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    Write first design for a perpendicular thin film head
    1.
    发明授权
    Write first design for a perpendicular thin film head 有权
    为垂直薄膜头写第一个设计

    公开(公告)号：US07969683B2

    公开(公告)日：2011-06-28

    申请号：US10431489

    申请日：2003-05-06

    Applicant: Hugo Alberto Emilio Santini

    Inventor： Hugo Alberto Emilio Santini

    IPC: G11B5/31

    CPC classification number: G11B5/1278 ,  G11B5/3103

    Abstract: A magnetic head structure for perpendicular recording and reading. The head structure includes a write head portion for writing data to magnetic media via lines of flux oriented substantially perpendicular to a surface of the media facing the write head portion. The write head portion includes a first pole piece having a first pole tip, a probe pole piece with a probe pole tip for emitting magnetic flux, an insulation stack positioned between the pole pieces, and one or more write coils embedded in the insulation stack. A read head portion that has been fabricated after the write head portion is coupled to the write head portion.

    Abstract translation: 用于垂直记录和读取的磁头结构。 头结构包括写入头部分，用于通过基本上垂直于面向写入头部分的介质的表面定向的磁通线将数据写入磁性介质。 写头部分包括具有第一极尖的第一极片，具有用于发射磁通的探针极端的探针极片，位于极片之间的绝缘层，以及嵌入绝缘堆叠中的一个或多个写入线圈。 在写入头部分耦合到写入头部分之后已经制造的读取头部分。

    High aspect ratio co-planar structure fabrication consisting of different materials
    3.
    发明授权
    High aspect ratio co-planar structure fabrication consisting of different materials 有权
    高纵横比共面结构制造由不同材料组成

    公开(公告)号：US07280313B2

    公开(公告)日：2007-10-09

    申请号：US10837386

    申请日：2004-04-30

    Applicant: Jeffrey S. Lille ,  Son Van Nguyen ,  Hugo Alberto Emilio Santini

    Inventor： Jeffrey S. Lille ,  Son Van Nguyen ,  Hugo Alberto Emilio Santini

    IPC: G11B5/17 ,  G11B5/127

    CPC classification number: G11B5/3163 ,  Y10T29/49052 ,  Y10T29/4906 ,  Y10T29/49064

    Abstract: A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.

    Abstract translation: 一种用于制造具有不同组成的两个共面金属特征的结构（例如磁头）的方法，两者都沉积在它们自己的种子层上。 特征可以相对于它们的宽度（即，具有高纵横比）而高，并且也非常紧密地间隔开。 仅使用单一的高清晰度，严格对准的光刻过程来创建关键结构，避免了由多个过程产生的对准特征的任何问题。 该方法被应用于磁读/写头的写结构的制造，其中极结构和感应线圈的一部分以相近的间距制造在相同的平面中，并且两者的垂直纵横比大于 约2：1。

    Planarized perpendicular pole tip system and method for manufacturing the same
    4.
    发明授权
    Planarized perpendicular pole tip system and method for manufacturing the same 失效
    平面垂直极端系统及其制造方法

    公开(公告)号：US07248434B2

    公开(公告)日：2007-07-24

    申请号：US10798163

    申请日：2004-03-10

    Applicant: Frederick Hayes Dill ,  Jeffrey S. Lille ,  Son Van Nguyen ,  Hugo Alberto Emilio Santini

    Inventor： Frederick Hayes Dill ,  Jeffrey S. Lille ,  Son Van Nguyen ,  Hugo Alberto Emilio Santini

    IPC: G11B5/147

    CPC classification number: G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49032

    Abstract: A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.

    Abstract translation: 提供一种用于制造用于磁头的极尖结构的方法。 最初沉积蚀刻停止层，之后沉积转移层。 进一步沉积的是至少一个掩模层。 然后执行反应离子蚀刻以在至少转移层中限定沟槽。 然后将极尖层沉积在沟槽中以限定至少部分地由转移层侧面的极尖结构。 然后转印层或蚀刻停止层的表面与极尖结构的表面保持共面关系。

    Magnetic head with lower coil traces connected to integrally formed vertical interconnects and upper coil traces through plural insulating layer arrangement
    6.
    发明授权
    Magnetic head with lower coil traces connected to integrally formed vertical interconnects and upper coil traces through plural insulating layer arrangement 失效
    具有连接到整体形成的垂直互连的下线圈迹线和通过多个绝缘层布置的上线圈迹线的磁头

    公开(公告)号：US06819527B1

    公开(公告)日：2004-11-16

    申请号：US09535089

    申请日：2000-03-23

    Applicant: Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    Inventor： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC: G11B517

    CPC classification number: G11B5/313 ,  G11B5/012 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3163 ,  Y10T29/49046

    Abstract: A magnetic head having a helical induction coil. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.

