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公开(公告)号：US20170221959A1
公开(公告)日：2017-08-03
申请号：US15009410
申请日：2016-01-28
IPC分类号： H01L27/146 , H01L27/16 , H01L31/024 , H01L31/112 , H01L31/028 , H01L31/09 , H01L31/103 , H01L37/02 , H01L31/12
CPC分类号： H01L27/14669 , G01J5/024 , G01J5/12 , G01J5/20 , G01J2005/123 , G01J2005/202 , H01L27/14603 , H01L27/14609 , H01L27/14612 , H01L27/14618 , H01L27/1462 , H01L27/14625 , H01L27/14629 , H01L27/1463 , H01L27/14649 , H01L27/14683 , H01L27/16 , H01L31/024 , H01L31/028 , H01L31/09 , H01L31/103 , H01L31/112 , H01L31/12 , H01L37/025
摘要： We disclose herein a thermal IR detector array device comprising a dielectric membrane, supported by a substrate, the membrane having an array of IR detectors, where the array size is at least 3 by 3 or larger, and there are tracks embedded within the membrane layers to separate each element of the array, the tracks also acting as heatsinks and/or cold junction regions.
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公开(公告)号：US20170219434A1
公开(公告)日：2017-08-03
申请号：US15009300
申请日：2016-01-28
IPC分类号： G01J3/42 , H01L27/16 , H01L37/02 , H01L31/028 , H01L23/34 , G01J3/28 , H01L27/144 , H01L31/02 , H01L31/0203 , H01L31/0216 , H01L31/0232 , H01L31/18 , H01L27/146 , H01L31/16
CPC分类号： G01J3/42 , G01J3/2803 , G01J5/024 , G01J5/0853 , G01J5/12 , G01J5/20 , G01J2005/123 , G01J2005/202 , H01L23/34 , H01L27/1446 , H01L27/14607 , H01L27/14609 , H01L27/14618 , H01L27/1462 , H01L27/14625 , H01L27/14629 , H01L27/14634 , H01L27/14636 , H01L27/14649 , H01L27/14669 , H01L27/14683 , H01L27/16 , H01L31/02002 , H01L31/0203 , H01L31/0216 , H01L31/02327 , H01L31/028 , H01L31/16 , H01L31/1804 , H01L37/025
摘要： We disclose an array of Infra-Red (IR) detectors comprising at least one dielectric membrane formed on a semiconductor substrate comprising an etched portion; at least two IR detectors, and at least one patterned layer formed within or on one or both sides of the said dielectric membrane for controlling the IR absorption of at least one of the IR detectors. The patterned layer comprises laterally spaced structures.
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公开(公告)号：US10883804B2
公开(公告)日：2021-01-05
申请号：US15852225
申请日：2017-12-22
摘要： We disclose herein an infra-red (IR) device comprising a substrate comprising an etched cavity portion and a substrate portion; a dielectric layer disposed on the substrate. The dielectric layer comprises a dielectric membrane which is adjacent, or directly above, or below the etched cavity portion of the substrate. The device further comprises a reflective layer on or in or above or below the dielectric membrane to enhance emission or absorption of infrared light at one or more wavelengths.
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公开(公告)号：US10551246B2
公开(公告)日：2020-02-04
申请号：US15009300
申请日：2016-01-28
IPC分类号： G01J3/42 , G01J3/28 , H01L23/34 , H01L27/144 , H01L27/146 , H01L27/16 , H01L31/02 , H01L31/0203 , H01L31/0216 , H01L31/0232 , H01L31/028 , H01L31/16 , H01L31/18 , H01L37/02
摘要： We disclose an array of Infra-Red (IR) detectors comprising at least one dielectric membrane formed on a semiconductor substrate comprising an etched portion; at least two IR detectors, and at least one patterned layer formed within or on one or both sides of the said dielectric membrane for controlling the IR absorption of at least one of the IR detectors. The patterned layer comprises laterally spaced structures.
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公开(公告)号：US20190285478A1
公开(公告)日：2019-09-19
申请号：US15923670
申请日：2018-03-16
发明人： Syed Zeeshan Ali , Kaspars Ledins
摘要： We disclose herein a method for testing and/or calibrating a thermopile based device. The method comprising: applying an electrical bias of a first polarity to the thermopile based device and measuring a first value of an electrical parameter; and applying an electrical bias of a second polarity to the thermopile based device and measuring a second value of an electrical parameter.
