Invention Grant
- Patent Title: Optical fiber
-
Application No.: US16838400Application Date: 2020-04-02
-
Publication No.: US11099319B2Publication Date: 2021-08-24
- Inventor: Patrick Sebastian Uebel , Sebastian Thomas Bauerschmidt , Peter Maximilian Götz
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP19167130 20190403,EP19173416 20190509
- Main IPC: G02B6/02
- IPC: G02B6/02 ; G02B6/44

Abstract:
An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.
Public/Granted literature
- US20200319400A1 Optical Fiber Public/Granted day:2020-10-08
Information query