-
公开(公告)号：US20230280660A1
公开(公告)日：2023-09-07
申请号：US18196108
申请日：2023-05-11
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas BAUERSCHMIDT , Peter Maximilian GÖTZ , Patrick Sebastian UEBEL , Ronald Franciscus Herman HUGERS , Jan Adrianus BOER , Edwin Johannes Cornelis BOS , Andreas Johannes Antonius BROUNS , Vitaliy PROSYENTSOV , Paul William SCHOLTES - VAN EIJK , Paulus Antonius Andreas TEUNISSEN , Mahesh Upendra AJGAONKAR
CPC classification number: G03F7/70625 , G02B1/005 , G02B6/02 , G03F7/7065 , G01B11/27 , G01J1/4257 , G03F7/70525 , G01M11/30
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
-
公开(公告)号：US20240134182A1
公开(公告)日：2024-04-25
申请号：US18273478
申请日：2022-01-12
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
CPC classification number: G02B26/0816 , G02B27/0977
Abstract: An optical filter apparatus including an optical divergence device, operable to receive optical pulses and spatially distribute the optical pulses over an optical plane in dependence with a pulse energy of each of the optical pulses; and a spatial filter, located at the optical plane, operable to apply spatial filtering to the optical pulses based on a location of each of the optical pulses at the optical plane resulting from the spatial distributing.
-
公开(公告)号：US20240004308A1
公开(公告)日：2024-01-04
申请号：US18021905
申请日：2021-08-03
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Ali ALSAQQA , Aabid PATEL , Patrick Sebastian UEBEL , Amir ABDOLVAND , Paulus Antonius Andreas TEUNISSEN , Wisham F. KADHIM
CPC classification number: G03F7/70625 , G02F1/3523 , G03F7/70041 , G03F7/70558
Abstract: A radiation source arrangement including: a radiation source operable to generate source radiation including source energy pulses; and at least one non-linear energy-filter operable to filter the source radiation to obtain filtered radiation including filtered energy pulses. The at least one non-linear energy-filter is operable to mitigate variation in energy in the filtered radiation by reducing the energy level of the source energy pulses which have an energy level corresponding to one of both extremities of an energy distribution of the source energy pulses by a greater amount than the source energy pulses which have an energy level corresponding to a peak of the energy distribution.
-
公开(公告)号：US20240427216A1
公开(公告)日：2024-12-26
申请号：US18699041
申请日：2022-09-30
Applicant: ASML NETHERLANDS B.V.
Abstract: A broadband radiation source device configured for generating broadband output radiation upon receiving substantially linearly polarized input radiation, the source device including: a hollow-core photonic crystal fiber; at least a first polarization element operable to impose a substantially circular or elliptical polarization on the input radiation prior to being received by the hollow-core photonic crystal fiber; and a second polarization element operable in combination with the first polarization element to impose a substantially elliptical polarization on the input radiation, wherein the second polarization element and the first polarization element are oriented such that the elliptical polarization compensates at least partially for birefringence of the hollow-core photonic crystal fiber.
-
公开(公告)号：US20210018676A1
公开(公告)日：2021-01-21
申请号：US16925586
申请日：2020-07-10
Applicant: ASML NETHERLANDS B.V.
Inventor： Hendrik SABERT , Patrick Sebastian UEBEL
Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.
-
Patent Agency Ranking
公开(公告)号：US20240201561A1
公开(公告)日：2024-06-20
申请号：US18287160
申请日：2022-04-12
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian UEBEL , Willem Richard PONGERS , Ralph Jozef Johannes Gerardus Anna Maria SMEETS , Amir ABDOLVAND , Krishnaparvathy PUTHANKOVILAKAM
CPC classification number: G02F1/365 , G02F1/3528
Abstract: A monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element including: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards an output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and including transversally arranged micro-structures configured to provide non-linear optical behavior to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, wherein the supporting region has a transversal dimension which is sufficiently large to render the at least part of the optical element substantially rigid.
-
公开(公告)号：US20240053532A1
公开(公告)日：2024-02-15
申请号：US18271025
申请日：2021-12-20
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02B6/02328 , G02B6/02366 , G02F1/3528 , G02F1/365
Abstract: A radiation source for generating broadband radiation, the source including an input assembly for providing input radiation and a hollow-core photonic crystal fiber configured to receive and confine the input radiation coupled into the fiber for generating broadband radiation through spectral broadening, wherein the input assembly includes a pump source configured to provide input radiation having an average power of at least 50 W, and wherein the hollow core photonic crystal fiber includes: a hollow core having a diameter of at least 35 μm; and a cladding region including a plurality of anti-resonant structures surrounding the hollow core, the anti-resonant structures including a wall portion having a wall thickness smaller than half the wavelength of the lower end of a wavelength range of the broadband radiation.
-
公开(公告)号：US20220128910A1
公开(公告)日：2022-04-28
申请号：US17569674
申请日：2022-01-06
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian UEBEL , Sebastian Thomas BAUERSCHMIDT , Yongfeng NI
Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.
-
公开(公告)号：US20200310251A1
公开(公告)日：2020-10-01
申请号：US16827843
申请日：2020-03-24
Applicant: ASML Netherlands B.V.
Abstract: An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.
-
10.发明公开公开(公告)号：US20240004127A1
公开(公告)日：2024-01-04
申请号：US18234096
申请日：2023-08-15
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian UEBEL , Peter Maximilian Götz , Sebastian Thomas Bauerschmidt , Coen Hubertus Matheus Baltis , Janneke Ravensbergen
CPC classification number: G02B6/02328 , C03B37/15 , G02B6/0096 , G02B6/02347 , G03F7/7085 , G03F9/7034 , G03F9/7065 , C03B2203/16 , C03B2203/42
Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.
-
-
-
-
-
-
-
-
-
Search Results
25
records
(took 0.045 seconds)