    Abstract translation: 具有螺旋感应线圈的磁头。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。

    High density thin film inductive head structure having a planarized coil insulation structure including hard baked photoresist and a filler material
    7.
    发明授权
    High density thin film inductive head structure having a planarized coil insulation structure including hard baked photoresist and a filler material 失效
    高密度薄膜感应头结构，其具有包括硬烘焙光致抗蚀剂和填充材料的平面化线圈绝缘结构

    公开(公告)号：US06757134B2

    公开(公告)日：2004-06-29

    申请号：US10095882

    申请日：2002-03-11

    Applicant: Hugo Alberto Emilio Santini

    Inventor： Hugo Alberto Emilio Santini

    IPC: G11B5147

    CPC classification number: G11B5/3163 ,  G11B5/3116 ,  G11B5/313

    Abstract: An improved design for a high density thin film inductive write head assembly is provided. A pedestal and back flux closure of ferromagnetic material are formed on opposite ends of a planarized first pole piece. A plurality of coils of conductive material are deposited on top of the first pole piece between the pedestal and back flux closure. The coils comprise a plurality of loops or turns having voids between the coil loops. A photo resist material is deposited in the voids between the coils and the back flux closure, which is hard baked. A layer of alumina is deposited over the coils and hard baked photo resist material. The pedestal, back gap, coils, photo resist, and alumina are planarized by using a chemical mechanical polishing process. The thickness of the photo resist material relative to the coils is reduced using an O2 reactive ion etching process. A hard carbon or alumina filler is applied to fill the gaps between the coils and the photo resist. A CMP process is performed to planarize the carbon filler, coils, back flux closure and the pedestal.

    Abstract translation: 提供了一种用于高密度薄膜感应写头组件的改进设计。 在平坦化的第一极靴的相对端上形成铁磁材料的基座和后部磁通闭合。 导电材料的多个线圈沉积在第一极靴的顶部在基座和后部通量封闭件之间。 线圈包括在线圈环之间具有空隙的多个环或圈。 光电抗蚀剂材料沉积在线圈之间的空隙中，并且被硬烘烤的后通量封闭物。 一层氧化铝沉积在线圈和硬烘烤的光致抗蚀剂材料上。 通过使用化学机械抛光工艺对基座，背面间隙，线圈，光刻胶和氧化铝进行平面化处理。 使用O 2反应离子蚀刻工艺减小光致抗蚀剂材料相对于线圈的厚度。 施加硬碳或氧化铝填料以填充线圈和光致抗蚀剂之间的间隙。 执行CMP工艺以平坦化碳填料，线圈，回流通量闭合和基座。

    Method of making magnetic head having narrow pole tip and fine pitch coil
    8.
    发明授权
    Method of making magnetic head having narrow pole tip and fine pitch coil 有权
    制造具有窄极尖和细间距线圈的磁头的方法

    公开(公告)号：US06741422B2

    公开(公告)日：2004-05-25

    申请号：US09884574

    申请日：2001-06-18

    Applicant: Richard Hsiao ,  Hugo Alberto Emilio Santini

    Inventor： Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC: G11B531

    CPC classification number: G11B5/3163 ,  G11B5/012 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/313 ,  Y10T29/49046

    Abstract: Following the deposition of an insulation layer, a patterned P2 pole tip seed layer is deposited. Significantly, the pole tip seed layer is not deposited beneath the induction coil area of the magnetic head. A dielectric layer is next deposited and a patterned RIE etching mask that includes both a P2 pole tip trench opening and an induction coil trench opening is fabricated upon the dielectric layer. Thereafter, in a single RIE etching step, the P2 pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P2 pole tip is first electroplated up into its trench, an induction coil seed layer is next deposited, and the induction coil is then electroplated up into the induction coil trench.

