发明申请
- 专利标题: HIGH RESOLUTION AUTOFOCUS INSPECTION SYSTEM
- 专利标题(中): 高分辨率自动检测系统
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申请号: US13809440申请日: 2011-07-13
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公开(公告)号: US20130113919A1公开(公告)日: 2013-05-09
- 发明人: Yi Qiao , Jack W. Lai , Jeffrey J. Fontaine , Steven C. Reed , Catherine P. Tarnowski , David L. Hofeldt
- 申请人: Yi Qiao , Jack W. Lai , Jeffrey J. Fontaine , Steven C. Reed , Catherine P. Tarnowski , David L. Hofeldt
- 申请人地址: US MN ST. PAUL
- 专利权人: 3M INNOVATIVE PROPERTIES COMPANY
- 当前专利权人: 3M INNOVATIVE PROPERTIES COMPANY
- 当前专利权人地址: US MN ST. PAUL
- 国际申请: PCT/US2011/043851 WO 20110713
- 主分类号: G01N21/95
- IPC分类号: G01N21/95 ; H04N7/18
摘要:
An inspection device comprises a camera assembly including an objective lens that captures and collimates light associated with an object being inspected, an image forming lens that forms an image of the object based on the collimated light, and a camera that renders the image. The camera assembly defines a focal point distance from the objective lens that defines a focal point of the camera assembly. The inspection device comprises an optical sensor positioned to detect an actual distance between the objective lens and the object, an actuator that controls positioning of the objective lens to control the actual distance between the objective lens and the object, and a control unit that receives signals from the optical sensor indicative of the actual distance. Control signals from the control unit can control the actuator to adjust the actual distance such that the actual distance substantially equals the focal point distance.
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