公开(公告)号：US20240004308A1

公开(公告)日：2024-01-04

申请号：US18021905

申请日：2021-08-03

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Ali ALSAQQA ,  Aabid PATEL ,  Patrick Sebastian UEBEL ,  Amir ABDOLVAND ,  Paulus Antonius Andreas TEUNISSEN ,  Wisham F. KADHIM

IPC: G03F7/00 ,  G02F1/35

CPC classification number: G03F7/70625 ,  G02F1/3523 ,  G03F7/70041 ,  G03F7/70558

Abstract: A radiation source arrangement including: a radiation source operable to generate source radiation including source energy pulses; and at least one non-linear energy-filter operable to filter the source radiation to obtain filtered radiation including filtered energy pulses. The at least one non-linear energy-filter is operable to mitigate variation in energy in the filtered radiation by reducing the energy level of the source energy pulses which have an energy level corresponding to one of both extremities of an energy distribution of the source energy pulses by a greater amount than the source energy pulses which have an energy level corresponding to a peak of the energy distribution.

公开(公告)号：US20240288747A1

公开(公告)日：2024-08-29

申请号：US18572750

申请日：2022-08-08

Applicant: ASML NETHERLANDS B.V.

Inventor： Mahesh Upendra AJGAONKAR ,  Amir ABDOLVAND ,  Willem Richard PONGERS ,  Johannes Jacobus Matheus BASELMANS ,  Yougfeng NI

IPC: G02F1/365 ,  G02F1/35

CPC classification number: G02F1/365 ,  G02F1/3528 ,  G02F2202/32

Abstract: Radiation source assembly and method for generating broadband radiation by spectral broadening. The radiation source assembly includes a pump assembly configured to provide broadband input radiation. The pump assembly includes a pump source configured to provide first radiation at a pump wavelength, and a broadband assembly configured to provide second radiation including a continuous wavelength range, wherein the first radiation and the second radiation form the broadband input radiation. The radiation source assembly further includes an optical fibre configured to receive the broadband input radiation. The optical fibre includes a core configured along at least a part of the length of the fibre to guide the received broadband input radiation during propagation through the fibre, so as to generate broadband radiation by spectral broadening to be output by the fibre.

公开(公告)号：US20240201561A1

公开(公告)日：2024-06-20

申请号：US18287160

申请日：2022-04-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Willem Richard PONGERS ,  Ralph Jozef Johannes Gerardus Anna Maria SMEETS ,  Amir ABDOLVAND ,  Krishnaparvathy PUTHANKOVILAKAM

IPC: G02F1/365 ,  G02F1/35

CPC classification number: G02F1/365 ,  G02F1/3528

Abstract: A monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element including: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards an output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and including transversally arranged micro-structures configured to provide non-linear optical behavior to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, wherein the supporting region has a transversal dimension which is sufficiently large to render the at least part of the optical element substantially rigid.

公开(公告)号：US20230333314A1

公开(公告)日：2023-10-19

申请号：US18213085

申请日：2023-06-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir ABDOLVAND ,  Cristian Bogdan CRAUS ,  Anna EZERSKAIA ,  Phani Kumar DOMALAPALLY

IPC: G02B6/02 ,  G02B6/032

CPC classification number: G02B6/02304 ,  G02B6/032 ,  G02B2006/0325

Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.

公开(公告)号：US20230296829A1

公开(公告)日：2023-09-21

申请号：US18017059

申请日：2021-07-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir ABDOLVAND ,  Cristian Bogdan CRAUS ,  Sebastian Thomas BAUERSCHMIDT

IPC: G02B6/032 ,  G02B6/25 ,  G02B6/02

CPC classification number: G02B6/032 ,  G02B6/25 ,  G02B6/02328 ,  G02B2006/0325

Abstract: A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.

公开(公告)号：US20220247143A1

公开(公告)日：2022-08-04

申请号：US17621723

申请日：2020-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir ABDOLVAND

IPC: H01S3/067 ,  G02F1/365 ,  H01S3/094 ,  H01S3/30

Abstract: A broadband source device configured for generating broadband radiation or white light output. The broadband source device includes a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within the gas cell. A gas mixture is within the gas cell and the hollow-core photonic crystal fiber. The gas mixture includes at least one Raman active molecular gas constituting more than 2% of the gas mixture, such that the broadband source device operates in a balanced Kerr-Raman nonlinear interaction regime.

公开(公告)号：US20220011500A1

公开(公告)日：2022-01-13

申请号：US17361449

申请日：2021-06-29

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir ABDOLVAND ,  Cristian Bogdan CRAUS ,  Anna EZERSKAIA ,  Phani Kumar DOMALAPALLY

IPC: G02B6/02 ,  G02B6/032

Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.

公开(公告)号：US20210387892A1

公开(公告)日：2021-12-16

申请号：US17287015

申请日：2019-10-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Robbert Edgar VAN LEEUWEN ,  Amir ABDOLVAND

IPC: C03B37/012 ,  C03C25/68 ,  C03B37/027 ,  G03F7/20 ,  G01N21/956 ,  G02F1/35 ,  G02F1/365

Abstract: An optical fiber, manufacturing intermediate for forming an optical fiber and a method for forming an optical fiber. The method includes providing a manufacturing intermediate having an elongate body and having an aperture extending through the elongate body along an axial dimension of the elongate body, a boundary of the aperture defining an internal surface of the manufacturing intermediate. The method further includes etching the internal surface of the manufacturing intermediate using an etching substance, and drawing the manufacturing intermediate along the axial dimension so as to form the optical fiber.