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    Method And Apparatus For Localized Bonding
    2.
    发明申请
    Method And Apparatus For Localized Bonding 审中-公开
    用于局部粘合的方法和装置

    公开(公告)号：US20080113160A1

    公开(公告)日：2008-05-15

    申请号：US11559831

    申请日：2006-11-14

    申请人： Andres Fernandez ,  Bryan P. Staker ,  Alexander P. Kindwall ,  Windsor E. Owens

    发明人： Andres Fernandez ,  Bryan P. Staker ,  Alexander P. Kindwall ,  Windsor E. Owens

    IPC分类号： B32B7/14 ,  B32B37/02 ,  B32B37/14

    CPC分类号： B32B37/1292 ,  B32B7/12 ,  B32B2309/68 ,  B32B2457/00 ,  B81C3/001 ,  B81C2203/032 ,  B81C2203/035 ,  Y10T428/24612 ,  Y10T428/2462

    摘要： One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.

    摘要翻译： 在待结合的一个，全部或一些元件的接合表面中形成一个或多个空腔。 这些空腔用作接合材料的接收器，并且是键的位置。 空腔具有足够的尺寸和形状，使得它们的体积大于形成结合的粘合材料的体积。 这确保了当元件彼此接触以配合时，可以在凝固成粘合之前流动的粘合材料将流入空腔中，并且不会阻碍部件的分离。 这允许零件与标称零分离配合。 一旦固化，接合材料在每个空腔内形成局部粘合。 可以使用不同的腔体形状，例如矩形，圆形或可以用粘合剂材料注射或填充的任何其它形状。

    Focusing methods and optical systems and assemblies using the same
    4.
    发明授权
    Focusing methods and optical systems and assemblies using the same 有权
    聚焦方法和使用其的光学系统和组件

    公开(公告)号：US08422031B2

    公开(公告)日：2013-04-16

    申请号：US12947367

    申请日：2010-11-16

    申请人： Dale Buermann ,  Alexander P. Kindwall

    发明人： Dale Buermann ,  Alexander P. Kindwall

    IPC分类号： G01B11/24 ,  G01B11/30

    CPC分类号： G02B21/247 ,  G02B21/245

    摘要： A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes determining relative separation measured between the reflected light beams and determining a degree-of-focus of the optical system with respect to the sample based upon the relative separation.

    摘要翻译： 一种用于控制光学系统的焦点的方法。 该方法包括将一对入射光束提供给共轭透镜。 入射光束被透镜引导以朝向焦点区域会聚。 该方法还包括用邻近聚焦区域定位的物体反射入射光束。 反射光束返回并传播通过透镜。 该方法还包括确定在反射光束之间测量的相对间隔，并基于相对间隔确定光学系统相对于样品的焦度。

    Charging Guard With Paschen Stacking
    5.
    发明申请
    Charging Guard With Paschen Stacking 有权
    充电保护与Paschen堆叠

    公开(公告)号：US20080112038A1

    公开(公告)日：2008-05-15

    申请号：US11559825

    申请日：2006-11-14

    申请人： Bryan P. Staker ,  Andres Fernandez ,  Windsor Owens ,  Alexander P. Kindwall

    发明人： Bryan P. Staker ,  Andres Fernandez ,  Windsor Owens ,  Alexander P. Kindwall

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841

    摘要： A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

    摘要翻译： 在相邻电极之间设置有基于MEMS的反射镜，以便能够承受相对较高的施加电压，从而基本上减少暴露于不受控制的表面电位。 基于MEMS的反射镜，因此避免了电压漂移，并具有改进的镜面位置稳定性。 选择沟槽尺寸，使得施加在每个相邻电极对之间的电压保持在预定义的限度内。 诸如二氧化硅的绝缘层电隔离每对相邻的电极。 每个绝缘层部分地在相关联的沟槽上方延伸，并且其特征在于相同的高度和宽度尺寸。

    FOCUSING METHODS AND OPTICAL SYSTEMS AND ASSEMBLIES USING THE SAME
    6.
    发明申请
    FOCUSING METHODS AND OPTICAL SYSTEMS AND ASSEMBLIES USING THE SAME 有权
    聚焦方法和光学系统和使用它的组件

    公开(公告)号：US20110188053A1

    公开(公告)日：2011-08-04

    申请号：US12947367

    申请日：2010-11-16

    申请人： DALE BUERMANN ,  ALEXANDER P. KINDWALL

    发明人： DALE BUERMANN ,  ALEXANDER P. KINDWALL

    IPC分类号： G01B11/24 ,  G01B11/14

    CPC分类号： G02B21/247 ,  G02B21/245

    摘要： A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes determining relative separation measured between the reflected light beams and determining a degree-of-focus of the optical system with respect to the sample based upon the relative separation.

