Invention Application
- Patent Title: Optical Fiber
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Application No.: US16838400Application Date: 2020-04-02
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Publication No.: US20200319400A1Publication Date: 2020-10-08
- Inventor: Patrick Sebastian UEBEL , Sebastian Thomas BAUERSCHMIDT , Peter Maximilian GÖTZ
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@43bdf2d6 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@17b37c86
- Main IPC: G02B6/02
- IPC: G02B6/02 ; G02B6/44

Abstract:
An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.
Public/Granted literature
- US11099319B2 Optical fiber Public/Granted day:2021-08-24
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