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1.
公开(公告)号:US10607989B2
公开(公告)日:2020-03-31
申请号:US16025794
申请日:2018-07-02
申请人: Agilome, Inc.
发明人: Paul Hoffman
IPC分类号: H01L29/16 , H01L27/085 , H01L29/66 , G01N27/414 , C12Q1/6874
摘要: Provided herein are integrated circuits for use in performing analyte measurements and methods of fabricating the same. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological processes, including DNA hybridization and/or sequencing reactions. The methods for fabricating the integrated circuits include steps of depositing an insulating layer on a semiconducting substrate, and forming trenches in the insulating dielectric layer. Conductive material may be deposited in the trenches to form electrodes, and the insulating layer may be conditioned so that the electrodes protrude above the insulating layer. A 2D material, such as graphene, may be deposited on to electrodes to form a channel between the electrodes.
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公开(公告)号:US10006910B2
公开(公告)日:2018-06-26
申请号:US15256493
申请日:2016-09-02
申请人: Agilome, Inc.
发明人: Paul Hoffman
IPC分类号: H01L29/66 , G01N33/543 , G01N27/414
CPC分类号: G01N33/5438 , G01N27/4146
摘要: This invention concerns Chemically-sensitive Field Effect Transistors (ChemFETs) that are preferably fabricated using semiconductor fabrication methods on a semiconductor wafer, and in preferred embodiments, on top of an integrated circuit structure made using semiconductor fabrication methods. The instant ChemFETs typically comprise a conductive source, a conductive drain, and a channel composed of a one-dimensional (1D) or two-dimensional (2D) transistor nanomaterial, which channel extends from the source to the drain and is fabricated using semiconductor fabrication techniques on top of a wafer. The ChemFET also includes a gate, often the gate voltage is provided through a fluid or solution proximate the ChemFET. Such ChemFETs, preferably configured in independently addressable arrays, may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological samples, including nucleic acid hybridization and/or sequencing reactions.
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公开(公告)号:US09857328B2
公开(公告)日:2018-01-02
申请号:US15239800
申请日:2016-08-17
申请人: Agilome, Inc.
发明人: Paul Hoffman
IPC分类号: H01L29/66 , G01N27/414 , H01L29/16 , H01L29/417 , G01N27/327 , H01L29/786
CPC分类号: G01N27/4148 , G01N27/3276 , H01L21/76879 , H01L21/76883 , H01L27/085 , H01L29/1606 , H01L29/41733 , H01L29/4175 , H01L29/66409 , H01L29/78603 , H01L29/78684
摘要: This invention concerns chemically-sensitive field effect transistors (FETs) are preferably fabricated using semiconductor fabrication methods on a semiconductor wafer, and in preferred embodiments, on top of an integrated circuit structure made using semiconductor fabrication methods. The instant chemically-sensitive FETs typically comprise a conductive source, a conductive drain, and a channel composed of a one-dimensional (1D) or two-dimensional (2D) transistor material, which channel extends from the source to the drain and is fabricated using semiconductor fabrication techniques on top of a wafer. Such chemically-sensitive FETs, preferably configured in independently addressable arrays, may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological samples, including nucleic acid hybridization and/or sequencing reactions.
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公开(公告)号:US10429381B2
公开(公告)日:2019-10-01
申请号:US16014838
申请日:2018-06-21
申请人: Agilome, Inc.
发明人: Paul Hoffman
IPC分类号: H01L29/66 , G01N33/543 , G01N27/414
摘要: This invention concerns Chemically-sensitive Field Effect Transistors (ChemFETs) that are preferably fabricated using semiconductor fabrication methods on a semiconductor wafer, and in preferred embodiments, on top of an integrated circuit structure made using semiconductor fabrication methods. The instant ChemFETs typically comprise a conductive source, a conductive drain, and a channel composed of a one-dimensional (1D) or two-dimensional (2D) transistor nanomaterial, which channel extends from the source to the drain and is fabricated using semiconductor fabrication techniques on top of a wafer. The ChemFET also includes a gate, often the gate voltage is provided through a fluid or solution proximate the ChemFET. Such ChemFETs, preferably configured in independently addressable arrays, may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological samples, including nucleic acid hybridization and/or sequencing reactions.
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5.
公开(公告)号:US10020300B2
公开(公告)日:2018-07-10
申请号:US15225764
申请日:2016-08-01
申请人: AGILOME, INC.
发明人: Paul Hoffman
IPC分类号: H01L29/66 , G01N27/414 , H01L27/085 , H01L29/16 , C12Q1/6874
CPC分类号: H01L27/085 , C12Q1/6874 , G01N27/4145 , G01N27/4146 , H01L29/1606 , H01L29/66045 , C12Q2565/607
摘要: Provided herein are integrated circuits for use in performing analyte measurements and methods of fabricating the same. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological processes, including DNA hybridization and/or sequencing reactions. The methods for fabricating the integrated circuits include steps of depositing an insulating layer on a semiconducting substrate, and forming trenches in the insulating dielectric layer. Conductive material may be deposited in the trenches to form electrodes, and the insulating layer may be conditioned so that the electrodes protrude above the insulating layer. A 2D material, such as graphene, may be deposited on the electrodes to form a channel between the electrodes.
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公开(公告)号:US20170102358A1
公开(公告)日:2017-04-13
申请号:US15239800
申请日:2016-08-17
申请人: Agilome, Inc.
