： Eugene Mirro, Jr. ,  Benyamin Buller ,  Thomas D. Lamson

IPC分类号： G01N23/00

CPC分类号： H01J37/3045 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174

摘要： A beam re-registration system and method for error correction of a particle or other beam are disclosed. The beam re-registration system and method may include a particle or other beam, a stage movable in relation to the particle beam, at least two servos for controlling movement of the stage, a fixed target or grid located on the stage, and a re-registration controller adapted to control the servos. The re-registration controller may attenuate high frequency signals and amplify low frequency signals, and may be a type 2 controller which accurately corrects a ramp disturbance.

摘要翻译： 公开了一种用于粒子或其他光束的纠错的光束重新配准系统和方法。 光束重新注册系统和方法可以包括粒子或其他光束，相对于粒子束可移动的台，用于控制舞台的移动，位于舞台上的固定目标或网格的至少两个舵机， 注册控制器适用于控制舵机。 再注册控制器可以衰减高频信号并放大低频信号，并且可以是精确校正斜坡干扰的2型控制器。

公开(公告)号：US20070069155A1

公开(公告)日：2007-03-29

申请号：US11236893

申请日：2005-09-28

申请人： Eugene Mirro ,  Benyamin Buller ,  Thomas Lamson

发明人： Eugene Mirro ,  Benyamin Buller ,  Thomas Lamson

IPC分类号： G01N23/00

CPC分类号： H01J37/3045 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174

摘要： A beam re-registration system and method for error correction of a particle or other beam are disclosed. The beam re-registration system and method may include a particle or other beam, a stage movable in relation to the particle beam, at least two servos for controlling movement of the stage, a fixed target or grid located on the stage, and a reregistration controller adapted to control the servos. The reregistration controller may attenuate high frequency signals and amplify low frequency signals, and may be a type 2 controller which accurately corrects a ramp disturbance.

摘要翻译： 公开了一种用于粒子或其他光束的纠错的光束重新配准系统和方法。 光束重新注册系统和方法可以包括粒子或其他光束，相对于粒子束可移动的平台，用于控制舞台的移动的至少两个舵机，位于舞台上的固定目标或网格以及重新注册 控制器适用于控制舵机。 再注册控制器可以衰减高频信号并放大低频信号，并且可以是精确校正斜坡干扰的2型控制器。

公开(公告)号：US20060109290A1

公开(公告)日：2006-05-25

申请号：US11238637

申请日：2005-09-29

申请人： Bassam Shamoun ,  Eugene Mirro ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

发明人： Bassam Shamoun ,  Eugene Mirro ,  Janusz Jozwiak ,  Quanyuan Shang ,  Shinichi Kurita ,  John White

IPC分类号： B41J29/38

CPC分类号： B41J3/407 ,  B41J2/04505 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/04593 ,  B41J2/125 ,  B41J3/28 ,  B41J3/543 ,  B41J25/001 ,  B41J25/003 ,  B41J25/005 ,  B41J29/15 ,  B41J29/393

摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.

公开(公告)号：US20070206456A1

公开(公告)日：2007-09-06

申请号：US11537054

申请日：2006-09-29

申请人： Jeffrey Sullivan ,  Benyamin Buller ,  Eugene Mirro ,  William Eckes

发明人： Jeffrey Sullivan ,  Benyamin Buller ,  Eugene Mirro ,  William Eckes

IPC分类号： G11B7/00

CPC分类号： G05B19/19 ,  G02B27/0012 ,  G05B2219/37275 ,  G05B2219/41036 ,  G05B2219/41219

摘要： Methods and apparatus to compensate for low-frequency tracking errors in motion control of a movable stage are provided. By recording tracking errors during earlier traversal of a trajectory, filtering, and applying those recorded tracking errors to subsequent traversals of the same or a similar trajectory, tracking errors of the subsequent traversals may be significantly reduced.

摘要翻译： 提供了补偿可移动台的运动控制中的低频跟踪误差的方法和装置。 通过在先前遍历轨迹期间记录跟踪误差，过滤并将这些记录的跟踪误差应用于相同或相似轨迹的后续遍历，可以显着减少后续遍历的跟踪误差。

公开(公告)号：US20070075256A1

公开(公告)日：2007-04-05

申请号：US11241789

申请日：2005-09-30

申请人： Benyamin Buller ,  William Devore ,  Juergen Frosien ,  Eugene Mirro ,  Henry Pearce-Percy ,  Dieter Winkler

发明人： Benyamin Buller ,  William Devore ,  Juergen Frosien ,  Eugene Mirro ,  Henry Pearce-Percy ,  Dieter Winkler

IPC分类号： H01J37/147

CPC分类号： H01J37/147 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/24 ,  H01J37/3174 ,  H01J2237/0432 ,  H01J2237/1504 ,  H01J2237/28

摘要： An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.