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公开(公告)号：US20230280660A1
公开(公告)日：2023-09-07
申请号：US18196108
申请日：2023-05-11
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas BAUERSCHMIDT , Peter Maximilian GÖTZ , Patrick Sebastian UEBEL , Ronald Franciscus Herman HUGERS , Jan Adrianus BOER , Edwin Johannes Cornelis BOS , Andreas Johannes Antonius BROUNS , Vitaliy PROSYENTSOV , Paul William SCHOLTES - VAN EIJK , Paulus Antonius Andreas TEUNISSEN , Mahesh Upendra AJGAONKAR
CPC classification number: G03F7/70625 , G02B1/005 , G02B6/02 , G03F7/7065 , G01B11/27 , G01J1/4257 , G03F7/70525 , G01M11/30
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：US20240427216A1
公开(公告)日：2024-12-26
申请号：US18699041
申请日：2022-09-30
Applicant: ASML NETHERLANDS B.V.
Abstract: A broadband radiation source device configured for generating broadband output radiation upon receiving substantially linearly polarized input radiation, the source device including: a hollow-core photonic crystal fiber; at least a first polarization element operable to impose a substantially circular or elliptical polarization on the input radiation prior to being received by the hollow-core photonic crystal fiber; and a second polarization element operable in combination with the first polarization element to impose a substantially elliptical polarization on the input radiation, wherein the second polarization element and the first polarization element are oriented such that the elliptical polarization compensates at least partially for birefringence of the hollow-core photonic crystal fiber.
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公开(公告)号：US20240053532A1
公开(公告)日：2024-02-15
申请号：US18271025
申请日：2021-12-20
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02B6/02328 , G02B6/02366 , G02F1/3528 , G02F1/365
Abstract: A radiation source for generating broadband radiation, the source including an input assembly for providing input radiation and a hollow-core photonic crystal fiber configured to receive and confine the input radiation coupled into the fiber for generating broadband radiation through spectral broadening, wherein the input assembly includes a pump source configured to provide input radiation having an average power of at least 50 W, and wherein the hollow core photonic crystal fiber includes: a hollow core having a diameter of at least 35 μm; and a cladding region including a plurality of anti-resonant structures surrounding the hollow core, the anti-resonant structures including a wall portion having a wall thickness smaller than half the wavelength of the lower end of a wavelength range of the broadband radiation.
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公开(公告)号：US20210364885A1
公开(公告)日：2021-11-25
申请号：US17307217
申请日：2021-05-04
Applicant: ASML NETHERLANDS B.V.
Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
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Patent Agency Ranking
5.发明申请公开(公告)号：US20210124112A1
公开(公告)日：2021-04-29
申请号：US17077756
申请日：2020-10-22
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian UEBEL , Peter Maximilian GÖTZ , Sebastian Thomas BAUERSCHMIDT , Coen Hubertus Matheus BALTIS , Janneke RAVENSBERGEN
Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.
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公开(公告)号：US20200319400A1
公开(公告)日：2020-10-08
申请号：US16838400
申请日：2020-04-02
Applicant: ASML Netherlands B.V.
Abstract: An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.
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公开(公告)号：US20240061314A1
公开(公告)日：2024-02-22
申请号：US18373421
申请日：2023-09-27
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02F1/3528 , G03F9/7034 , H01S3/0057 , H01S3/06741
Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
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8.发明公开公开(公告)号：US20230146877A1
公开(公告)日：2023-05-11
申请号：US18093717
申请日：2023-01-05
Applicant: ASML Netherlands B.V.
CPC classification number: G02F1/353 , G02F1/3501 , G02F1/365 , G02F1/3503 , G02F1/3528
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
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公开(公告)号：US20210063894A1
公开(公告)日：2021-03-04
申请号：US17004140
申请日：2020-08-27
Applicant: ASML NETHERLANDS B.V.
Inventor： Sebastian Thomas BAUERSCHMIDT , Peter Maximilian GÖTZ , Patrick Sebastian UEBEL , Ronald Franciscus Herman HUGERS , Jan Adrianus BOER , Edwin Johannes Cornelis BOS , Andreas Johannes Antonius BROUNS , Vitaliy PROSYENTSOV , Paul William SCHOLTES - VAN EIJK , Paulus Antonius Andreas TEUNISSEN , Mahesh Upendra AJGAONKAR
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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