发明授权
US4324803A Process for depositing on substrates, by cathode sputtering, a self-lubricating coating of metal chalcogenides and the coating obtained by this process 失效
通过阴极溅射沉积在基底上的方法,金属硫族化物的自润滑涂层和通过该方法获得的涂层

Process for depositing on substrates, by cathode sputtering, a
self-lubricating coating of metal chalcogenides and the coating
obtained by this process
摘要:
A metal chalcogenide coating, in particular of molybdenum sulphide, is deposited on a substrate by high speed cathode sputtering. This coating is turbostratic and has an unusually high resistance to wear produced by frictional forces.
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