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    Mass spectrometer
    2.
    发明授权
    Mass spectrometer 有权
    质谱仪

    公开(公告)号：US08664588B2

    公开(公告)日：2014-03-04

    申请号：US13368549

    申请日：2012-02-08

    Applicant: Hiroyuki Noda ,  Mitsuru Onuma ,  Yoko Sato ,  Koji Ishiguro ,  Hidetoshi Morokuma ,  Shigeo Otsuki ,  Nami Ibi

    Inventor： Hiroyuki Noda ,  Mitsuru Onuma ,  Yoko Sato ,  Koji Ishiguro ,  Hidetoshi Morokuma ,  Shigeo Otsuki ,  Nami Ibi

    IPC: H01J49/00

    CPC classification number: H01J49/0022 ,  H01J49/0013 ,  H05K7/20136

    Abstract: In the spectrometer, heavy loads are arranged centrally inside a case having a height smaller than a width, and having a depth smaller than the height. The heavy loads include a vacuum chamber, a vacuum pump which evacuates the vacuum chamber, a sample introduction unit which introduces a sample to be measured and evaporates the sample, an ionization unit which ionizes the evaporated sample and provides it to the vacuum chamber, and an ion detection unit which is connected to the vacuum chamber. Circuit board storage units which store a plurality of circuit boards with a predetermined space therebetween are formed on both sides along a width direction of the case.

    Abstract translation: 在光谱仪中，重负荷被布置在具有小于宽度的高度的壳体的中央内部，并且具有比该高度更小的深度。 重负荷包括真空室，抽空真空室的真空泵，引入待测样品并蒸发样品的样品引入单元，离子化蒸发的样品并将其提供给真空室的离子化单元，以及 离子检测单元，连接到真空室。 在壳体的宽度方向的两侧形成存储有多个电路板的电路板存储单元。

    MASS SPECTROMETER AND MASS ANALYZING METHOD
    4.
    发明申请
    MASS SPECTROMETER AND MASS ANALYZING METHOD 有权
    质谱仪和质谱分析方法

    公开(公告)号：US20120326022A1

    公开(公告)日：2012-12-27

    申请号：US13527627

    申请日：2012-06-20

    Applicant: Shun KUMANO ,  Masuyuki Sugiyama ,  Yuichiro Hashimoto ,  Hideki Hasegawa ,  Masuyoshi Yamada ,  Hidetoshi Morokuma ,  Shuhei Hashiba

    Inventor： Shun KUMANO ,  Masuyuki Sugiyama ,  Yuichiro Hashimoto ,  Hideki Hasegawa ,  Masuyoshi Yamada ,  Hidetoshi Morokuma ,  Shuhei Hashiba

    IPC: H01J49/04

    CPC classification number: H01J49/0409 ,  H01J49/0495

    Abstract: A mass spectrometer including a sample attaching member of attaching a sample, an ionizing chamber including an introductory port of the sample attaching member and an ionization source of generating a sample ion, a vacuumed chamber having a mass analyzer of analyzing the sample ion, and an opening/closing mechanism provided between the ionizing chamber and the vacuumed chamber, in which the opening/closing mechanism is controlled from a closed state to an open state after introducing the sample attaching member into the ionizing chamber to thereby enable to perform ionization with inconsiderable fragmentation at a high sensitivity with a high throughput

    Abstract translation: 一种质谱仪，包括附着样品的样品附着构件，包括样品附着构件的入口的电离室和产生样品离子的离子源，具有分析样品离子的质量分析器的真空室，以及 设置在离子化室和真空室之间的开/关机构，其中将样品附着构件引入电离室之后，将开/关机构从关闭状态控制到打开状态，从而能够以不可分割的碎片进行电离 灵敏度高，吞吐量高

    MASS SPECTROMETER
    6.
    发明申请
    MASS SPECTROMETER 有权
    质谱仪

    公开(公告)号：US20120112061A1

    公开(公告)日：2012-05-10

    申请号：US13289633

    申请日：2011-11-04

    Applicant: Hidetoshi MOROKUMA ,  Yuichiro HASHIMOTO ,  Masuyuki SUGIYAMA ,  Masuyoshi YAMADA ,  Hideki HASEGAWA

    Inventor： Hidetoshi MOROKUMA ,  Yuichiro HASHIMOTO ,  Masuyuki SUGIYAMA ,  Masuyoshi YAMADA ,  Hideki HASEGAWA

    IPC: H01J49/04

    CPC classification number: H01J49/0013 ,  H01J49/0031 ,  H01J49/0422 ,  H01J49/0495 ,  H01J49/10 ,  H01J49/105 ,  H01J49/24 ,  H01J49/26

    Abstract: A mass spectrometer of reduced size and weight is provided which is capable to conduct highly accurate mass spectroscopy. The mass spectrometer includes an ion source adapted to ionize gas flowing in from outside in order to ionize a measurement sample and a mass spectroscopy section for separating the ionized measurement sample. The ion source has its interior reduced in pressure by differential pumping from the mass spectroscopy section and ionizes the gas when the interior pressure rises as it inhales the gas, and the mass spectroscopy section separates the ionized measurement sample when its interior pressure falls after inhale of the gas. The mass spectrometer may further include a restriction device for suppressing a flow rate of the gas the ion source inhales and an open/close device for opening and closing a flow of the gas the ion source inhales.

