发明授权
US4324803A Process for depositing on substrates, by cathode sputtering, a
self-lubricating coating of metal chalcogenides and the coating
obtained by this process
失效
通过阴极溅射沉积在基底上的方法,金属硫族化物的自润滑涂层和通过该方法获得的涂层
- 专利标题: Process for depositing on substrates, by cathode sputtering, a self-lubricating coating of metal chalcogenides and the coating obtained by this process
- 专利标题(中): 通过阴极溅射沉积在基底上的方法,金属硫族化物的自润滑涂层和通过该方法获得的涂层
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申请号: US196483申请日: 1980-06-09
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公开(公告)号: US4324803A公开(公告)日: 1982-04-13
- 发明人: Erich Bergmann , Georges Melet
- 申请人: Erich Bergmann , Georges Melet
- 申请人地址: CHX Carouge
- 专利权人: Battelle Memorial Institute
- 当前专利权人: Battelle Memorial Institute
- 当前专利权人地址: CHX Carouge
- 优先权: CHX10455/78 19781009
- 主分类号: C23C14/06
- IPC分类号: C23C14/06 ; C23C14/35 ; G04B31/08 ; B32B9/00 ; C23C15/00
摘要:
A metal chalcogenide coating, in particular of molybdenum sulphide, is deposited on a substrate by high speed cathode sputtering. This coating is turbostratic and has an unusually high resistance to wear produced by frictional forces.
公开/授权文献
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