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279 条记录 (耗时 0.042 秒)

    Plasma immersion ion milling apparatus and method
    1.
    发明授权
    Plasma immersion ion milling apparatus and method 有权
    等离子浸渍离子研磨装置及方法

    公开(公告)号：US09190239B2

    公开(公告)日：2015-11-17

    申请号：US13265051

    申请日：2010-10-27

    申请人： Sung Il Chung ,  Hyeon Seok Oh ,  S. A. Nikiforov ,  Pan Kyeom Kim ,  Hyeon Taeg Kim ,  Jeong Woo Jeon ,  Jong Moon Kim

    发明人： Sung Il Chung ,  Hyeon Seok Oh ,  S. A. Nikiforov ,  Pan Kyeom Kim ,  Hyeon Taeg Kim ,  Jeong Woo Jeon ,  Jong Moon Kim

    IPC分类号： C23C14/34 ,  H01J37/08 ,  C23C14/48 ,  H01J37/305 ,  H01J37/32

    CPC分类号： H01J37/08 ,  C23C14/48 ,  H01J37/305 ,  H01J37/32009

    摘要： Disclosed is an apparatus and method for low-temperature plasma immersion processing of a variety of workpieces using accelerated ions, wherein low-temperature plasma is distributed around a cylindrical workpiece placed in a chamber, the workpiece is enclosed with a housing including a multi-slot extracting electrode to isolate the workpiece from plasma, and a negative potential sufficient to induce sputtering is applied to the workpiece and the electrode, so that ions from plasma are accelerated within the sheath formed between the extracting electrode and plasma, pass through the slot part of the electrode and bombard the workpiece, thus polishing the surface of the workpiece. This apparatus and method is effective for surface smoothing to ones of nm of large cylindrical substrates particularly substrates for micro or nanopattern transfer. This method includes plasma cleaning, surface activating, surface smoothing, dry etching, deposition, plasma immersion ion implantation and deposition within a single or multi chamber.

    摘要翻译： 公开了一种用于使用加速离子对各种工件进行低温等离子体浸没处理的装置和方法，其中低温等离子体分布在放置在腔室中的圆柱形工件周围，工件由包括多槽的壳体封闭 提取电极以将工件与等离子体隔离，并且对工件和电极施加足以引起溅射的负电位，使得来自等离子体的离子在形成在提取电极和等离子体之间的护套内被加速，通过 电极并轰击工件，从而抛光工件的表面。 该装置和方法对于大的圆柱形基底，特别是用于微或纳米图案转印的基底的表面平滑是有效的。 该方法包括等离子体清洗，表面活化，表面平滑化，干蚀刻，沉积，等离子体浸入离子注入和在单室或多室内的沉积。

    DTV receiving system and method of processing DTV signal
    4.
    发明授权
    DTV receiving system and method of processing DTV signal 有权
    DTV接收系统及DTV信号处理方法

    公开(公告)号：US08432497B2

    公开(公告)日：2013-04-30

    申请号：US13396537

    申请日：2012-02-14

    申请人： Hyoung Gon Lee ,  In Hwan Choi ,  Kook Yeon Kwak ,  Jong Moon Kim ,  Won Gyu Song ,  Byoung Gill Kim ,  Jin Woo Kim

    发明人： Hyoung Gon Lee ,  In Hwan Choi ,  Kook Yeon Kwak ,  Jong Moon Kim ,  Won Gyu Song ,  Byoung Gill Kim ,  Jin Woo Kim

    IPC分类号： H04N5/38

    CPC分类号： H04N21/4347 ,  H04N19/89 ,  H04N21/235 ,  H04N21/23611 ,  H04N21/2362 ,  H04N21/2365 ,  H04N21/435 ,  H04N21/4382 ,  H04N21/4425

    摘要： A method of processing broadcast data includes performing RS (Reed-Solomon) encoding and CRC (Cyclic Redundancy Check) encoding on mobile service data to output an RS frame; dividing the RS frame into a plurality of portions; block processing data in one portion of the plurality of portions; mapping the block processed data in the one portion into at least one region of a data group that comprises a plurality of regions, and adding a first known data sequence, a plurality of second known data sequences, and a transmission parameter to the data group; and transmitting a transmission frame including the data group, wherein the transmission parameter is positioned between the first known data sequence and one of the plurality of second known data sequences, and the first known data sequence and the one of the plurality of second known data sequences differ from each other in length.

    摘要翻译： 处理广播数据的方法包括对移动业务数据执行RS（Reed-Solomon）编码和CRC（循环冗余校验）编码以输出RS帧; 将RS帧划分成多个部分; 在多个部分的一部分中块处理数据; 将一部分中的块处理数据映射到包括多个区域的数据组的至少一个区域，并将第一已知数据序列，多个第二已知数据序列和传输参数添加到数据组; 以及发送包括所述数据组的传输帧，其中所述传输参数位于所述第一已知数据序列与所述多个第二已知数据序列中的一个之间，以及所述第一已知数据序列和所述多个第二已知数据序列中的一个之间 长度不同。