公开(公告)号：US08760805B2

公开(公告)日：2014-06-24

申请号：US13176134

申请日：2011-07-05

Applicant: Hisayoshi Watanabe ,  Hitoshi Hatate ,  Hideyuki Yatsu ,  Koichi Otani

Inventor： Hisayoshi Watanabe ,  Hitoshi Hatate ,  Hideyuki Yatsu ,  Koichi Otani

IPC: G11B5/127

CPC classification number: G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

Abstract: A thin-film magnetic head includes a slider substrate and a write element. The slider substrate has an air bearing surface at one side thereof. The write element has a recording magnetic pole film. The recording magnetic pole film is disposed on a plane crossing the air bearing surface over the slider substrate and has a large-width portion and a small-width portion continuously arranged in the named order toward the air bearing surface. The small-width portion has a smaller width than the large-width portion. Of the large-width portion and the small-width portion, at least the small-width portion has a first portion and a second portion. The second portion is continuous with an upper end of the first portion and has both side faces inclined in such a direction as to increase the width. An external angle of the first portion formed by a plane parallel to a bottom face and the side face is larger than an external angle of the second portion formed by a plane parallel to the bottom face and the side face.

Abstract translation: 薄膜磁头包括滑块基板和写入元件。 滑块基板在其一侧具有空气轴承表面。 写元件具有记录磁极膜。 记录磁极膜设置在与滑动基板上的空气轴承表面相交的平面上，并且具有朝向空气轴承表面依次连续排列的大宽度部分和小宽度部分。 小宽度部分的宽度比宽度大的部分小。 在大宽度部分和小宽度部分中，至少小宽度部分具有第一部分和第二部分。 第二部分与第一部分的上端连续，并且具有在增加宽度的方向上倾斜的两个侧面。 由平行于底面和侧面的平面形成的第一部分的外角比由平行于底面和侧面的平面形成的第二部分的外角大。

公开(公告)号：US20140002921A1

公开(公告)日：2014-01-02

申请号：US13535858

申请日：2012-06-28

Applicant: Masashi SANO ,  Hiromichi Umehara ,  Mutsumi Fujita ,  Isamu Toba ,  Tatsuhiro Nojima ,  Hitoshi Hatate ,  Hisayoshi Watanabe

Inventor： Masashi SANO ,  Hiromichi Umehara ,  Mutsumi Fujita ,  Isamu Toba ,  Tatsuhiro Nojima ,  Hitoshi Hatate ,  Hisayoshi Watanabe

IPC: G11B5/31

CPC classification number: G11B5/607

Abstract: A thin film magnetic recording head having a multilayer structure in which plural thin films are laminated and being a perpendicular recording type that applies a magnetic field perpendicularly to a magnetic recording medium and performs recording, includes a main magnetic pole exposed on an air bearing surface facing the magnetic recording medium and guiding a magnetic flux toward the magnetic recording medium, a thin film positioned beneath the main magnetic pole from a perspective of a lamination direction and configuring a sensor or a heater configured to determine a distance from the magnetic recording medium of the thin film magnetic recording head, and a light-absorbing portion positioned between the main magnetic pole and the thin film.

Abstract translation: 一种薄膜磁记录头，其具有层叠多个薄膜的多层结构，并且是垂直记录方式，其垂直于磁记录介质施加磁场并进行记录，该磁记录头包括暴露在空气轴承表面 磁记录介质，并向磁记录介质引导磁通量，从层叠方向的角度定位在主磁极下方的薄膜，以及配置传感器或加热器，该传感器或加热器被配置为确定与磁记录介质的距离 薄膜磁记录头和位于主磁极和薄膜之间的光吸收部分。

公开(公告)号：US20130062307A1

公开(公告)日：2013-03-14

申请号：US13230261

申请日：2011-09-12

Applicant: Hisayoshi WATANABE ,  Hideyuki Yatsu ,  Takayuki Nishizawa ,  Masashi Sano ,  Hiromichi Umehara ,  Takayasu Kanaya ,  Tetsuji Hori

Inventor： Hisayoshi WATANABE ,  Hideyuki Yatsu ,  Takayuki Nishizawa ,  Masashi Sano ,  Hiromichi Umehara ,  Takayasu Kanaya ,  Tetsuji Hori

IPC: C23F1/04 ,  G11B5/31 ,  G03F7/20

CPC classification number: G11B5/3163

Abstract: The present invention relates to a method of making a mask for patterning a thin film The method includes a step of forming an inorganic material, which is resolvable into alkali solution, on a substrate; a step of forming the inorganic material in a predetermined pattern; and a step of narrowing the inorganic material with the alkali solution to form the mask.

