HIGH RESOLUTION AUTOFOCUS INSPECTION SYSTEM
    5.
    发明申请
    HIGH RESOLUTION AUTOFOCUS INSPECTION SYSTEM 审中-公开
    高分辨率自动检测系统

    公开(公告)号:US20130113919A1

    公开(公告)日:2013-05-09

    申请号:US13809440

    申请日:2011-07-13

    IPC分类号: G01N21/95 H04N7/18

    摘要: An inspection device comprises a camera assembly including an objective lens that captures and collimates light associated with an object being inspected, an image forming lens that forms an image of the object based on the collimated light, and a camera that renders the image. The camera assembly defines a focal point distance from the objective lens that defines a focal point of the camera assembly. The inspection device comprises an optical sensor positioned to detect an actual distance between the objective lens and the object, an actuator that controls positioning of the objective lens to control the actual distance between the objective lens and the object, and a control unit that receives signals from the optical sensor indicative of the actual distance. Control signals from the control unit can control the actuator to adjust the actual distance such that the actual distance substantially equals the focal point distance.

    摘要翻译: 检查装置包括相机组件,其包括物镜,其捕获并准直与被检查物体相关联的光,基于准直光形成物体的图像的成像透镜以及呈现图像的照相机。 照相机组件限定了距物镜的焦点距离,该距离定义了相机组件的焦点。 检查装置包括光学传感器,其被设置为检测物镜与物体之间的实际距离,控制物镜的定位以控制物镜与物体之间的实际距离的致动器,以及接收信号的控制单元 从光学传感器指示实际距离。 来自控制单元的控制信号可以控制致动器来调节实际距离,使得实际距离基本上等于焦点距离。

    METHOD AND APPARATUS FOR PHOTOIMAGING A SUBSTRATE
    7.
    发明申请
    METHOD AND APPARATUS FOR PHOTOIMAGING A SUBSTRATE 有权
    用于照射基板的方法和装置

    公开(公告)号:US20100304309A1

    公开(公告)日:2010-12-02

    申请号:US12472618

    申请日:2009-05-27

    IPC分类号: G03F7/20 G03B27/54

    CPC分类号: G03B27/54 G03F7/70791

    摘要: A method includes providing a substrate having a layer of photosensitive material thereon and a mask having contiguous first, second, and third portions; and sequentially: i) scanning the first portion with a light beam at a first rate and subsequently impinges on the photosensitive material at an exposure zone; ii) fixing the scanning within the second portion; and iii) resuming scanning through the third portion. Throughout the process the substrate moves through the exposure zone. An apparatus for carrying out the process includes a light beam source, a mask mount, a mask stage, a conveyor assembly, and at least one optical element for manipulating the light beam into a rectangular light beam.

    摘要翻译: 一种方法包括提供其上具有感光材料层的基底和具有相邻的第一,第二和第三部分的掩模; 并且顺序地:i)以第一速率用光束扫描第一部分,随后在曝光区域处撞击感光材料; ii)将扫描固定在第二部分内; 和iii)通过第三部分恢复扫描。 在整个过程中,基板移动通过曝光区。 用于执行该处理的装置包括光束源,掩模座,掩模台,传送器组件以及用于将光束操纵成矩形光束的至少一个光学元件。

    OPTICAL PROPERTY SENSOR
    8.
    发明申请
    OPTICAL PROPERTY SENSOR 有权
    光学传感器

    公开(公告)号:US20100188651A1

    公开(公告)日:2010-07-29

    申请号:US12663788

    申请日:2008-07-01

    IPC分类号: G01N21/47 G01N21/59 G01N21/00

    CPC分类号: G01N21/896 G01N21/59

    摘要: An apparatus that can measure both haze and clarity on a web moving at conventional manufacturing speeds. The apparatus uses an integrating sphere and a novel mirror arrangement. With this arrangement, the invention can utilize a calibration curve created using known samples over the range of measurement desired to convert in real time, and the response of two photo detectors that measure the wide and low angle scattering signals, to deduce the desired optical property values. This approach significantly increases the speed and response of sensor and enables either on-line single point or full web scanning for uniformity measurement and control.

    摘要翻译: 可以测量以传统制造速度移动的幅材上的雾度和透明度的装置。 该装置使用积分球和新颖的反射镜装置。 利用这种布置方式,本发明可以利用在期望实时转换的测量范围内使用已知样品产生的校准曲线,以及测量宽和低角度散射信号的两个光电检测器的响应,以推导所需的光学特性 价值观。 这种方法显着提高了传感器的速度和响应,并可实现在线单点扫描或全幅扫描以进行均匀性测量和控制。