Invention Grant
- Patent Title: High aspect ratio co-planar structure fabrication consisting of different materials
- Patent Title (中): 高纵横比共面结构制造由不同材料组成
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Application No.: US10837386Application Date: 2004-04-30
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Publication No.: US07280313B2Publication Date: 2007-10-09
- Inventor: Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
- Applicant: Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Zilka-Kotab, PC
- Main IPC: G11B5/17
- IPC: G11B5/17 ; G11B5/127

Abstract:
A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.
Public/Granted literature
- US20050243465A1 High aspect ratio co-planar structure fabrication consisting of different materials Public/Granted day:2005-11-03
Information query
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