Method of and apparatus for a direct voltage arc discharge enhanced
reactive treatment of objects
    1.
    发明授权
    Method of and apparatus for a direct voltage arc discharge enhanced reactive treatment of objects 失效
    用于直流电压放电的方法和装置增强了对象的反应处理

    公开(公告)号:US5336326A

    公开(公告)日:1994-08-09

    申请号:US757712

    申请日:1991-09-11

    摘要: An apparatus for a reactive treatment of the surface of a workpiece, in which a process gas is brought into a chamber and a direct voltage arc discharge is generated in the chamber, the arc discharge is assisted or maintained, respectively by introducing a flow of charged particles. In known treatment methods, plasma generated in the direct voltage arc are generally distributed non-homogeneously in the inner space of the chamber and the area with a density of the plasma which is sufficient for the reactive surface treatment is relatively small. According to the invention this problem is solved in that the distribution of the effect of the treatment of the plasma in the chamber at least along a predetermined plane is set, and specifically by a distribution of openings for the process gas over a given area and/or by a distribution of the arc discharges in the chamber over a given area. The flow of charged particles enters into the chamber via a plurality of distribution openings. By such an arrangement, spatially large plasmas having high densities of ionization and acceptable densities of energy are realized, and it is possible to perform treatment of large surface areas and also treatment processes on objects which are thermally sensitive.

    摘要翻译: 在室内产生工件表面的反应处理装置,其中处理气体进入室和直流电压放电,电弧放电分别通过引入带电的流动来辅助或维持 粒子。 在已知的处理方法中,在直流电压电弧中产生的等离子体通常分布在室的内部空间中,具有等离子体密度足以用于反应性表面处理的面积相对较小。 根据本发明,这个问题的解决之处在于,至少沿着预定平面来设定等离子体在腔室中的处理效果的分布,具体地说是通过给定区域上的处理气体的开口的分布和/ 或者通过在给定区域中的腔室中的电弧放电的分布。 带电粒子的流动通过多个分配开口进入腔室。 通过这样的布置,实现了具有高密度的电离和可接受的能量密度的空间较大的等离子体,并且可以对热敏感的物体进行大的表面积处理和处理工艺。

    Coated highly wear-resistant tool and physical coating process therefor
    3.
    发明授权
    Coated highly wear-resistant tool and physical coating process therefor 失效
    涂层高耐磨工具及其物理涂装工艺

    公开(公告)号:US5208102A

    公开(公告)日:1993-05-04

    申请号:US822604

    申请日:1992-01-17

    摘要: Coated highly wear-resistant tools have an Me.sup.1.sub.1-x (.alpha..sub.2 Me.sup.2 * .alpha..sub.3 Me.sup.3 * . . . .alpha..sub.n Me.sup.n).sub.x N.sub.u C.sub.v O.sub.w coating, wherein Me.sup.1 is a metal of the chemical group IVb of the periodic system, and Me.sup.2, Me.sup.3, . . . , Me.sup.n are other metals. The values u+v+w=1 and the Me concentration changes at least once continuously over the layer thickness to .alpha..sub.2 Me.sup.2 * .alpha..sub.3 Me.sup.3, . . . .alpha..sub.n Me.sup.n. The value for x is preferably between 0.1 and 0.7, the values for v and/or w can be approximately zero or w

    摘要翻译: 涂层的高耐磨工具具有Me11-x(α2Me2*α3Me3* ...αnnen)xNuCvOw涂层,其中Me1是周期性系统的化学组IVb的金属,Me2,Me3。 。 。 男人是其他金属。 值u + v + w =​​ 1,Me浓度在层厚度上至少一次连续变化到α2Me2*α3M3。 。 。 阿尔法 x的值优选在0.1和0.7之间,v和/或w的值可以近似为零或w <0.3,而另外的金属Me2,Me3, 。 。 男士是周期性系统化学组IVb和/或钒和/或优选铝的另一种金属。 在与已知工具相比较的根据本发明的工具的工作任务中,可以获得显着增加的使用寿命。 在涂层的生产中,使用物理涂覆方法,其中至少两股蒸气流与工具的基体之间的比例以这样的方式变化,使得在基体上具有连续交替材料的涂层 得到浓度。

    Method of producing coating using negative DC pulses with specified duty
factor
    4.
    发明授权
    Method of producing coating using negative DC pulses with specified duty factor 失效
    使用具有指定负荷因子的负直流脉冲生产涂层的方法

    公开(公告)号:US5192578A

    公开(公告)日:1993-03-09

    申请号:US613390

    申请日:1990-11-14

    CPC分类号: C23C14/3478 C23C14/325

    摘要: For coating workpieces having basic bodies (3), with a ceramic, electrically non-conducting material, during the coating process a pulsating dc voltage is applied to the basic bodies (3) or their holders (36). Preferably the pulse height is changed during vaporization used for the coating process, from high negative values to smaller negative values. A further layer can be applied onto the workpieces coated in this way whereby these work-pieces, due to their excellent corrosion resistance, are suited as pieces of jewelry which can be exposed in particular to ocean water and body perspiration, as rolling bodies in which the use of oil or grease as corrosion protection can be dispensed with, and as separating and cutting tools for organic materials.

