-
1.发明授权公开(公告)号：US08091190B2
公开(公告)日：2012-01-10
申请号：US12711484
申请日：2010-02-24
CPC分类号： H03H3/02 , H03H9/02086 , H03H9/175 , H03H2003/025 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49004 , Y10T29/49005 , Y10T29/4913
摘要： A mirror for a piezoelectric resonator consisting of alternately arranged layers of high and low acoustic impedance is manufactured by at first producing a first layer on which a second layer is produced, so that the second layer partially covers the first layer. Then, a planarization layer is applied on the first layer and on the second layer. Subsequently, a portion of the second layer is exposed by structuring the planarization layer, wherein the portion is associated with an active region of the piezoelectric resonator. Finally, the resulting structure is planarized by removing the portions of the planarization layer remaining outside the portion.
摘要翻译： 通过首先制造其上制造第二层的第一层，制造由交替布置的高和低声阻抗层组成的压电谐振器的反射镜，使得第二层部分地覆盖第一层。 然后，在第一层和第二层上施加平坦化层。 随后，通过构造平坦化层来暴露第二层的一部分，其中该部分与压电谐振器的有源区相关。 最后，通过去除残留在该部分外部的平坦化层的部分，将所得到的结构平坦化。
-
2.发明申请公开(公告)号：US20100146755A1
公开(公告)日：2010-06-17
申请号：US12711484
申请日：2010-02-24
IPC分类号： H04R17/00
CPC分类号： H03H3/02 , H03H9/02086 , H03H9/175 , H03H2003/025 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49004 , Y10T29/49005 , Y10T29/4913
摘要： A mirror for a piezoelectric resonator consisting of alternately arranged layers of high and low acoustic impedance is manufactured by at first producing a first layer on which a second layer is produced, so that the second layer partially covers the first layer. Then, a planarization layer is applied on the first layer and on the second layer. Subsequently, a portion of the second layer is exposed by structuring the planarization layer, wherein the portion is associated with an active region of the piezoelectric resonator. Finally, the resulting structure is planarized by removing the portions of the planarization layer remaining outside the portion.
摘要翻译： 通过首先制造其上制造第二层的第一层，制造由交替布置的高和低声阻抗层组成的压电谐振器的反射镜，使得第二层部分地覆盖第一层。 然后，在第一层和第二层上施加平坦化层。 随后，通过构造平坦化层来暴露第二层的一部分，其中该部分与压电谐振器的有源区相关联。 最后，通过去除残留在该部分外部的平坦化层的部分，将所得到的结构平坦化。
-
公开(公告)号：US07669310B2
公开(公告)日：2010-03-02
申请号：US11583380
申请日：2006-10-18
申请人： Gernot Fattinger
发明人： Gernot Fattinger
IPC分类号： H04R31/00
CPC分类号： H03H3/02 , H03H2003/025 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908 , Y10T29/49155 , Y10T29/49156 , Y10T156/1052
摘要： An acoustic mirror of alternately arranged layers of high and low acoustic impedances is manufactured in that a basic material having a first layer of the layer sequence is initially provided, on which a second layer of the layer sequence is created on the first layer such that the second layer of the layer sequence partially covers the first layer. Subsequently, a planarization layer is applied onto the layer sequence, and the planarization layer is removed in an area which in the common layer plane projects laterally beyond the second layer so as to result in a residual planarization layer. Finally, a termination layer is applied onto the layer sequence and the residual planarization layer.
摘要翻译： 制造具有高和低声阻抗的交替布置层的声镜，其中首先提供具有层序列的第一层的基本材料，在第一层上形成层序列的第二层，使得 层序列的第二层部分地覆盖第一层。 随后，将平坦化层施加到层序列上，并且在公共层平面中横向突出超过第二层的区域中去除平坦化层，以产生残余平坦化层。 最后，终止层被施加到层序列和剩余平坦化层上。
-
4.发明申请公开(公告)号：US20070254397A1
公开(公告)日：2007-11-01
申请号：US11429469
申请日：2006-05-05
申请人： Gernot Fattinger , Klaus Diefenbeck
发明人： Gernot Fattinger , Klaus Diefenbeck
IPC分类号： H01L21/00
摘要： A method for manufacturing a patterned bottom electrode in a piezoelectric device comprises the steps of providing a basic material and producing a layer structure of a conductive material on the basic material. A protective layer is applied on the layer structure over an area. Thereafter, a planarization layer is applied on the protective layer and on the basic material. A portion of the protective layer is then exposed by patterning the planarization layer. Subsequently, the pattern is planarized by removing the portions of the planarization layer remaining outside the portion such that the protective layer laterally abuts on the planarization layer in a flush manner and forms a planar surface. The protective layer is then removed along with a corresponding part of the planarization layer laterally arranged in a flush manner. This results in the layer structure and the remaining planarization layer forming a planar surface.
