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公开(公告)号：US09213181B2
公开(公告)日：2015-12-15
申请号：US13474532
申请日：2012-05-17
CPC分类号： G02B26/02 , B81B7/0067 , B81B2201/038 , B81B2201/047 , B81C1/00 , B81C1/00039 , B81C1/00261 , B81C2203/054 , G09G3/3413 , G09G3/3433 , G09G3/3466 , G09G2320/041 , G09G2360/144 , H01L23/544 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/97 , H01L2223/54426 , H01L2224/1132 , H01L2224/114 , H01L2224/11462 , H01L2224/131 , H01L2224/16238 , H01L2224/2612 , H01L2224/29011 , H01L2224/32238 , H01L2224/73201 , H01L2224/81121 , H01L2224/81192 , H01L2224/81815 , H01L2224/83007 , H01L2224/83121 , H01L2924/01029 , H01L2924/12041 , H01L2924/12042 , H01L2924/12043 , H01L2924/12044 , H01L2924/1461 , H01L2924/15788 , Y10T428/24157 , Y10T428/24744 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要： A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.
摘要翻译： 显示装置包括第一基板，由耦合到第一基板的结构材料形成的多个微机电系统（MEMS）光调制器和与第一基板分离的第二基板。 多个间隔件从第一基板延伸以使第二基板保持离开多个光调制器的最小距离。 间隔物包括具有与第一基底接触的表面的第一聚合物层，包封第一聚合物层的第二聚合物层和包封第二聚合物层的结构材料层。 间隔件可以用作流体屏障并且被配置为围绕显示装置中的多于一个但是不到所有的MEMS光调制器。
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2.发明授权Single crystal silicon sensor with additional layer and method of producing the same 有权具有附加层的单晶硅传感器及其制造方法公开(公告)号：US08227876B2
公开(公告)日：2012-07-24
申请号：US11445549
申请日：2006-06-02
IPC分类号： H01L29/84
CPC分类号： G01P15/0802 , G01P15/125
摘要： A SOI-based MEMS device has a base layer, a device layer, and an insulator layer between the base layer and the device layer. The device also has a deposited layer having a portion that is spaced from the device layer. The device layer is between the insulator layer and the deposited layer.
摘要翻译： 基于SOI的MEMS器件在基极层和器件层之间具有基极层，器件层和绝缘体层。 该装置还具有具有与器件层间隔开的部分的沉积层。 器件层位于绝缘体层和沉积层之间。
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公开(公告)号：US07999994B2
公开(公告)日：2011-08-16
申请号：US12483062
申请日：2009-06-11
申请人： Nesbitt W. Hagood, IV , Jasper Lodewyk Steyn , Timothy J. Brosnihan , Jignesh Gandhi , John J. Fijol , Richard S. Payne , Roger W. Barton
发明人： Nesbitt W. Hagood, IV , Jasper Lodewyk Steyn , Timothy J. Brosnihan , Jignesh Gandhi , John J. Fijol , Richard S. Payne , Roger W. Barton
CPC分类号： G02B26/02 , G02B7/1821 , G02B26/04
摘要： Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
摘要翻译： 公开了包括基于快门的光调制器的显示装置以及制造这种装置的方法。 该方法与本领域已知的薄膜制造方法兼容，并且导致具有较低功耗的显示器。
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公开(公告)号：US20080158635A1
公开(公告)日：2008-07-03
申请号：US12045518
申请日：2008-03-10
申请人： Nesbitt W. Hagood , Jasper Lodewyk Steyn , Timothy J. Brosnihan , Jignesh Gandhi , John J. Fijol , Richard S. Payne , Roger Barton
发明人： Nesbitt W. Hagood , Jasper Lodewyk Steyn , Timothy J. Brosnihan , Jignesh Gandhi , John J. Fijol , Richard S. Payne , Roger Barton
CPC分类号： G02B26/02 , G02B26/00 , G02B26/0841 , G09G3/3433 , G09G2300/08 , G09G2310/0262
摘要： Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
摘要翻译： 公开了包括基于快门的光调制器的显示装置以及制造这种装置的方法。 该方法与本领域已知的薄膜制造方法兼容，并且导致具有较低功耗的显示器。
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公开(公告)号：US08227286B2
公开(公告)日：2012-07-24
申请号：US12985700
申请日：2011-01-06
IPC分类号： H01L21/00
CPC分类号： G01P15/0802 , G01P15/125
摘要： A SOI-based MEMS device has a base layer, a device layer, and an insulator layer between the base layer and the device layer. The device also has a deposited layer having a portion that is spaced from the device layer. The device layer is between the insulator layer and the deposited layer.
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公开(公告)号：US20110255146A1
公开(公告)日：2011-10-20
申请号：US13123859
申请日：2009-10-27
CPC分类号： G02B26/00 , G02B26/02 , G02B26/0841 , G09G3/2022 , G09G3/3406 , G09G3/3433 , G09G2300/08 , G09G2310/0235 , G09G2320/0633
摘要： The invention relates, in various aspects, to systems and methods for MEMS actuated displays that can be driven at high speeds and at low voltages for improved image quality and reduced power consumption.