Abstract translation: 本发明涉及一种制备用于图案化薄膜的掩模的方法。该方法包括在基板上形成可分解成碱溶液的无机材料的步骤; 以预定图案形成无机材料的步骤; 以及用碱溶液使无机材料变窄以形成掩模的步骤。

公开(公告)号：US08282843B2

公开(公告)日：2012-10-09

申请号：US12591130

申请日：2009-11-10

Applicant: Tatsuhiro Nojima ,  Hisayoshi Watanabe ,  Masachika Hashino

Inventor： Tatsuhiro Nojima ,  Hisayoshi Watanabe ,  Masachika Hashino

IPC: B44C1/22

CPC classification number: G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49044

Abstract: A method of manufacturing a perpendicular magnetic head having a writing element that writes magnetic information to a recording medium includes forming a main magnetic pole part generating a magnetic field on a substrate; removing at least a part of the substrate and a material existing at a circumference of the main magnetic pole part to expose an entire circumference of the main magnetic pole part at a surface that becomes an opposing medium surface (ABS) opposite to the recording medium; forming a shield gap film that is made of a nonmagnetic material so as to cover the entire circumference of the main magnetic pole part at least at the surface that becomes the ABS; and forming a shield layer so as to cover an entire circumference of the shield gap film at least at the surface that becomes the ABS.

Abstract translation: 具有将磁信息写入记录介质的写入元件的垂直磁头的制造方法包括在基板上形成产生磁场的主磁极部， 去除所述基板的至少一部分和存在于所述主磁极部分的圆周处的材料，以在与所述记录介质相对的相对介质表面（ABS）的表面处暴露所述主磁极部分的整个周边; 形成由非磁性材料制成的屏蔽间隙膜，以便至少在成为ABS的表面上覆盖主磁极部分的整个周边; 以及形成屏蔽层，以便至少在成为ABS的表面处覆盖屏蔽间隙膜的整个周边。

公开(公告)号：US08080167B2

公开(公告)日：2011-12-20

申请号：US12389688

申请日：2009-02-20

Applicant: Hisayoshi Watanabe ,  Toshiomi Yokoyama ,  Nobuyuki Mori ,  Akihiro Kaneko ,  Michitaka Nishiyama ,  Kenji Yokoyama

Inventor： Hisayoshi Watanabe ,  Toshiomi Yokoyama ,  Nobuyuki Mori ,  Akihiro Kaneko ,  Michitaka Nishiyama ,  Kenji Yokoyama

IPC: B44C1/22

CPC classification number: G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49032

Abstract: The present invention relates to a shaping method of a thin film layer and a manufacturing method of a perpendicular recording magnetic head using the same. In the thin film layer shaping method according to the present invention, since a second thin film of a lower etching rate is etched by a preliminary etching amount allowing for a difference between the etching rate of the second thin film and an etching rate of a first thin film in side-by-side relationship with each other, both the first and second thin films can be etched by the same etching amount through a subsequent etching step, so that the thin film layer can be shaped into a given shape. Thus, the surface of the thin film layer can be planarized.

Abstract translation: 本发明涉及薄膜层的成形方法和使用该薄膜层的垂直记录磁头的制造方法。 在根据本发明的薄膜层成形方法中，由于通过初步蚀刻量蚀刻蚀刻速率较低的第二薄膜，从而允许第二薄膜的蚀刻速率与第一薄膜的蚀刻速率之间的差异 薄膜彼此并排关系，通过后续的蚀刻步骤可以通过相同的蚀刻量来蚀刻第一和第二薄膜，使得薄膜层可以成形为给定的形状。 因此，可以平坦化薄膜层的表面。

公开(公告)号：US08072706B2

公开(公告)日：2011-12-06

申请号：US12588440

申请日：2009-10-15

Applicant: Kei Hirata ,  Hideyuki Ukita ,  Shin Narushima ,  Isamu Toba ,  Hiromichi Umehara ,  Hisayoshi Watanabe ,  Hideyuki Yatsu