    摘要翻译: 对于具有基体(3)的具有陶瓷,不导电材料的工件,在涂覆过程期间,将脉动直流电压施加到基体(3)或其保持器(36)。 优选地,在用于涂覆过程的蒸发期间脉冲高度被改变,从高负值到较小的负值。 可以将另一层施加到以这种方式涂覆的工件上,由于这些工件由于其优异的耐腐蚀性而适合作为可以特别暴露于海洋水和身体排汗的首饰的首饰,作为滚动体,其中 可以省去使用油或油脂作为防腐蚀保护,以及作为有机材料的分离和切割工具。

    Apparatus for vapor deposition and evaporator
    7.
    发明授权
    Apparatus for vapor deposition and evaporator 失效
    气相沉积和蒸发器的设备

    公开(公告)号:US06207029B1

    公开(公告)日:2001-03-27

    申请号:US08679386

    申请日:1996-07-09

    申请人: Erich Bergmann

    发明人: Erich Bergmann

    IPC分类号: C23C1424

    CPC分类号: H01J37/32422

    摘要: The invention concerns an apparatus for the plasma assisted physical vapor deposition of coatings onto workpieces and a cathode spot arc evaporator and the form of integration of the evaporator in the coating apparatus.

    摘要翻译: 本发明涉及一种用于等离子体辅助物理气相沉积到工件上的设备和阴极点弧蒸发器以及蒸发器在涂覆设备中的整合形式。

    Plasma CVD method for producing a diamond coating
    8.
    发明授权
    Plasma CVD method for producing a diamond coating 失效
    用于制备金刚石涂层的等离子体CVD方法

    公开(公告)号:US5616373A

    公开(公告)日:1997-04-01

    申请号:US215965

    申请日:1994-03-18

    摘要: The invention relates to a method for depositing a diamond coating on a workpiece, for instance a drawing die or a tool punch, whereby a reactive plasma supported coating method is used. According to the invention the generation of the plasma is made by a direct current discharge, whereby additionally a flow of charged particles is fed into the discharge gap; according to the invention the workpiece to be coated is positioned in the discharge gap. Due to the inventive design a relatively long discharge gap can be used, such that also large surface areas can be coated; the coating is made at a location of the highest homogeneity and density of the plasma. By means of the invention a method is provided which can be controlled regarding financial expenses and in a reliable manner and which is suitable for large surface area coating.

    摘要翻译: 本发明涉及一种用于在工件上沉积金刚石涂层的方法,例如拉丝模具或工具冲头,由此使用反应等离子体支撑的涂覆方法。 根据本发明,通过直流放电制造等离子体的产生,由此另外将带电粒子的流进给到放电间隙中; 根据本发明,待涂覆的工件位于放电间隙中。 由于本发明的设计,可以使用相当长的放电间隙,使得也可以涂覆大的表面积; 涂层在等离子体的最高均匀性和密度的位置处制成。 通过本发明,提供了一种能够以可靠的方式对财务费用进行控制并适用于大面积涂布的方法。

    Method of and apparatus for a direct voltage arc discharge enhanced
reactive treatment of objects
    9.
    发明授权
    Method of and apparatus for a direct voltage arc discharge enhanced reactive treatment of objects 失效
    用于直流电压放电的方法和装置增强了对象的反应处理

    公开(公告)号:US5554255A

    公开(公告)日:1996-09-10

    申请号:US222378

    申请日:1994-04-04

    摘要: A method and apparatus for a reactive treatment of the surface of a workpiece, in which a process gas is brought into a chamber and a direct voltage arc discharge is generated in the chamber, the arc discharge is assisted or maintained, respectively by a coupling in of a flow of charged particles. In known treatment methods plasma generated in the direct voltage arc are generally distributed inhomogeneously in the inner space of the chamber and the area with a density of the plasma which is sufficient for the reactive surface treatment is relatively small. According to the invention this problem is solved in that the distribution of the effect of the treatment of the plasma in the chamber at least along a predetermined plane is set, and specifically by a setting of an areal distribution of the process gas inlet and/or setting of an areal distribution of the arc discharges in the chamber, in that the flow of charged particles is coupled into the chamber via a plurality of distribution openings. By such means, spatially large plasmas having high densities of ionization and acceptable densities of energy can be realized, such that it is possible to perform on the one hand treatment of large surface areas and on the other hand also treatment processes on objects which are thermally sensitive.

    摘要翻译: 一种用于对工件表面进行反应处理的方法和装置,其中处理气体进入室并且在室中产生直流电压放电,电弧放电分别由辅助或保持 的带电粒子流。 在已知的处理方法中,在直流电压电弧中产生的等离子体通常在室的内部空间中非均匀地分布,具有足够用于反应性表面处理的等离子体密度的区域相对较小。 根据本发明,这个问题的解决之处在于,至少沿着预定的平面设置等离子体处理在腔室中的效果的分布,具体地说,通过设定工艺气体入口的面积分布和/或 设置室中的电弧放电的面积分布,因为带电粒子的流经多个分配开口连接到腔室中。 通过这种方式,可以实现具有高密度的电离和可接受的能量密度的空间上较大的等离子体,从而可以一方面执行大表面积的处理,另一方面也可以对热的物体进行处理 敏感。

    Method and apparatus for regulating a degree of reaction in a coating
process
    10.
    发明授权
    Method and apparatus for regulating a degree of reaction in a coating process 失效
    用于调节涂布过程中的反应程度的方法和装置

    公开(公告)号:US5413684A

    公开(公告)日:1995-05-09

    申请号:US111645

    申请日:1993-08-25

    申请人: Erich Bergmann

    发明人: Erich Bergmann

    IPC分类号: C23C14/34 C23C14/00 C23C14/54

    CPC分类号: C23C14/54 C23C14/0021

    摘要: A method and apparatus for controlling a ratio .gamma.=x/y, for the coating of a work piece with a layer F.sub.x G.sub.y, using plasma-enhanced reactive deposition processes, includes changing the rate at which a solid material is vaporized and also controlling the atmosphere within the vacuum chamber of the apparatus.

    摘要翻译: 用于使用等离子体增强反应沉积方法来控制用于涂覆具有层FxGy的工件的比率γ= x / y的方法和装置包括改变固体材料蒸发的速率并且还控制气氛 在设备的真空室内。