发明人: Paul Hoffman
IPC分类号: G01N27/414 , H01L29/417 , G01N27/327 , H01L29/16
CPC分类号: G01N27/4148 , G01N27/3276 , H01L21/76879 , H01L21/76883 , H01L27/085 , H01L29/1606 , H01L29/41733 , H01L29/4175 , H01L29/66409 , H01L29/78603 , H01L29/78684
摘要: This invention concerns chemically-sensitive field effect transistors (FETs) are preferably fabricated using semiconductor fabrication methods on a semiconductor wafer, and in preferred embodiments, on top of an integrated circuit structure made using semiconductor fabrication methods. The instant chemically-sensitive FETs typically comprise a conductive source, a conductive drain, and a channel composed of a one-dimensional (1D) or two-dimensional (2D) transistor material, which channel extends from the source to the drain and is fabricated using semiconductor fabrication techniques on top of a wafer. Such chemically-sensitive FETs, preferably configured in independently addressable arrays, may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological samples, including nucleic acid hybridization and/or sequencing reactions.
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7.
公开(公告)号:US20190120830A1
公开(公告)日:2019-04-25
申请号:US16014838
申请日:2018-06-21
申请人: Agilome, Inc.
发明人: Paul Hoffman
IPC分类号: G01N33/543 , G01N27/414
CPC分类号: G01N33/5438 , G01N27/4146
摘要: This invention concerns Chemically-sensitive Field Effect Transistors (ChemFETs) that are preferably fabricated using semiconductor fabrication methods on a semiconductor wafer, and in preferred embodiments, on top of an integrated circuit structure made using semiconductor fabrication methods. The instant ChemFETs typically comprise a conductive source, a conductive drain, and a channel composed of a one-dimensional (1D) or two-dimensional (2D) transistor nanomaterial, which channel extends from the source to the drain and is fabricated using semiconductor fabrication techniques on top of a wafer. The ChemFET also includes a gate, often the gate voltage is provided through a fluid or solution proximate the ChemFET. Such ChemFETs, preferably configured in independently addressable arrays, may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological samples, including nucleic acid hybridization and/or sequencing reactions.
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8.
公开(公告)号:US20180315750A1
公开(公告)日:2018-11-01
申请号:US16025794
申请日:2018-07-02
申请人: Agilome, Inc.
发明人: Paul Hoffman
IPC分类号: H01L27/085 , G01N27/414 , H01L29/16
CPC分类号: H01L27/085 , C12Q1/6874 , G01N27/4145 , G01N27/4146 , H01L29/1606 , H01L29/66045 , C12Q2565/607
摘要: Provided herein are integrated circuits for use in performing analyte measurements and methods of fabricating the same. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological processes, including DNA hybridization and/or sequencing reactions. The methods for fabricating the integrated circuits include steps of depositing an insulating layer on a semiconducting substrate, and forming trenches in the insulating dielectric layer. Conductive material may be deposited in the trenches to form electrodes, and the insulating layer may be conditioned so that the electrodes protrude above the insulating layer. A 2D material, such as graphene, may be deposited on to electrodes to form a channel between the electrodes.
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9.
公开(公告)号:US09859394B2
公开(公告)日:2018-01-02
申请号:US15182533
申请日:2016-06-14
申请人: Agilome, Inc.
发明人: Paul Hoffman , Mitchell Lerner , Pieter van Rooyen
IPC分类号: H01L21/00 , H01L29/66 , H01L29/16 , H01L27/085 , H01L21/768 , H01L29/45 , C12Q1/68
CPC分类号: H01L29/66045 , C12Q1/6869 , G01N27/4145 , G01N27/4146 , H01L21/76879 , H01L21/76883 , H01L27/085 , H01L29/1606 , H01L29/45 , H01L29/66409 , H01L29/66969
摘要: Provided herein are devices, systems, and methods of employing the same for the performance of bioinformatics analysis. The apparatuses and methods of the disclosure are directed in part to large scale graphene FET sensors, arrays, and integrated circuits employing the same for analyte measurements. The present GFET sensors, arrays, and integrated circuits may be fabricated using conventional CMOS processing techniques based on improved GFET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense GFET sensor based arrays. Improved fabrication techniques employing graphene as a reaction layer provide for rapid data acquisition from small sensors to large and dense arrays of sensors. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes, including DNA hybridization and/or sequencing reactions. Accordingly, GFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis within a gated reaction chamber of the GFET based sensor.
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10.
公开(公告)号:US20170218442A1
公开(公告)日:2017-08-03
申请号:US15483983
申请日:2017-04-10
申请人: Agilome, Inc.
发明人: Pieter van Rooyen , Mitchell Lerner , Paul Hoffman
IPC分类号: C12Q1/68 , H01L29/16 , B01L3/00 , G01N27/414
CPC分类号: C12Q1/6869 , B01L3/502715 , B01L3/502761 , B01L2300/0627 , B01L2300/0858 , B01L2300/0887 , B01L2300/12 , C12Q1/6874 , G01N27/414 , G01N27/4145 , G01N27/4146 , G01N27/4148 , H01L27/085 , H01L29/1606 , H01L29/24
摘要: Provided herein are devices, systems, and methods of employing the same for the performance of bioinformatics analysis. The apparatuses and methods of the disclosure are directed in part to large scale graphene FET sensors, arrays, and integrated circuits employing the same for analyte measurements. The present GFET sensors, arrays, and integrated circuits may be fabricated using conventional CMOS processing techniques based on improved GFET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense GFET sensor based arrays. Improved fabrication techniques employing graphene as a reaction layer provide for rapid data acquisition from small sensors to large and dense arrays of sensors. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes, including DNA hybridization and/or sequencing reactions. Accordingly, GFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis within a gated reaction chamber of the GFET based sensor.
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