    Abstract translation: 在沉积绝缘层之后，沉积图案化的P2极端子种子层。 重要的是，极尖种子层没有沉积在磁头的感应线圈区域之下。 接下来沉积电介质层，并且在电介质层上制造包括P2极尖沟槽开口和感应线圈沟槽开口的图案化RIE蚀刻掩模。 此后，在单个RIE蚀刻步骤中，通过电介质材料将P2极尖沟槽蚀刻到种子层，并且感应线圈沟槽通过电介质材料被蚀刻到绝缘层。 首先将P2极端电镀到其沟槽中，然后沉积感应线圈种子层，然后将感应线圈电镀到感应线圈沟槽中。

    Method of making a write head with self-aligned pedestal shaped pole tip which are separated by a zero throat height defining layer
    9.
    发明授权
    Method of making a write head with self-aligned pedestal shaped pole tip which are separated by a zero throat height defining layer 失效
    制造具有自对准基座形极头的写头的方法，其由零喉部高度限定层分开

    公开(公告)号：US06694604B2

    公开(公告)日：2004-02-24

    申请号：US10382169

    申请日：2003-03-04

    Applicant: Hugo Alberto Emilio Santini

    Inventor： Hugo Alberto Emilio Santini

    IPC: G11B5127

    CPC classification number: G11B5/3116 ,  G11B5/012 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49067

    Abstract: A merged magnetic head has a top first pole tip layer and a bottom second pole tip layer which are located entirely between an air bearing surface and a coil layer. A write gap layer separates the pole tip layers from one another at the ABS. A zero throat height (ZTH) defining layer is located adjacent the top gap layer between the pole tip layers and is recessed from the ABS so as to further separate the pole tip layers from one another at a location recessed from the ABS so as to define the zero throat height of the write head where the first and second pole pieces first commence to separate from one another after the ABS. A method of construction, which may be substantially a dry process or substantially a wet process, employs ion milling to form the shapes of the pole tip layers while protecting a bottom first pole piece layer from thinning except for notching of the bottom first pole piece layer adjacent side walls of the top first pole tip layer, the protection being provided by the ZTH defining layer in field regions of the head.

    Abstract translation: 合并磁头具有顶部的第一极尖端层和底部第二极尖端层，其完全位于空气轴承表面和线圈层之间。 写入间隙层在ABS处将极尖层彼此分离。 零喉部高度（ZTH）限定层位于极尖顶层之间的顶部间隙层附近并且从ABS凹入，以便在与ABS凹陷的位置处将极尖层彼此分离，以便限定 写入头的零喉部高度，其中第一和第二极片首先在ABS之后开始彼此分离。 基本上是干法或基本上湿法的构造方法采用离子铣削以形成极尖层的形状，同时保护底部第一极片层免于变薄，除了底部第一极片层的切口 顶部第一极尖端层的相邻侧壁，保护由头部的场区域中的ZTH限定层提供。

    Enhanced low profile magnet write head
    10.
    发明授权
    Enhanced low profile magnet write head 失效
    增强型低磁铁磁头

    公开(公告)号：US06687083B2

    公开(公告)日：2004-02-03

    申请号：US09935361

    申请日：2001-08-22

    Applicant: Wenchein Hsiao ,  Edward Hin Pong Lee ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini ,  Joseph Francis Smyth ,  Samuel Wei-san Yuan

    Inventor： Wenchein Hsiao ,  Edward Hin Pong Lee ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini ,  Joseph Francis Smyth ,  Samuel Wei-san Yuan

    IPC: G11B5147

    CPC classification number: G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3136 ,  G11B5/3163

    Abstract: An low profile inductive write head is provided to improve track definition and head efficiency and to reduce overcoat and pole tip protrusion and cracking caused by thermal expansion. A first insulation layer of an insulation stack enclosing the coil layer is formed of an non-magnetic inorganic insulator material such as aluminum oxide, silicon dioxide or titanium dioxide having a thickness of in the range of 0.2-0.3 microns. The thinner first insulation layer results in a significantly reduced slope of the insulation stack which decreases reflective notching during processing of the second pole tip to improve track definition. Improved thermal conduction properties of the inorganic insulator material improves heat sinking of the write coil reducing overcoat and pole tip protrusion and cracking at the pole tip/write gap layer interface.

    Abstract translation: 提供了一种低调的感应写头，以提高轨道清晰度和头部效率，并减少由热膨胀引起的外涂层和极尖突起和开裂。 封闭线圈层的绝缘堆叠的第一绝缘层由厚度为0.2-0.3微米的非磁性无机绝缘体材料例如氧化铝，二氧化硅或二氧化钛形成。 较薄的第一绝缘层导致绝缘堆叠的显着减小的斜率，这降低了在第二极尖的处理期间的反射缝合，以改善轨道定义。 无机绝缘体材料的改进的导热性能改善了写入线圈的散热，从而减小了极尖/写入间隙层界面处的外涂层和极尖突起以及开裂。

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