公开(公告)号：US20240363407A1

公开(公告)日：2024-10-31

申请号：US18309669

申请日：2023-04-28

Applicant: Applied Materials, Inc.

Inventor： Jie ZHANG ,  Liqi WU ,  Cory LAFOLLETT ,  Tsung-Han YANG ,  Wei WENG ,  Qihao ZHU ,  Jiang LU ,  Rongjun WANG ,  Xianmin TANG

IPC: H01L21/768 ,  H01L21/02

CPC classification number: H01L21/76877 ,  H01L21/02274 ,  H01L21/76843 ,  H01L21/76865 ,  H01L21/76883

Abstract: Embodiments of the present disclosure generally relate to a method for forming an electrically conductive feature on a substrate. In one embodiment, the method includes forming a first conductive layer via physical vapor deposition (PVD) in an opening of a substrate. The first conductive layer has a thickness of less than 20 angstroms. The method further includes forming a second conductive layer via PVD on the first conductive layer. The first conductive layer and the second conductive layer are formed at a temperature of less than 50° C. The method further includes annealing at least a portion of the first conductive layer and the second conductive layer.

公开(公告)号：US20240290593A1

公开(公告)日：2024-08-29

申请号：US18214498

申请日：2023-06-26

Applicant: Applied Materials, Inc.

Inventor： Cory LAFOLLETT ,  Jie J. ZHANG

IPC: H01J37/34 ,  C23C14/35

CPC classification number: H01J37/3452 ,  C23C14/35 ,  H01J37/3405 ,  H01J37/3455 ,  H01J2237/332

Abstract: A magnet assembly for a magnetron of a processing chamber includes a support member. A plurality of magnetic tracks is mounted to the support member. Each magnetic track includes a pair of magnetic poles. A partial magnetic track is mounted to the support member. The partial magnetic track includes a single unpaired magnetic pole. The partial magnetic track is mounted proximal to a center of rotation of the support member.