Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure
    7.
    发明授权
    Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure 有权
    在微机械垂直结构上产生的具有周期性铁电极化的电声换能器

    公开(公告)号:US09496847B2

    公开(公告)日:2016-11-15

    申请号:US14349579

    申请日:2012-10-05

    摘要: A piezoelectric and ferroelectric bulk wave transducer operating at a predetermined frequency includes a block of substrate, having a first thickness and in a first material, and a piezoelectric and ferroelectric transduction plate, having a length, a width and a second thickness, and in a second piezoelectric material, first and second metal electrodes covering the plate in the direction of the length thereof. The plate has first and second ferroelectric domains with alternating polarizations, distributed along the length of the plate according to a periodic pattern of pitch. The plate is attached perpendicularly to the block so that the width of the plate and the first thickness of the block are the same direction. The first and second material, the first thickness of the block, the length, the width, the second thickness, the pitch of the plate are configured for generating and trapping bulk waves at the operating frequency of the transducer, guided between both electrodes.

    摘要翻译: 以预定频率工作的压电和铁电体波传感器包括具有第一厚度和第一材料的基片块,以及具有长度,宽度和第二厚度的压电和铁电转导板, 第二压电材料,在其长度方向上覆盖板的第一和第二金属电极。 板具有交替偏振的第一和第二铁电畴,根据间距的周期性图案沿着板的长度分布。 板垂直于块体连接,使得板的宽度和块的第一厚度是相同的方向。 第一和第二材料,块的第一厚度,长度,宽度,第二厚度,板的间距被配置为在两个电极之间引导的在换能器的工作频率处产生和捕获体波。

    TRANSDUCER WITH BULK WAVES SURFACE-GUIDED BY SYNCHRONOUS EXCITATION STRUCTURES
    8.
    发明申请
    TRANSDUCER WITH BULK WAVES SURFACE-GUIDED BY SYNCHRONOUS EXCITATION STRUCTURES 有权
    带有大容量波形的传感器由同步激励结构引导

    公开(公告)号:US20150303895A1

    公开(公告)日:2015-10-22

    申请号:US14436455

    申请日:2013-10-09

    摘要: A surface-guided bulk wave transducer (102) comprises a stack of an acoustic substrate (6), an electric ground plane (8), and a network (110) of synchronous acoustic excitation sources with two combs (112, 114) of elementary piezoelectric transducers (122, 124, 126, 128, 130, 132) alternately interlaced two-by-two according to a periodic network step corresponding to a propagation mode of a surface-guided bulk wave of the acoustic substrate (6).Each elementary piezoelectric transducer (122, 124, 126, 128, 130, 132) includes a single and different rod with a parallelepipedal shape for which the nature, the cut of the piezoelectric material, the height h, the width are selected for increasing the electromechanical coupling coefficient of the transducer assembly (102) to a high level.

    摘要翻译: 表面引导的体波换能器(102)包括声学衬底(6),电接地平面(8)和具有基本的两个梳状物(112,114)的同步声学激励源的网络(110)的堆叠 压电换能器(122,124,126,128,130,132)根据对应于声学衬底(6)的表面引导的整体波的传播模式的周期性网络步骤交替地交错地隔行扫描。 每个元件压电换能器(122,124,126,128,130,132)包括具有平行六面体形状的单个和不同的杆,其性质,压电材料的切口,高度h,宽度被选择用于增加 换能器组件(102)的机电耦合系数达到高水平。

    VOLUME WAVE RESONATOR USING EXCITATION/DETECTION OF VIBRATIONS
    9.
    发明申请
    VOLUME WAVE RESONATOR USING EXCITATION/DETECTION OF VIBRATIONS 有权
    使用振动/振动检测的波浪谐振器

    公开(公告)号:US20140300246A1

    公开(公告)日:2014-10-09

    申请号:US14131341

    申请日:2012-07-06

    IPC分类号: H03H9/24

    摘要: The invention relates to an acoustic volume wave resonator configured to resonate at a predetermined work frequency comprising: a mounting (12), comprising a first surface (14) and a second surface (16), a resonating substrate (18), comprising a first surface (20) and a second surface (22), and a diaphragm (24) rigidly connecting the second surface (16) of the mounting on the one hand and the first surface (20) of the resonating substrate on the other hand, The mounting comprises an internal cavity (28) and an internal electrode (32), so as to form a gap area (34) between the internal electrode (24) and a portion (35) of the diaphragm.The resonating substrate is configured to generate, between its first surface and its second surface, longitudinal mode acoustic waves vibrating at the work frequency of the resonator, when an electrostatic field having a sinusoidal component at the work frequency is generated in the gap area by applying a differential voltage between the diaphragm or the first surface of the resonating substrate on the one hand and the internal electrode on the other hand.

    摘要翻译: 本发明涉及一种配置成以预定工作频率谐振的声体积波谐振器,包括:安装件(12),包括第一表面(14)和第二表面(16),谐振基板(18),包括第一 表面(20)和第二表面(22)以及另一方面将固定装置的第二表面(16)与谐振基板的第一表面(20)刚性连接的隔膜(24) 安装包括内部空腔(28)和内部电极(32),以在内部电极(24)和隔膜的一部分(35)之间形成间隙区域(34)。 谐振衬底被构造成在其第一表面和第二表面之间产生在谐振器的工作频率下振动的纵向模式的声波,当通过施加在间隙区域中产生在工作频率处具有正弦分量的静电场时 另一方面,隔膜或谐振基板的第一表面与内部电极之间的差分电压。

    VOLUME WAVE RESONATORS ON MICROMACHINED VERTICAL STRUCTURES
    10.
    发明申请
    VOLUME WAVE RESONATORS ON MICROMACHINED VERTICAL STRUCTURES 有权
    体积波形共振器在微机械垂直结构上的应用

    公开(公告)号:US20140246956A1

    公开(公告)日:2014-09-04

    申请号:US14349347

    申请日:2012-10-05

    摘要: A bulk wave piezoelectric resonator operating at a predetermined frequency includes a substrate block, having a plane face, a first thickness and consisting of a first material, a resonant plate having a length, width and second thickness, and consisting of a second piezoelectric material, first and second metal electrodes at least partly covering the resonant plate on each side and partly facing each other. The resonant plate is fixed perpendicularly in the vicinity of the plane face of the substrate block so that the width of the resonant plate and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the block of substrate, the length, the width, the second thickness of the resonant plate are configured for trapping bulk waves at the operating frequency of the resonator and for producing a plane-plane type bulk wave piezoelectric resonator.

    摘要翻译: 以预定频率工作的体波压电谐振器包括具有平面,第一厚度并由第一材料构成的衬底块,具有长度,宽度和第二厚度的谐振板,并由第二压电材料构成, 第一和第二金属电极至少部分地覆盖每侧的谐振板并且部分地彼此面对。 谐振板垂直固定在基板块的平面附近,使得谐振板的宽度和基板块的第一厚度具有相同的方向,并且第一材料,第二材料,第一厚度 基板块的长度,宽度,第二厚度被构造成用于在谐振器的工作频率下捕获体波并且用于产生平面型体波压电谐振器。