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公开(公告)号：US20190198487A1
公开(公告)日：2019-06-27
申请号：US15852257
申请日：2017-12-22
IPC分类号： H01L25/16 , H01L23/13 , H01L23/26 , H01L23/48 , H01L35/10 , H01L35/02 , H01L35/32 , H01L35/08 , H01L35/34 , H05B3/36
CPC分类号： H01L25/165 , G01J5/0225 , G01J5/024 , G01J5/045 , G01J5/0815 , H01L21/78 , H01L23/13 , H01L23/26 , H01L23/481 , H01L24/11 , H01L24/13 , H01L24/48 , H01L35/02 , H01L35/08 , H01L35/10 , H01L35/32 , H01L35/34 , H01L2224/13025 , H01L2224/4845 , H05B3/36
摘要： We disclose an Infrared (IR) device comprising a first substrate comprising a first cavity; a dielectric layer disposed on the first substrate; a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity. The device further comprises an optically transmissive layer attached to one of the first and second substrates; a further layer provided to another of the first and second substrates so that the IR device is substantially closed. Holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity.
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公开(公告)号：US20170343419A1
公开(公告)日：2017-11-30
申请号：US15168562
申请日：2016-05-31
发明人： Richard Henry Hopper , Andrea De Luca , Kaspars Ledins , Syed Zeeshan Ali , Mohamed Foysol Chowdhury
IPC分类号： G01J5/14 , B01L3/00 , H01L31/18 , H01L31/167 , H01L31/16 , G01N33/00 , H01L31/0203 , H01L31/02 , H01L35/32 , G01N21/552 , G01N21/61 , H01L37/00 , H01L31/0232
CPC分类号： G01J5/14 , B01L3/502707 , B01L3/502715 , B01L3/50273 , B01L2200/12 , B01L2300/0654 , B01L2300/08 , B01L2300/0858 , B01L2300/0887 , B01L2300/168 , B01L2400/0424 , G01J5/0853 , G01N21/0303 , G01N21/3504 , G01N21/552 , G01N21/61 , G01N33/004 , G01N2201/068 , H01L31/02002 , H01L31/0203 , H01L31/02325 , H01L31/16 , H01L31/167 , H01L31/18 , H01L35/32 , H01L37/00
摘要： We disclose a chemical sensing device for detecting a fluid. The sensing device comprises: at least one substrate region comprising at least one etched portion; a dielectric region formed on the at least one substrate region, the dielectric region comprising at least one dielectric membrane region adjacent to the at least one etched portion; an optical source for emitting an infra-red (IR) signal; an optical detector for detecting the IR signal emitted from the optical source; one or more further substrates formed on or under the dielectric region, said one or more further substrates defining an optical path for the IR signal to propagate from the optical source to the optical detector. At least one of the optical source and optical detector is formed in or on the dielectric membrane region.
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公开(公告)号：US10128302B2
公开(公告)日：2018-11-13
申请号：US15009410
申请日：2016-01-28
IPC分类号： H01L27/16 , H01L27/146 , H01L31/024 , H01L31/028 , H01L31/09 , H01L31/103 , H01L31/112 , H01L31/12 , H01L37/02 , G01J5/02 , G01J5/12 , G01J5/20
摘要： We disclose herein a thermal IR detector array device comprising a dielectric membrane, supported by a substrate, the membrane having an array of IR detectors, where the array size is at least 3 by 3 or larger, and there are tracks embedded within the membrane layers to separate each element of the array, the tracks also acting as heatsinks and/or cold junction regions.
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公开(公告)号：US20170343502A1
公开(公告)日：2017-11-30
申请号：US15168547
申请日：2016-05-31
CPC分类号： G01N27/18 , G01N21/0332 , G01N21/3504 , G01N27/123 , G01N27/16 , G01N2201/06186 , H05B1/0288
摘要： We disclose herein an environmental sensor system comprising an environmental sensor comprising a first heater and a second heater in which the first heater is configured to consume a lower power compared to the second heater. The system also comprises a controller coupled with the environmental sensor. The controller is configured to detect if a measured value of a targeted environmental parameter is present. The controller is configured to switch on at least one of the first and second heaters based on the presence and/or result of the measured value of the targeted environmental parameter.
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公开(公告)号：US20170343500A1
公开(公告)日：2017-11-30
申请号：US15168464
申请日：2016-05-31
摘要： We disclose a micro-hotplate comprising a substrate comprising an etched portion and a substrate portion and a dielectric region over the substrate. The dielectric region comprises first and second portions. The first portion is adjacent to the etched portion of the substrate and the second portion is adjacent to the substrate portion of the substrate. The micro-hotplate further comprises a heater formed in the dielectric region, and a ring structure formed within and/or over the dielectric region such that the ring structure is coupled with the first and second portions of the dielectric region.
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