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公开(公告)号：US20210080803A1
公开(公告)日：2021-03-18
申请号：US17019972
申请日：2020-09-14
Applicant: ASML NETHERLANDS B.V.
Inventor： Yongfeng NI
Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.
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公开(公告)号：US20220128910A1
公开(公告)日：2022-04-28
申请号：US17569674
申请日：2022-01-06
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian UEBEL , Sebastian Thomas BAUERSCHMIDT , Yongfeng NI
Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.
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Patent Agency Ranking
公开(公告)号：US20240142853A1
公开(公告)日：2024-05-02
申请号：US18280529
申请日：2022-02-09
Applicant: ASML NETHERLANDS B.V.
Inventor： Yongfeng NI , Willem Richard PONGERS
CPC classification number: G02F1/3532 , G02F1/3536 , G02F1/392 , G02F1/395 , G02F1/3528 , G02F2202/32
Abstract: A multiple wavelength light source device and associated method for generating output radiation that has a plurality of discrete output wavelength bands. The multiple wavelength light source device includes a pump radiation source arrangement configured to generate input radiation including at least a first frequency component and a second frequency component; and a hollow-core photonic crystal fiber configured to confine a working medium. The hollow-core photonic crystal fiber is configured to receive the input radiation and to generate the plurality of discrete output wavelength bands distributed over a wavelength range of interest via a seed-assisted cascaded four wave mixing (FWM) process in the working medium.
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4.发明公开公开(公告)号：US20230273502A1
公开(公告)日：2023-08-31
申请号：US18014724
申请日：2021-07-06
Applicant: ASML NETHERLANDS B.V.
Inventor： Yongfeng NI
CPC classification number: G02F1/365 , G02F1/3551 , G03F7/706847 , G02F1/3528 , G02F2202/32
Abstract: A method of generating broadband output radiation and associated broadband radiation source. The method includes generating pulses of input radiation having a duration between 50fs and 400fs and having a rise time of less than 60fs; and exciting a working medium within a hollow core fiber with the pulses of input radiation.
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公开(公告)号：US20230091241A1
公开(公告)日：2023-03-23
申请号：US17909223
申请日：2021-02-24
Applicant: ASML NETHERLANDS B.V.
Inventor： Vitaliy PROSYENTSOV , Yongfeng NI
Abstract: An assembly including a non-linear element configured for generating broadband radiation from input radiation coupled into the non-linear element. The assembly further includes an optical element positioned downstream of the non-linear element configured to reflect a fraction of the broadband radiation back into the non-linear element. The non-linear element can be a nonlinear fiber, such as a hollow-core photonic crystal fiber (HC-PCF).
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公开(公告)号：US20210063900A1
公开(公告)日：2021-03-04
申请号：US16995993
申请日：2020-08-18
Applicant: ASML NETHERLANDS B.V.
Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.
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公开(公告)号：US20190296514A1
公开(公告)日：2019-09-26
申请号：US16441864
申请日：2019-06-14
Applicant: ASML Netherlands B.V.
Inventor： Yongfeng NI
Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.
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