Invention Application
- Patent Title: PATTERN MEASUREMENT APPARATUS
- Patent Title (中): 图案测量装置
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Application No.: US12763710Application Date: 2010-04-20
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Publication No.: US20100202654A1Publication Date: 2010-08-12
- Inventor: Ryoichi MATSUOKA , Akihiro Onizawa , Akiyuki Sugiyama , Hidetoshi Morokuma , Yasutaka Toyoda
- Applicant: Ryoichi MATSUOKA , Akihiro Onizawa , Akiyuki Sugiyama , Hidetoshi Morokuma , Yasutaka Toyoda
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2007-207344 20070809
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
Mutual compatibility is established between the measurement with a high magnification and the measurement in a wide region. A pattern measurement apparatus is proposed which adds identification information to each of fragments that constitute a pattern within an image obtained by the SEM, and which stores the identification information in a predetermined storage format. Here, the identification information is added to each fragment for distinguishing between one fragment and another fragment. According to the above-described configuration, it turns out that the identification information is added to each fragment on the SEM image which has possessed no specific identification information originally. As a result, it becomes possible to implement the SEM-image management based on the identification information.
Public/Granted literature
- US08445871B2 Pattern measurement apparatus Public/Granted day:2013-05-21
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