Inventor： Kei Hirata ,  Hideyuki Ukita ,  Shin Narushima ,  Isamu Toba ,  Hiromichi Umehara ,  Hisayoshi Watanabe ,  Hideyuki Yatsu

IPC: G11B5/127

CPC classification number: G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

Abstract: A main magnetic pole includes a first part extending from a medium facing surface to a point at a predetermined distance from the medium facing surface, and a second part other than the first part. An accommodation part for accommodating the main magnetic pole includes: a first layer having a groove; a second layer lying between the first layer and the main magnetic pole in the first layer's groove; and a third layer interposed in part between the second layer and the main magnetic pole in the first layer's groove. The second layer is formed of a metal material different from a material used to form the first layer. The third layer is formed of an inorganic insulating material. The second and third layers lie between the first layer and the first part. The second layer lies between the bottom of the first layer's groove and the second part, but the third layer does not. The distance between the bottom of the first layer's groove and the second part is smaller than that between the bottom and the first part.

Abstract translation: 主磁极包括从面向介质的表面延伸到与介质相对表面预定距离的点的第一部分和除第一部分之外的第二部分。 用于容纳主磁极的容纳部分包括：具有凹槽的第一层; 位于第一层槽中的第一层和主磁极之间的第二层; 以及在第一层槽中的部分地介于第二层和主磁极之间的第三层。 第二层由与用于形成第一层的材料不同的金属材料形成。 第三层由无机绝缘材料形成。 第二层和第三层位于第一层和第一层之间。 第二层位于第一层凹槽的底部和第二部分之间，但第三层不存在。 第一层槽的底部和第二部分之间的距离小于底部和第一部分之间的距离。

公开(公告)号：US20110127234A1

公开(公告)日：2011-06-02

申请号：US12591745

申请日：2009-11-30

Applicant: Hisayoshi Watanabe ,  Masachika Hashino ,  Michitoshi Tsuchiya ,  Koichi Otani ,  Tatsuhiro Nojima ,  Tsutomu Nishinaga ,  Hideyuki Ukita

Inventor： Hisayoshi Watanabe ,  Masachika Hashino ,  Michitoshi Tsuchiya ,  Koichi Otani ,  Tatsuhiro Nojima ,  Tsutomu Nishinaga ,  Hideyuki Ukita

IPC: G11B5/127

CPC classification number: G11B5/115 ,  G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

Abstract: A manufacturing method for a magnetic head includes the steps of; forming a structure on a lower shield, the structure including a lower gap, a main magnetic pole and first and second side gaps; forming first and second side shields; forming an upper gap; and forming an upper shield. In the step of forming the structure, an initial lower gap layer is formed on the lower shield, the initial lower gap layer including a pre-lower-gap portion, and two to-be-removed portions that are located on opposite sides of the pre-lower-gap portion. Then, a protrusion including the main magnetic pole and the first and second side gaps is formed on the pre-lower-gap portion. With the top surface of the protrusion covered with a mask, the initial lower gap layer is etched in part to thereby form the lower gap.

Abstract translation: 一种用于磁头的制造方法包括以下步骤： 在下屏蔽上形成结构，该结构包括下间隙，主磁极和第一和第二侧隙; 形成第一和第二侧面罩; 形成上部间隙; 并形成上护罩。 在形成该结构的步骤中，在下屏蔽件上形成初始下间隙层，初始下间隙层包括预先下间隙部分，以及两个待除去部分，其位于 前下间隙部分。 然后，在前下间隙部分上形成包括主磁极和第一和第二侧间隙的突起。 在凸起的顶表面被掩模覆盖的情况下，初始的下间隙层被部分蚀刻，从而形成下间隙。

公开(公告)号：US06893802B2

公开(公告)日：2005-05-17

申请号：US10157891

申请日：2002-05-31

Applicant: Hisayoshi Watanabe

Inventor： Hisayoshi Watanabe

IPC: C23C14/04 ,  G03F7/20 ,  G03F7/38 ,  G11B5/31 ,  G11B5/39 ,  H01F41/32 ,  H01F41/34 ,  H01L43/08 ,  H01L43/12 ,  G03F7/00 ,  G03F7/34

CPC classification number: H01F41/34 ,  G03F7/2022 ,  G03F7/38

Abstract: In a method of forming a patterned thin film, a first film to be patterned and a peelable film are sequentially formed on a base layer, and an undercut mask is then formed thereon. Then, using of the mask, the peelable film and the first film to be patterned are etched selectively to form a first patterned thin film. During the etching, a substance that forms the first film to be patterned deposits to form a deposition film on the peelable film. Then, a film to be patterned is formed over the entire surface. During the formation, a substance that forms the film to be patterned deposits to form another deposition film on the peelable film. The mask and the peelable film are then peeled off to remove the deposition films together.