摘要翻译： 一种用于在压电器件中制造图案化底部电极的方法包括以下步骤：在基底材料上提供基底材料并产生导电材料的层结构。 在一个区域上的层结构上施加保护层。 此后，在保护层和基材上施加平坦化层。 然后通过图案化平坦化层来暴露保护层的一部分。 随后，通过去除保留在该部分外部的平坦化层的部分使得保护层以平齐的方式横向邻接在平坦化层上并形成平坦表面，使图案平坦化。 然后将保护层与平坦化层的相应部分一起以排列方式横向排列。 这导致层结构和剩余的平坦化层形成平坦表面。
-
5.发明授权Thin-film BAW filter, and a method for production of a thin-film BAW filter 失效薄膜BAW滤波器，以及制造薄膜BAW滤波器的方法公开(公告)号：US07825747B2
公开(公告)日：2010-11-02
申请号：US11272544
申请日：2005-11-10
申请人： Gernot Fattinger , Jyrki Kaitila
发明人： Gernot Fattinger , Jyrki Kaitila
IPC分类号： H03H9/58
CPC分类号： H03H9/02118 , H03H9/0095 , H03H9/175 , H03H9/584 , H03H9/589
摘要： A thin-film BAW filter has at least one CRF section and at least one ladder or grating filter section, with the CRF section having at least two coupled resonators, with the CRF section and the ladder or grating filter section being integrated on a common substrate, in order to produce a thin-film BAW filter. In a method for production of a thin-film BAW filter, having at least one CRF section and at least one ladder or grating filter section, the CRF section has at least two coupled resonators and the CRF section and the ladder or grating filter section are integrated on a common substrate.
摘要翻译： 薄膜BAW滤波器具有至少一个CRF部分和至少一个梯形或光栅滤波器部分，其中CRF部分具有至少两个耦合的谐振器，其中CRF部分和梯形或光栅滤波器部分集成在共同的基板上 ，以生产薄膜BAW过滤器。 在制造具有至少一个CRF部分和至少一个梯形或光栅滤波器部分的薄膜BAW滤波器的方法中，CRF部分具有至少两个耦合的谐振器，并且CRF部分和梯形或光栅滤波器部分 集成在共同的基板上。
-
6.发明授权公开(公告)号：US07491569B2
公开(公告)日：2009-02-17
申请号：US11429469
申请日：2006-05-05
申请人： Gernot Fattinger , Klaus Diefenbeck
发明人： Gernot Fattinger , Klaus Diefenbeck
IPC分类号： H01L21/00
摘要： A method for manufacturing a patterned bottom electrode in a piezoelectric device comprises the steps of providing a basic material and producing a layer structure of a conductive material on the basic material. A protective layer is applied on the layer structure over an area. Thereafter, a planarization layer is applied on the protective layer and on the basic material. A portion of the protective layer is then exposed by patterning the planarization layer. Subsequently, the pattern is planarized by removing the portions of the planarization layer remaining outside the portion such that the protective layer laterally abuts on the planarization layer in a flush manner and forms a planar surface. The protective layer is then removed along with a corresponding part of the planarization layer laterally arranged in a flush manner. This results in the layer structure and the remaining planarization layer forming a planar surface.
摘要翻译： 一种用于在压电器件中制造图案化底部电极的方法包括以下步骤：在基底材料上提供基底材料并产生导电材料的层结构。 在一个区域上的层结构上施加保护层。 此后，在保护层和基材上施加平坦化层。 然后通过图案化平坦化层来暴露保护层的一部分。 随后，通过去除保留在该部分外部的平坦化层的部分使得保护层以平齐的方式横向邻接在平坦化层上并形成平坦表面，使图案平坦化。 然后将保护层与平坦化层的相应部分一起以排列方式横向排列。 这导致层结构和剩余的平坦化层形成平坦表面。
-
7.发明申请Piezoelectric Resonator Structure and Method for Manufacturing a Coupled Resonator Device 有权压电谐振器结构及制造耦合谐振器器件的方法公开(公告)号：US20080309432A1
公开(公告)日：2008-12-18
申请号：US11764042
申请日：2007-06-15
CPC分类号： H03H9/584 , H03H3/04 , H03H9/589 , H03H2003/0428 , H03H2003/0435 , H03H2003/0442 , H03H2003/0478 , Y10T29/42
摘要： A method for manufacturing a coupled resonator device includes forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device includes a stack of the plurality of layers, the plurality of layers including a first piezo-layer with a first and a second electrode layer sandwiching the first piezo-layer, a second piezo-layer with a first and a second electrode layer sandwiching the second piezo-layer, the first and second piezo-layers being acoustically coupled to each other.