    Abstract translation: 提供了减小尺寸和重量的质谱仪，其能够进行高精度的质谱。 质谱仪包括离子源，其适于使从外部流入的气体电离，以便电离测量样品和用于分离离子化测量样品的质谱部分。 离子源的内部通过从质谱分析部分的差分泵送而在内部减压，并且当吸入气体时内部压力升高时电离气体，质谱仪分离离子化测量样品，当其内部压力在吸入后 气体。 质谱仪还可以包括用于抑制离子源吸入的气体的流量的限制装置和用于打开和关闭离子源吸入的气体流的打开/关闭装置。

    PATTERN MATCHING METHOD AND COMPUTER PROGRAM FOR EXECUTING PATTERN MATCHING
    8.
    发明申请
    PATTERN MATCHING METHOD AND COMPUTER PROGRAM FOR EXECUTING PATTERN MATCHING 有权
    图案匹配方法和计算机程序执行模式匹配

    公开(公告)号：US20110150345A1

    公开(公告)日：2011-06-23

    申请号：US13034237

    申请日：2011-02-24

    Applicant: Akiyuki SUGIYAMA ,  Hiroyuki Shindo ,  Hitoshi Komuro ,  Takumichi Sutani ,  Hidetoshi Morokuma

    Inventor： Akiyuki SUGIYAMA ,  Hiroyuki Shindo ,  Hitoshi Komuro ,  Takumichi Sutani ,  Hidetoshi Morokuma

    IPC: G06K9/62

    CPC classification number: G06K9/6204 ,  G06K9/4633

    Abstract: A pattern matching method which is capable of selecting a suitable measurement object pattern, even on a sample containing a periodic structure, and a computer program for making a computer execute the pattern matching. In a pattern matching method which executes matching between the design data-based first image of an object sample, and a second image, whether or not a periodic structure is included in a region to execute the matching is determined, so as to select a pattern, based on distance between an original point which is set in said image, and the pattern configuring said periodic structure, in the case where the periodic structure is included in said region, and to select a pattern based on coincidence of the pattern in said image, in the case where the periodic structure is not included in said region, and a computer program product.

    Abstract translation: 能够选择合适的测量对象图案的模式匹配方法，即使在包含周期性结构的样本上，也可以使计算机程序使计算机执行模式匹配。 在执行对象样本的基于设计数据的第一图像与第二图像之间的匹配的图案匹配方法中，确定在区域中是否包括周期性结构以执行匹配，以便选择图案 基于在所述图像中设置的原始点与构成所述周期性结构的图案之间的距离，在所述区域中包括周期性结构的情况下，以及基于所述图像中的图案的一致性来选择图案 在周期性结构不包括在所述区域中的情况下，以及计算机程序产品。

    PATTERN MEASUREMENT APPARATUS
    10.
    发明申请
    PATTERN MEASUREMENT APPARATUS 有权
    图案测量装置

    公开(公告)号：US20100202654A1

    公开(公告)日：2010-08-12

    申请号：US12763710

    申请日：2010-04-20

    Applicant: Ryoichi MATSUOKA ,  Akihiro Onizawa ,  Akiyuki Sugiyama ,  Hidetoshi Morokuma ,  Yasutaka Toyoda

    Inventor： Ryoichi MATSUOKA ,  Akihiro Onizawa ,  Akiyuki Sugiyama ,  Hidetoshi Morokuma ,  Yasutaka Toyoda

    IPC: G06K9/00

    CPC classification number: G03F7/70616 ,  G06T7/0006 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/2817

    Abstract: Mutual compatibility is established between the measurement with a high magnification and the measurement in a wide region. A pattern measurement apparatus is proposed which adds identification information to each of fragments that constitute a pattern within an image obtained by the SEM, and which stores the identification information in a predetermined storage format. Here, the identification information is added to each fragment for distinguishing between one fragment and another fragment. According to the above-described configuration, it turns out that the identification information is added to each fragment on the SEM image which has possessed no specific identification information originally. As a result, it becomes possible to implement the SEM-image management based on the identification information.

    Abstract translation: 在高倍率的测量与广泛的测量之间建立相互兼容性。 提出了一种图案测量装置，其将识别信息添加到构成由SEM获得的图像内的图案的每个片段，并以预定的存储格式存储识别信息。 这里，将识别信息添加到每个片段以区分一个片段和另一个片段。 根据上述结构，原来在原始不具有特定识别信息的SEM图像上将识别信息添加到各片段。 结果，可以实现基于识别信息的SEM图像管理。

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