Wafer level integration of multiple optical elements
    3.
    发明申请
    Wafer level integration of multiple optical elements 审中-公开
    晶圆级集成多个光学元件

    公开(公告)号:US20070110361A1

    公开(公告)日:2007-05-17

    申请号:US11647397

    申请日:2006-12-29

    摘要: Integrated multiple optical elements may be formed by bonding substrates containing such optical elements together or by providing optical elements on either side of the wafer substrate. The wafer is subsequently diced to obtain the individual units themselves. The optical elements may be formed lithographically, directly, or using a lithographically generated master to emboss the elements. Alignment features facilitate the efficient production of such integrated multiple optical elements, as well as post creation processing thereof on the wafer level.

    摘要翻译: 集成的多个光学元件可以通过将包含这种光学元件的基板结合在一起或通过在晶片基板的任一侧上设置光学元件来形成。 随后切割晶片以获得单独的单元本身。 光学元件可以光刻地,直接地或使用光刻产生的主体来压印元件。 对准特征有助于这种集成的多个光学元件的有效生产,以及在晶片级上的后创建处理。