摘要翻译： 一种用于制造耦合谐振器装置的方法包括形成多个层的第一部分，修整第一部分的暴露层并形成多个层的剩余部分。 所述耦合谐振器装置包括所述多个层的堆叠，所述多个层包括具有夹着所述第一压电层的第一和第二电极层的第一压电层，具有第一和第二电极的第二压电层 层夹着第二压电层，第一和第二压电层彼此声学耦合。
-
8.发明授权公开(公告)号：US07535324B2
公开(公告)日：2009-05-19
申请号：US11764042
申请日：2007-06-15
IPC分类号： H03H9/00
CPC分类号： H03H9/584 , H03H3/04 , H03H9/589 , H03H2003/0428 , H03H2003/0435 , H03H2003/0442 , H03H2003/0478 , Y10T29/42
摘要： A method for manufacturing a coupled resonator device includes forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device includes a stack of the plurality of layers, the plurality of layers including a first piezo-layer with a first and a second electrode layer sandwiching the first piezo-layer, a second piezo-layer with a first and a second electrode layer sandwiching the second piezo-layer, the first and second piezo-layers being acoustically coupled to each other.
摘要翻译： 一种用于制造耦合谐振器装置的方法包括形成多个层的第一部分，修整第一部分的暴露层并形成多个层的剩余部分。 所述耦合谐振器装置包括所述多个层的堆叠，所述多个层包括具有夹着所述第一压电层的第一和第二电极层的第一压电层，具有第一和第二电极的第二压电层 层夹着第二压电层，第一和第二压电层彼此声学耦合。
-
9.发明申请Method of manufacturing an acoustic mirror for piezoelectric resonator and method of manufacturing a piezoelectric resonator 失效制造用于压电谐振器的声反射镜的方法和制造压电谐振器的方法公开(公告)号：US20070199185A1
公开(公告)日：2007-08-30
申请号：US11361840
申请日：2006-02-24
IPC分类号： H04R17/00
CPC分类号： H03H3/02 , H03H9/02086 , H03H9/175 , H03H2003/025 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49004 , Y10T29/49005 , Y10T29/4913
摘要： A mirror for a piezoelectric resonator consisting of alternately arranged layers of high and low acoustic impedance is manufactured by at first producing a first layer on which a second layer is produced, so that the second layer partially covers the first layer. Then, a planarization layer is applied on the first layer and on the second layer. Subsequently, a portion of the second layer is exposed by structuring the planarization layer, wherein the portion is associated with an active region of the piezoelectric resonator. Finally, the resulting structure is planarized by removing the portions of the planarization layer remaining outside the portion.
摘要翻译： 通过首先制造其上制造第二层的第一层，制造由交替布置的高和低声阻抗层组成的压电谐振器的反射镜，使得第二层部分地覆盖第一层。 然后，在第一层和第二层上施加平坦化层。 随后，通过构造平坦化层来暴露第二层的一部分，其中该部分与压电谐振器的有源区相关联。 最后，通过去除残留在该部分外部的平坦化层的部分，将所得到的结构平坦化。
-
10.发明申请Thin-film BAW filter, and a method for production of a thin-film BAW filter 失效薄膜BAW滤波器，以及制造薄膜BAW滤波器的方法公开(公告)号：US20060119453A1
公开(公告)日：2006-06-08
申请号：US11272544
申请日：2005-11-10
申请人： Gernot Fattinger , Jyrki Kaitila
发明人： Gernot Fattinger , Jyrki Kaitila
IPC分类号： H03H9/58
CPC分类号： H03H9/02118 , H03H9/0095 , H03H9/175 , H03H9/584 , H03H9/589
摘要： A thin-film BAW filter has at least one CRF section and at least one ladder or grating filter section, with the CRF section having at least two coupled resonators, with the CRF section and the ladder or grating filter section being integrated on a common substrate, in order to produce a thin-film BAW filter. In a method for production of a thin-film BAW filter, having at least one CRF section and at least one ladder or grating filter section, the CRF section has at least two coupled resonators and the CRF section and the ladder or grating filter section are integrated on a common substrate.
摘要翻译： 薄膜BAW滤波器具有至少一个CRF部分和至少一个梯形或光栅滤波器部分，其中CRF部分具有至少两个耦合的谐振器，其中CRF部分和梯形或光栅滤波器部分集成在共同的基板上 ，以生产薄膜BAW过滤器。 在制造具有至少一个CRF部分和至少一个梯形或光栅滤波器部分的薄膜BAW滤波器的方法中，CRF部分具有至少两个耦合的谐振器，并且CRF部分和梯形或光栅滤波器部分是 集成在共同的基板上。
-
-
-
-
-
-
-
-
-
搜索结果
15 条记录 (耗时 0.012 秒)