    摘要翻译： 一种用于控制光学系统的焦点的方法。 该方法包括将一对入射光束提供给共轭透镜。 入射光束被透镜引导以朝向焦点区域会聚。 该方法还包括用邻近聚焦区域定位的物体反射入射光束。 反射光束返回并传播通过透镜。 该方法还包括确定在反射光束之间测量的相对间隔，并基于相对间隔确定光学系统相对于样品的焦度。

    Charging guard with paschen stacking
    7.
    发明授权
    Charging guard with paschen stacking 有权
    充电保护箱与paschen堆叠

    公开(公告)号：US07508572B2

    公开(公告)日：2009-03-24

    申请号：US11559825

    申请日：2006-11-14

    申请人： Bryan P. Staker ,  Andres Fernandez ,  Windsor Owens ,  Alexander P. Kindwall

    发明人： Bryan P. Staker ,  Andres Fernandez ,  Windsor Owens ,  Alexander P. Kindwall

    IPC分类号： G02B26/00 ,  G02B26/08 ,  G02F1/29

    CPC分类号： G02B26/0841

    摘要： A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

    摘要翻译： 在相邻电极之间设置有基于MEMS的反射镜，以便能够承受相对较高的施加电压，从而基本上减少暴露于不受控制的表面电位。 基于MEMS的反射镜，因此避免了电压漂移，并具有改进的镜面位置稳定性。 选择沟槽尺寸，使得施加在每个相邻电极对之间的电压保持在预定义的限度内。 诸如二氧化硅的绝缘层电隔离每对相邻的电极。 每个绝缘层部分地在相关联的沟槽上方延伸，并且其特征在于相同的高度和宽度尺寸。

    ARRAY OF GRADUATED PRE-TILTED MEMS MIRRORS
    8.
    发明申请
    ARRAY OF GRADUATED PRE-TILTED MEMS MIRRORS 审中-公开
    研磨抛光MEMS微镜阵列

    公开(公告)号：US20080137172A1

    公开(公告)日：2008-06-12

    申请号：US11567723

    申请日：2006-12-06

    申请人： Bryan P. Staker ,  Andres Fernandez ,  Windsor E. Owens ,  Alexander P. Kindwall

    发明人： Bryan P. Staker ,  Andres Fernandez ,  Windsor E. Owens ,  Alexander P. Kindwall

    IPC分类号： G02B26/00

    CPC分类号： G02B6/3556 ,  G02B6/357 ,  G02B26/0841

    摘要： An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.

    摘要翻译： 在平面基板上形成MEMS器件的阵列，其具有在多个环形区域或扇区中的每一个中具有基本相同结构的多个MEMS反射镜，其中每个区域中的MEMS反射镜具有相同的预倾斜。 预倾斜是通过将每个双轴可倾斜镜嵌入预倾斜的微平台或万向节来实现的。 在具体实施例中，为每个微反射镜提供预选的预倾角的一个微平台，并且提供具有与预倾斜一致的形状的底层电极。 在具体实施例中，环形区域是相邻的椭圆形或椭圆形区域。 通过预倾斜，意味着微镜的静止状态或非激活状态使得来自固定源的反射光束被引导到目标阵列的中心。

    Apparatus for multiple positioning of a planar sample at a repeatable distance and angle from a testing device
    9.
    发明授权
    Apparatus for multiple positioning of a planar sample at a repeatable distance and angle from a testing device 有权
    用于以与来自测试装置的重复距离和角度多个定位平面样品的装置

    公开(公告)号：US6084666A

    公开(公告)日：2000-07-04

    申请号：US233692

    申请日：1999-01-19

    申请人： Alexander P. Kindwall ,  Dale Buermann

    发明人： Alexander P. Kindwall ,  Dale Buermann

    IPC分类号： G01N21/01

    CPC分类号： G01N21/01

    摘要： An apparatus for rotationally positioning a disk on a stationary stage at a constant and repeatable distance and angle for a device to perform an operation on several positions of the disk surface is disclosed. The disk apparatus has a manipulating member that operates from a central portion of the stationary stage. The member raises the disk, rotates the disk to a new position and sets the disk back down on a planar portion of the same stationary stage. The apparatus uses vacuum to secure the disk to the stage and to the member during manipulation. The member is raised by a spring and lowered by vacuum. The apparatus is easily incorporated into an optical system for performing reflectance and transmitance on both side of the disk simultaneously allowing for the analyses of the disk layers for composition and consistency.

    摘要翻译： 公开了一种用于以恒定且可重复的距离和角度将盘定位在固定台上的装置，用于使设备在盘表面的多个位置上执行操作。 盘装置具有从固定台的中心部分操作的操作构件。 该成员升起磁盘，将磁盘旋转到一个新位置，并将磁盘设置在相同固定平台的平面部分上。 该装置在操作期间使用真空将盘固定到台架和构件上。 该构件由弹簧升起并由真空降低。 该装置容易地结合到光学系统中，用于在盘的两侧执行反射和透射，同时允许分析磁盘层的组成和一致性。