Invention Publication
- Patent Title: HOLLOW-CORE FIBER BASED BROADBAND RADIATION GENERATOR WITH EXTENDED FIBER LIFETIME
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Application No.: US18213085Application Date: 2023-06-22
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Publication No.: US20230333314A1Publication Date: 2023-10-19
- Inventor: Amir ABDOLVAND , Cristian Bogdan CRAUS , Anna EZERSKAIA , Phani Kumar DOMALAPALLY
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP 184730 2020.07.08 EP 167961 2021.04.13
- Main IPC: G02B6/02
- IPC: G02B6/02 ; G02B6/032

Abstract:
An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.
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