公开(公告)号：US20230333314A1

公开(公告)日：2023-10-19

申请号：US18213085

申请日：2023-06-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir ABDOLVAND ,  Cristian Bogdan CRAUS ,  Anna EZERSKAIA ,  Phani Kumar DOMALAPALLY

IPC: G02B6/02 ,  G02B6/032

CPC classification number: G02B6/02304 ,  G02B6/032 ,  G02B2006/0325

Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.

公开(公告)号：US20220011500A1

公开(公告)日：2022-01-13

申请号：US17361449

申请日：2021-06-29

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir ABDOLVAND ,  Cristian Bogdan CRAUS ,  Anna EZERSKAIA ,  Phani Kumar DOMALAPALLY

IPC: G02B6/02 ,  G02B6/032

Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.