摘要翻译： 本发明在各方面涉及用于MEMS致动显示器的系统和方法，其可以在高速和低电压下驱动以改善图像质量和降低功耗。
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公开(公告)号：US07327003B2
公开(公告)日：2008-02-05
申请号：US11058483
申请日：2005-02-15
IPC分类号： H01L29/84
CPC分类号： B60C23/0408 , B81B3/0018 , H01G5/18 , H01G5/40 , H01L2224/16145 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： Rather than increasing the mass of the structure, the structure in a sensor system suspends its substrate from some mechanical ground. Motion of the substrate relative to the mechanical ground thus provides the movement information. To those ends, the sensor system includes a base, a substrate, and a flexible member suspended from at least a portion of the substrate. At least a portion of the flexible member is capable of moving relative to at least a portion of the substrate. In addition, the flexible member is secured to the base, thus causing the substrate to be movable relative to the base. Moreover, the mass of the substrate is greater than the mass of the flexible member. The substrate and flexible member are configured to interact to produce a motion signal identifying movement of the base.
摘要翻译： 传感器系统中的结构不是增加结构的质量，而是将其基板从某些机械接地处悬挂下来。 因此，基板相对于机械地面的运动提供运动信息。 为此，传感器系统包括基底，基底和从基底的至少一部分悬挂的柔性构件。 柔性构件的至少一部分能够相对于衬底的至少一部分移动。 此外，柔性构件被固定到基部，从而使得基板相对于基座移动。 此外，衬底的质量大于柔性构件的质量。 衬底和柔性构件被配置为相互作用以产生识别基部的移动的运动信号。
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8.发明授权Method of fabricating a microfabricated high aspect ratio device with electrical isolation 有权制造具有电气隔离的微细高宽比装置的方法公开(公告)号：US06960488B2
公开(公告)日：2005-11-01
申请号：US09342348
申请日：1999-06-29
IPC分类号： B81B3/00 , B81B7/02 , G01C19/5719 , G01P15/08 , G01P15/097 , G01P15/10 , G01P15/125 , H01L21/00
CPC分类号： G01P15/097 , B81B2203/033 , B81C1/00246 , B81C2203/0778 , G01C19/5719 , G01P15/0802 , G01P15/0888 , G01P15/125 , G01P2015/0814
摘要： A microfabricated device having a high vertical aspect ratio and electrical isolation between a structure region and a circuit region. The device may be fabricated on a single substrate and may include electrical interconnections between the structure region and the circuit region. The device includes a substrate and an isolation trench surrounding a structure region in the substrate. The isolation trench includes a lining of a dielectric insulative material. A plurality of microstructure elements are located in the structure region and are laterally anchored to the isolation trench.
摘要翻译： 一种微结构装置，其具有高垂直纵横比和结构区域与电路区域之间的电隔离。 器件可以制造在单个衬底上，并且可以包括结构区域和电路区域之间的电互连。 该器件包括衬底和围绕衬底中的结构区域的隔离沟槽。 隔离沟槽包括介电绝缘材料的衬里。 多个微结构元件位于结构区域中并横向锚定到隔离沟槽。
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公开(公告)号：US08970940B2
公开(公告)日：2015-03-03
申请号：US13526568
申请日：2012-06-19
CPC分类号： G02B26/0841 , B81B7/007 , B81B2201/045 , B81C2201/0132 , B81C2201/016
摘要： The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.
摘要翻译： MEMS快门包括具有开口部分的快门，连接到快门的第一弹簧，连接到第一弹簧的第一锚杆，连接到第二弹簧的第二弹簧和第二锚固件，在挡板的表面上的绝缘膜 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在垂直于基板表面的方向上，并且所述绝缘膜不存在于所述多个端子的表面上，并且所述表面 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在与所述基板的表面平行的方向上以及在面向所述基板的所述一侧的相对侧上。
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公开(公告)号：US20140078154A1
公开(公告)日：2014-03-20
申请号：US13618291
申请日：2012-09-14
CPC分类号： G02B26/02 , G02B26/005 , G02F2001/13396 , G09G3/3433 , Y10T428/24562 , Y10T428/24851
摘要： A device includes an array of devices formed on a first substrate. A second substrate is spaced away from the first substrate such that the array of devices are positioned between the first and second substrates. A plurality of spacers are coupled to the first substrate to maintain at least a minimum gap between the first substrate and the second substrate. The plurality of spacers include a first set of spacers and a second set of spacers. The spacers in the first set of spacers are shorter than the spacers in the second set of spacers. In some implementations, the device is a display device and the MEMS devices are modulators.
摘要翻译： 一种器件包括形成在第一衬底上的器件阵列。 第二衬底与第一衬底间隔开，使得器件阵列位于第一和第二衬底之间。 多个间隔件联接到第一基板以保持第一基板和第二基板之间的至少最小间隙。 多个间隔件包括第一组间隔件和第二组间隔件。 第一组隔离物中的间隔物比第二组隔离物中的间隔物短。 在一些实施方案中，该器件是显示器件，并且MEMS器件是调制器。
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