Semiconductor wafer and manufacturing method thereof
    81.
    发明申请
    Semiconductor wafer and manufacturing method thereof 失效
    半导体晶片及其制造方法

    公开(公告)号:US20050176208A1

    公开(公告)日:2005-08-11

    申请号:US11029648

    申请日:2005-01-06

    Applicant: Hiroaki Uchida

    Inventor: Hiroaki Uchida

    CPC classification number: H01L27/12 H01L21/86 Y10S438/975

    Abstract: The present invention provides a semiconductor wafer comprising an insulated board of sapphire or the like having translucency, which is provided with a positioning orientation flat at a peripheral portion thereof, and a silicon thin film formed over the entire one surface of the insulated board. In the semiconductor wafer, ions are implanted in an area containing the orientation flat at a peripheral portion of the silicon thin film to amorphize silicon. Thus, the translucency at the amorphized spot is eliminated and accurate positioning using the conventional optical sensor can be performed.

    Abstract translation: 本发明提供了一种半导体晶片,其包括半导体的蓝宝石等的绝缘板,其在其周边部分设置有定位取向平面,以及形成在绝缘板的整个表面上的硅薄膜。 在半导体晶片中,将离子注入到在硅薄膜的周边部分包含定向平面的区域中以将硅非晶硅化。 因此,消除了非晶化点处的半透明度,并且可以执行使用常规光学传感器的精确定位。

    System for integrating a circuit on an isolation layer and method thereof
    84.
    发明申请
    System for integrating a circuit on an isolation layer and method thereof 有权
    用于将电路集成在隔离层上的系统及其方法

    公开(公告)号:US20050082623A1

    公开(公告)日:2005-04-21

    申请号:US10750752

    申请日:2004-01-02

    Applicant: Wein-Town Sun

    Inventor: Wein-Town Sun

    Abstract: A method for integrating a system on an isolation layer. A first isolation substrate including a first circuit deposition region and a first substrate-combining region, and a second isolation substrate including a second circuit deposition region and a second substrate-combining region are provided. Next, a first circuit and a, second circuit are respectively formed on the first circuit deposition region and the second circuit deposition region. Next, substrate-connecting elements are formed to connect the first substrate-combining region to the second substrate-combining region. Finally, electrical connecting elements are formed to electrically connect the first circuit and the second circuit.

    Abstract translation: 一种在隔离层上集成系统的方法。 提供了包括第一电路淀积区域和第一衬底组合区域的第一隔离衬底和包括第二电路淀积区域和第二衬底组合区域的第二隔离衬底。 接下来,第一电路和第二电路分别形成在第一电路淀积区域和第二电路淀积区域上。 接下来,形成衬底连接元件以将第一衬底组合区域连接到第二衬底组合区域。 最后,形成电连接元件以电连接第一电路和第二电路。

    Semiconductor device and method for manufacturing the same
    85.
    发明申请
    Semiconductor device and method for manufacturing the same 有权
    半导体装置及其制造方法

    公开(公告)号:US20050082537A1

    公开(公告)日:2005-04-21

    申请号:US10963822

    申请日:2004-10-14

    Abstract: A semiconductor device that can be manufactured with a reduced cost by decreasing the number of masks is disclosed, and a method for manufacturing the semiconductor device is disclosed. The method for manufacturing the semiconductor device comprises the steps of: forming a semiconductor layer 3 having a source and a drain regions 10, 11, and LDD regions 16, 17; a gate insulating film 5; and a gate electrode 6; forming a first and a second interlayer insulating films 24, 25 over the gate electrode 6 and the gate insulating film 5; forming contact holes 25a, 25c to these interlayer insulating films so as to be located over each of the source region and the drain region; and an opening portion 25b to these interlayer insulating films so as to be located over the gate electrode and the LDD region; forming a second gate electrode 26b by a conductive film in the opening portion so as to cover the gate electrode and the LDD region; and a pixel electrode 26a over the second interlayer insulating film; removing the gate insulating film in the contact hole; and forming wirings 27, 28 connected to each the source region and the drain region.

    Abstract translation: 公开了可以通过减少掩模数而降低成本的半导体器件,并且公开了一种用于制造半导体器件的方法。 制造半导体器件的方法包括以下步骤:形成具有源极和漏极区域10,11以及LDD区域16,17的半导体层3; 栅极绝缘膜5; 和栅电极6; 在栅极电极6和栅极绝缘膜5上形成第一和第二层间绝缘膜24,25; 向这些层间绝缘膜形成接触孔25a,25c,以便位于源极区域和漏极区域之上; 和这些层间绝缘膜的开口部分25b,以便位于栅电极和LDD区之上; 通过开口部中的导电膜形成第二栅电极26b,以覆盖栅电极和LDD区; 以及在第二层间绝缘膜上的像素电极26a; 去除接触孔中的栅极绝缘膜; 以及形成连接到每个源极区域和漏极区域的布线27,28。

    SOI substrate and method of producing the same
    90.
    发明授权
    SOI substrate and method of producing the same 失效
    SOI衬底及其制造方法

    公开(公告)号:US5658809A

    公开(公告)日:1997-08-19

    申请号:US403518

    申请日:1995-03-13

    CPC classification number: H01L21/26533 H01L21/76243

    Abstract: A method of producing an SOI substrate having a single-crystal silicon layer on a buried oxide layer in an electrically insulating state from the substrate by implanting oxygen ions into a single crystal silicon substrate and practicing an anneal processing in an inert gas atmosphere at high temperatures to form the buried oxide layer. After the anneal processing in which the thickness of the buried oxide layer becomes a theoretical value in conformity with the thickness of the buried oxide layer formed by the implanted oxygen, the oxidation processing of the substrate is carried out in a high temperature oxygen atmosphere.

    Abstract translation: 一种通过将氧离子注入单晶硅衬底并在高温下在惰性气体气氛中进行退火处理的方法来制造具有电绝缘状态的掩埋氧化层上的单晶硅层的SOI衬底 以形成掩埋氧化物层。 在掩埋氧化物层的厚度成为与由注入氧形成的掩埋氧化物层的厚度一致的理论值的退火处理之后,基板的氧化处理在高温氧气氛中进行。

Patent Agency Ranking