Abstract translation: 在形成图案化薄膜的方法中，在基底层上依次形成待图案化的第一膜和可剥离膜，然后在其上形成底切掩模。 然后，使用掩模，选择性地蚀刻待图案化的可剥离膜和第一膜以形成第一图案化薄膜。 在蚀刻期间，形成待图案化的第一膜的物质沉积以在可剥离膜上形成沉积膜。 然后，在整个表面上形成待图案化的膜。 在形成期间，形成待图案的膜的物质沉积以在可剥离膜上形成另一沉积膜。 然后将掩模和可剥离膜剥离以将沉积膜一起去除。

公开(公告)号：US5870337A

公开(公告)日：1999-02-09

申请号：US986575

申请日：1997-12-05

Applicant: Takao Akaogi ,  Yasushige Ogawa ,  Tatsuya Kajita ,  Hisayoshi Watanabe ,  Minoru Yamashita

Inventor： Takao Akaogi ,  Yasushige Ogawa ,  Tatsuya Kajita ,  Hisayoshi Watanabe ,  Minoru Yamashita

IPC: G11C16/08 ,  G11C16/10 ,  G11C16/16 ,  G11C16/30 ,  G11C16/32 ,  G11C29/00 ,  H01L21/8247 ,  H01L27/105 ,  H01L27/115 ,  G11C16/06

CPC classification number: H01L27/11526 ,  G11C16/08 ,  G11C16/10 ,  G11C16/16 ,  G11C16/30 ,  G11C16/32 ,  G11C29/846 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11543

Abstract: A flash-erasable semiconductor memory device has a memory cell array including a plurality of memory cell transistors each having an insulated floating gate for storing information and a control electrode provided on the floating gate, wherein the flash-erasable semiconductor memory device includes a write control circuit supplied with a write control signal, when writing information. The write control circuit produces a control signal such that a leading edge of the drain control signal appears after a leading edge of the gate control signal. Further, the gate control circuit shuts off the gate control signal such that a trailing edge of the gate control signal appears after a trailing edge of the drain control signal.

Abstract translation: 闪存可擦除半导体存储器件具有存储单元阵列，其包括多个存储单元晶体管，每个存储单元晶体管具有用于存储信息的绝缘浮动栅极和设置在浮置栅极上的控制电极，其中闪存可擦除半导体存储器件包括写入控制 电路提供写入控制信号时，写入信息。 写入控制电路产生控制信号，使得漏极控制信号的前沿出现在栅极控制信号的前沿之后。 此外，栅极控制电路关闭栅极控制信号，使得栅极控制信号的后沿出现在漏极控制信号的后沿之后。

公开(公告)号：US5761127A

公开(公告)日：1998-06-02

申请号：US978976

申请日：1992-11-20

Applicant: Takao Akaogi ,  Yasushige Ogawa ,  Tatsuya Kajita ,  Hisayoshi Watanabe ,  Minoru Yamashita

Inventor： Takao Akaogi ,  Yasushige Ogawa ,  Tatsuya Kajita ,  Hisayoshi Watanabe ,  Minoru Yamashita

IPC: G11C16/08 ,  G11C16/10 ,  G11C16/16 ,  G11C16/30 ,  G11C16/32 ,  G11C29/00 ,  H01L21/8247 ,  H01L27/105 ,  H01L27/115 ,  G11C16/06

CPC classification number: H01L27/11526 ,  G11C16/08 ,  G11C16/10 ,  G11C16/16 ,  G11C16/30 ,  G11C16/32 ,  G11C29/846 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11543

Abstract: A flash-erasable semiconductor memory device comprises a memory cell array including a plurality of memory cell transistors each having an insulated floating gate for storing information and a control electrode provided on said floating gate, wherein the flash-erasable semiconductor memory device includes a write control circuit supplied with a write control signal, when writing information. The write control circuit produces a control signal such that a leading edge of the drain control signal appears after a leading edge of the gate control signal. Further, the gate control circuit shuts off the gate control signal such that a trailing edge of the gate control signal appears after a trailing edge of the drain control signal.