Process for manufacturing copper foil on a metal carrier substrate
    2.
    发明授权
    Process for manufacturing copper foil on a metal carrier substrate 失效
    在金属载体基板上制造铜箔的方法

    公开(公告)号:US06770976B2

    公开(公告)日:2004-08-03

    申请号:US10074988

    申请日:2002-02-13

    CPC classification number: C25D1/04 H05K3/025

    Abstract: A method and apparatus for forming a relatively thin releasable layer of copper on a carrier substrate. First, a separation facilitating layer is provided on the carrier substrate. A layer of vapor-deposited copper is then formed over the separation facilitating layer to protect the separation facilitating layer during subsequent processing. Thereafter, the thickness of the copper layer is increased by the electrodeposition of copper onto the vapor-deposited layer. The copper layer is applied to a dielectric and is released from the carrier substrate at the separation facilitating layer.

    Abstract translation: 一种用于在载体基底上形成相对薄的可释放铜层的方法和装置。 首先,在载体基板上设置分离促进层。 然后在分离促进层上形成一层蒸汽沉积的铜,以在随后的处理期间保护分离促进层。 此后,通过将铜电沉积到气相沉积层上,铜层的厚度增加。 将铜层施加到电介质上,并在分离促进层从载体衬底释放。

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