Forming method of plasma resistant oxyfluoride coating layer

    公开(公告)号:US12237153B2

    公开(公告)日:2025-02-25

    申请号:US17978778

    申请日:2022-11-01

    Abstract: The present invention relates to a method of forming a plasma resistant oxyfluoride coating layer, including: mounting a substrate on a substrate holder provided in a chamber; causing an electron beam scanned from an electron gun to be incident on an oxide evaporation source accommodated in a first crucible, and heating, melting, and vaporizing the oxide evaporation source as the electron beam is incident on the oxide evaporation source; vaporizing a fluoride accommodated in a second crucible; and advancing an evaporation gas generated from the oxide evaporation source and a fluorine-containing gas generated from the fluoride toward the substrate, and reacting the evaporation gas generated from the oxide evaporation source and the fluorine-containing gas generated from the fluoride to deposit an oxyfluoride on the substrate. According to the present invention, it is possible to form a dense and stable oxyfluoride coating layer having excellent plasma resistance, suppressed generation of contaminant particles, and no cracks.

    SELF-POWERED DELINEATOR INCLUDING LIGHTING-EMITTER

    公开(公告)号:US20210087761A1

    公开(公告)日:2021-03-25

    申请号:US16664036

    申请日:2019-10-25

    Abstract: A self-powered delineator includes a wind-powered rotatable module; a first piezoelectric energy generator module for generating electrical energy; a second piezoelectric energy generator module for generating electrical energy; and a light-emitter. The wind-powered rotatable module includes one or more first magnets spacedly arranged around a rotation shaft. The first piezoelectric energy generator module includes one or more first piezoelectric elements, and one or more second magnets disposed on the at least one first piezoelectric element. The second piezoelectric energy generator module includes at least one elastic base extending radially from a fixed shaft in a cantilever manner; and at least one second piezoelectric element on the at least one elastic base.

    Lithium-sulfur ultracapacitor and manufacturing method of the same

    公开(公告)号:US10269503B2

    公开(公告)日:2019-04-23

    申请号:US15359743

    申请日:2016-11-23

    Abstract: The present invention relates to a lithium-sulfur ultracapacitor including a cathode containing a sulfur-porous carbon composite material; a separator; a lithium metal electrode disposed on an opposite side of the cathode with respect to the separator; a graphite-based electrode disposed adjacent to the lithium metal electrode; and an electrolyte impregnating the cathode, the lithium metal electrode, and the graphite-based electrode, wherein the lithium metal electrode and the graphite-based electrode together constitute an anode, and a method of preparing the lithium-sulfur ultracapacitor. According to the present invention, since the lithium metal electrode and the graphite-based electrode are adjacent to each other, lithium ions arising from the lithium metal electrode are pre-doped on the graphite-based electrode due to an internal short circuit between the lithium metal electrode and the graphite-based electrode, migrate from the graphite-based electrode to the cathode during a discharging process, and migrate from the cathode to the graphite-based electrode during a charging process, and such migrations contribute to excellent charging and discharging properties of the lithium-sulfur ultracapacitor.

    METHOD FOR PREPARING TWO-DIMENSIONAL HYBRID COMPOSITE

    公开(公告)号:US20170253824A1

    公开(公告)日:2017-09-07

    申请号:US14916388

    申请日:2015-11-05

    Inventor: Seung Hun HUH

    Abstract: The present invention relates to a method for preparing a two-dimensional hybrid composite that is capable of solving the problems with the two-dimensional plate type materials, that is, step difference, defects, stretching, etc., that occur as the second-dimensional plate type materials overlap with one another. The present invention provides a method for preparing a two-dimensional hybrid composite that includes: (a) preparing a first plate type material in the solid or liquid state; (b) mixing a second plate type material with the first plate type material, the second plate type material being thinner and more flexible than the first plate type material; (c) mixing a solid or liquid binder with the first and second plate type materials to make the first and second plate type materials partly contact with or apart from each other; and (d) solidifying a composite formed by the steps (a), (b) and (c).

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